CA983581A - Method and apparatus for measuring by ionization, the flux of vapour emitted during vacuum vaporization - Google Patents

Method and apparatus for measuring by ionization, the flux of vapour emitted during vacuum vaporization

Info

Publication number
CA983581A
CA983581A CA163,206A CA163206A CA983581A CA 983581 A CA983581 A CA 983581A CA 163206 A CA163206 A CA 163206A CA 983581 A CA983581 A CA 983581A
Authority
CA
Canada
Prior art keywords
ionization
flux
measuring
emitted during
during vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA163,206A
Other languages
English (en)
Other versions
CA163206S (en
Inventor
Pierre Genequand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Application granted granted Critical
Publication of CA983581A publication Critical patent/CA983581A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
CA163,206A 1972-02-09 1973-02-08 Method and apparatus for measuring by ionization, the flux of vapour emitted during vacuum vaporization Expired CA983581A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH191872A CH570610A5 (cs) 1972-02-09 1972-02-09

Publications (1)

Publication Number Publication Date
CA983581A true CA983581A (en) 1976-02-10

Family

ID=4221617

Family Applications (1)

Application Number Title Priority Date Filing Date
CA163,206A Expired CA983581A (en) 1972-02-09 1973-02-08 Method and apparatus for measuring by ionization, the flux of vapour emitted during vacuum vaporization

Country Status (12)

Country Link
US (1) US3842267A (cs)
JP (1) JPS4889794A (cs)
BE (1) BE795278A (cs)
CA (1) CA983581A (cs)
CH (1) CH570610A5 (cs)
DE (1) DE2305102A1 (cs)
FR (1) FR2171824A5 (cs)
GB (1) GB1394155A (cs)
IE (1) IE37274B1 (cs)
IT (1) IT992543B (cs)
LU (1) LU66996A1 (cs)
NL (1) NL7301762A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
US4010366A (en) * 1975-09-22 1977-03-01 Xerox Corporation Measurement of the mass and charge of charged particles
JPS6311808A (ja) * 1986-07-02 1988-01-19 Mitsubishi Electric Corp 膜厚監視装置
TW222650B (cs) * 1991-04-01 1994-04-21 Dow Corning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2694151A (en) * 1953-06-26 1954-11-09 Cons Eng Corp Mass spectrometry
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
US2958774A (en) * 1957-05-07 1960-11-01 Ca Nat Research Council Omegatron with orbit increment detection
NL109528C (cs) * 1958-03-15
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output

Also Published As

Publication number Publication date
CH570610A5 (cs) 1975-12-15
FR2171824A5 (cs) 1973-09-21
GB1394155A (en) 1975-05-14
IT992543B (it) 1975-09-30
IE37274L (en) 1973-08-09
JPS4889794A (cs) 1973-11-22
BE795278A (fr) 1973-08-09
DE2305102A1 (de) 1973-08-16
IE37274B1 (en) 1977-06-22
US3842267A (en) 1974-10-15
NL7301762A (cs) 1973-08-13
LU66996A1 (cs) 1973-04-19

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