CA988055A - Method of applying a coating by sputtering - Google Patents

Method of applying a coating by sputtering

Info

Publication number
CA988055A
CA988055A CA034,295A CA34295A CA988055A CA 988055 A CA988055 A CA 988055A CA 34295 A CA34295 A CA 34295A CA 988055 A CA988055 A CA 988055A
Authority
CA
Canada
Prior art keywords
sputtering
coating
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA034,295A
Inventor
George C. Lane
Lawrence F. Herte
Frank R. Kloss
James R. Skinner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Warner Lambert Co LLC
Original Assignee
Warner Lambert Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Warner Lambert Co LLC filed Critical Warner Lambert Co LLC
Application granted granted Critical
Publication of CA988055A publication Critical patent/CA988055A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26B—HAND-HELD CUTTING TOOLS NOT OTHERWISE PROVIDED FOR
    • B26B21/00—Razors of the open or knife type; Safety razors or other shaving implements of the planing type; Hair-trimming devices involving a razor-blade; Equipment therefor
    • B26B21/54—Razor-blades
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Forests & Forestry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Dry Shavers And Clippers (AREA)
CA034,295A 1967-11-06 1968-11-04 Method of applying a coating by sputtering Expired CA988055A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68092667A 1967-11-06 1967-11-06
US68079467A 1967-11-06 1967-11-06

Publications (1)

Publication Number Publication Date
CA988055A true CA988055A (en) 1976-04-27

Family

ID=27102516

Family Applications (1)

Application Number Title Priority Date Filing Date
CA034,295A Expired CA988055A (en) 1967-11-06 1968-11-04 Method of applying a coating by sputtering

Country Status (13)

