FR1428243A - Projection method and apparatus - Google Patents

Projection method and apparatus

Info

Publication number
FR1428243A
FR1428243A FR7665A FR7665A FR1428243A FR 1428243 A FR1428243 A FR 1428243A FR 7665 A FR7665 A FR 7665A FR 7665 A FR7665 A FR 7665A FR 1428243 A FR1428243 A FR 1428243A
Authority
FR
France
Prior art keywords
projection method
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7665A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schjeldahl Co G T
GT Schjeldahl Co
Original Assignee
Schjeldahl Co G T
GT Schjeldahl Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schjeldahl Co G T, GT Schjeldahl Co filed Critical Schjeldahl Co G T
Application granted granted Critical
Publication of FR1428243A publication Critical patent/FR1428243A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
FR7665A 1964-03-02 1965-03-02 Projection method and apparatus Expired FR1428243A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34852564A 1964-03-02 1964-03-02

Publications (1)

Publication Number Publication Date
FR1428243A true FR1428243A (en) 1966-02-11

Family

ID=23368410

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7665A Expired FR1428243A (en) 1964-03-02 1965-03-02 Projection method and apparatus

Country Status (2)

Country Link
FR (1) FR1428243A (en)
GB (1) GB1103653A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537973A (en) * 1967-09-15 1970-11-03 Varian Associates Sequential sputtering with movable targets
US3635811A (en) * 1967-11-06 1972-01-18 Warner Lambert Co Method of applying a coating
US3779891A (en) * 1971-10-26 1973-12-18 Eastman Kodak Co Triode sputtering apparatus
EP0020130A1 (en) * 1979-05-30 1980-12-10 Marlow Ropes Limited Ropes
US5401141A (en) * 1991-05-14 1995-03-28 Siemens Aktiengesellschaft Multiple-flow liquid ring pump

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627663A (en) * 1968-03-25 1971-12-14 Ibm Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering
CN114455852B (en) * 2021-12-28 2023-07-25 凯盛信息显示材料(洛阳)有限公司 Magnetron sputtering glass coating device with adjustable sputtering range
CN114959560A (en) * 2022-05-30 2022-08-30 湖北华鑫光电有限公司 Coated lens for weakening ghost effect and coating method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537973A (en) * 1967-09-15 1970-11-03 Varian Associates Sequential sputtering with movable targets
US3635811A (en) * 1967-11-06 1972-01-18 Warner Lambert Co Method of applying a coating
US3779891A (en) * 1971-10-26 1973-12-18 Eastman Kodak Co Triode sputtering apparatus
EP0020130A1 (en) * 1979-05-30 1980-12-10 Marlow Ropes Limited Ropes
US5401141A (en) * 1991-05-14 1995-03-28 Siemens Aktiengesellschaft Multiple-flow liquid ring pump

Also Published As

Publication number Publication date
GB1103653A (en) 1968-02-21

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