Country Link
US (2) US3632494A (en)
JP (1) JPS4931857B1 (en)
BE (1) BE723339A (en)
CA (1) CA988055A (en)
CH (1) CH533175A (en)
DE (1) DE1807097A1 (en)
DK (1) DK127299B (en)
ES (1) ES359889A1 (en)
FR (1) FR1590800A (en)
GB (1) GB1251814A (en)
LU (1) LU57247A1 (en)
NL (1) NL6815810A (en)
SE (1) SE356260B (en)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU485283B2 (en) * 1971-05-18 1974-10-03 Warner-Lambert Company Method of making a razorblade
US3761374A (en) * 1971-07-09 1973-09-25 Gillette Co Process for producing an improved cutting tool
GB1420941A (en) * 1972-04-08 1976-01-14 Wilkinson Sword Ltd Razor blades
US3918100A (en) * 1974-05-13 1975-11-11 Us Navy Sputtering of bone on prostheses
JPS5291650A (en) * 1976-01-29 1977-08-02 Toshiba Corp Continuous gas plasma etching apparatus
US4151064A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Apparatus for sputtering cylinders
US4284490A (en) * 1978-09-28 1981-08-18 Coulter Systems Corporation R.F. Sputtering apparatus including multi-network power supply
FR2512070A1 (en) * 1981-09-03 1983-03-04 Commissariat Energie Atomique HIGH HARD CHROMIUM LAYER, RESISTANT TO BOTH WEAR, DEFORMATION, FATIGUE SURFACES AND CORROSION
US4428811A (en) 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of a group IVb metal
US4491509A (en) * 1984-03-09 1985-01-01 At&T Technologies, Inc. Methods of and apparatus for sputtering material onto a substrate
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
US4661233A (en) * 1985-07-05 1987-04-28 Westinghouse Electric Corp. Cathode/ground shield arrangement in a sputter coating apparatus
US4610775A (en) * 1985-07-26 1986-09-09 Westinghouse Electric Corp. Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US5798027A (en) * 1988-02-08 1998-08-25 Optical Coating Laboratory, Inc. Process for depositing optical thin films on both planar and non-planar substrates
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US5225057A (en) * 1988-02-08 1993-07-06 Optical Coating Laboratory, Inc. Process for depositing optical films on both planar and non-planar substrates
US5098540A (en) * 1990-02-12 1992-03-24 General Electric Company Method for depositing chromium coatings for titanium oxidation protection
EP0757615B1 (en) * 1994-04-25 2004-03-31 The Gillette Company Process of coating a layer of amorphous diamond on blades
GB9506494D0 (en) * 1995-03-30 1995-05-17 Mcphersons Ltd Knife blades
US5961798A (en) * 1996-02-13 1999-10-05 Diamond Black Technologies, Inc. System and method for vacuum coating of articles having precise and reproducible positioning of articles
WO1997032672A1 (en) * 1996-03-04 1997-09-12 Polar Materials, Inc. Method for bulk coating using a plasma process
US6348679B1 (en) 1998-03-17 2002-02-19 Ameritherm, Inc. RF active compositions for use in adhesion, bonding and coating
US6105261A (en) * 1998-05-26 2000-08-22 Globix Technologies, Inc. Self sharpening blades and method for making same
US6649888B2 (en) 1999-09-23 2003-11-18 Codaco, Inc. Radio frequency (RF) heating system
US6669824B2 (en) 2000-07-10 2003-12-30 Unaxis Usa, Inc. Dual-scan thin film processing system
US6495010B2 (en) 2000-07-10 2002-12-17 Unaxis Usa, Inc. Differentially-pumped material processing system
US7153399B2 (en) * 2001-08-24 2006-12-26 Nanonexus, Inc. Method and apparatus for producing uniform isotropic stresses in a sputtered film
US6878419B2 (en) * 2001-12-14 2005-04-12 3M Innovative Properties Co. Plasma treatment of porous materials
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) * 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US7866342B2 (en) * 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8555921B2 (en) * 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
SE527180C2 (en) * 2003-08-12 2006-01-17 Sandvik Intellectual Property Rack or scraper blades with abrasion resistant layer and method of manufacture thereof
US9180599B2 (en) * 2004-09-08 2015-11-10 Bic-Violex S.A. Method of deposition of a layer on a razor blade edge and razor blade
WO2006079360A1 (en) * 2005-01-27 2006-08-03 Bic Violex Sa Razor blade, razor head, razor and method of manufacturing a razor blade
US8322253B2 (en) * 2005-07-08 2012-12-04 Stanley Black & Decker, Inc. Method of manufacturing a utility knife blade having an induction hardened cutting edge
US20070224350A1 (en) * 2006-03-21 2007-09-27 Sandvik Intellectual Property Ab Edge coating in continuous deposition line
US8932430B2 (en) * 2011-05-06 2015-01-13 Axcelis Technologies, Inc. RF coupled plasma abatement system comprising an integrated power oscillator
US8443519B2 (en) * 2006-09-15 2013-05-21 The Gillette Company Blade supports for use in shaving systems
GB2469975B (en) * 2008-03-04 2012-06-13 Irwin Ind Tool Co Tools having compacted powder metal work surfaces, and method
WO2009132822A2 (en) * 2008-04-28 2009-11-05 Cemecon Ag Device and method for pretreating and coating bodies
EP2344681B1 (en) * 2008-09-19 2017-08-30 Acme United Corporation Coatings for cutting implements
JP5830823B2 (en) * 2009-07-15 2015-12-09 エバレデイ バツテリ カンパニー インコーポレーテツド Razor blade technology
US8551117B2 (en) * 2011-03-04 2013-10-08 Soft Lines International, Ltd. Handheld exfoliating device
US20130014396A1 (en) * 2011-07-14 2013-01-17 Kenneth James Skrobis Razor blades having a wide facet angle
JP6019310B1 (en) * 2015-04-16 2016-11-02 ナルックス株式会社 Vapor deposition apparatus and manufacturing method including film forming process by vapor deposition apparatus
TWI674168B (en) * 2015-07-27 2019-10-11 美商應用材料股份有限公司 Lift pin actuator,substrate support assembly, and method for utilizing substrate support assembly
US10045795B2 (en) 2016-04-07 2018-08-14 Soft Lines International, Ltd. Handheld cosmetic device with pivoting head
CN106637140B (en) * 2016-11-30 2018-08-10 江苏菲沃泰纳米科技有限公司 A kind of nano-coating equipment planet gyration frame equipments for goods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA457378A (en) * 1949-06-14 Gillette Safety Razor Company Fine edged cutting implements and the manufacture thereof
NL123398C (en) * 1959-12-31
US3294661A (en) * 1962-07-03 1966-12-27 Ibm Process of coating, using a liquid metal substrate holder
US3336211A (en) * 1963-04-30 1967-08-15 Litton Systems Inc Reduction of oxides by ion bombardment
US3310424A (en) * 1963-05-14 1967-03-21 Litton Systems Inc Method for providing an insulating film on a substrate
DE1204106B (en) * 1963-06-10 1965-10-28 Eversharp Inc razor blade
US3347772A (en) * 1964-03-02 1967-10-17 Schjeldahl Co G T Rf sputtering apparatus including a capacitive lead-in for an rf potential
FR1428243A (en) * 1964-03-02 1966-02-11 Schjeldahl Co G T Projection method and apparatus
US3283117A (en) * 1965-04-22 1966-11-01 Philip Morris Inc Method for coating cutting edges of sharpened instruments
US3480483A (en) * 1965-05-06 1969-11-25 Wilkinson Sword Ltd Razor blades and methods of manufacture thereof

Also Published As

Publication number Publication date
FR1590800A (en) 1970-04-20
DE1807097A1 (en) 1969-06-04
JPS4931857B1 (en) 1974-08-26
SE356260B (en) 1973-05-21
GB1251814A (en) 1971-11-03
LU57247A1 (en) 1969-02-11
US3635811A (en) 1972-01-18
DK127299B (en) 1973-10-15
US3632494A (en) 1972-01-04
ES359889A1 (en) 1970-06-16
BE723339A (en) 1969-04-16
CH533175A (en) 1973-01-31
NL6815810A (en) 1969-05-08

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