IT992543B - Dispositivo per la misura mediante ionizzazione del flusso di vapore emesso durante l evaporazione sot to vuoto - Google Patents

Dispositivo per la misura mediante ionizzazione del flusso di vapore emesso durante l evaporazione sot to vuoto

Info

Publication number
IT992543B
IT992543B IT20128/73A IT2012873A IT992543B IT 992543 B IT992543 B IT 992543B IT 20128/73 A IT20128/73 A IT 20128/73A IT 2012873 A IT2012873 A IT 2012873A IT 992543 B IT992543 B IT 992543B
Authority
IT
Italy
Prior art keywords
ionization
measuring
flow
vacuum evaporation
emitted during
Prior art date
Application number
IT20128/73A
Other languages
English (en)
Italian (it)
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Application granted granted Critical
Publication of IT992543B publication Critical patent/IT992543B/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/30Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
IT20128/73A 1972-02-09 1973-02-07 Dispositivo per la misura mediante ionizzazione del flusso di vapore emesso durante l evaporazione sot to vuoto IT992543B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH191872A CH570610A5 (cs) 1972-02-09 1972-02-09

Publications (1)

Publication Number Publication Date
IT992543B true IT992543B (it) 1975-09-30

Family

ID=4221617

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20128/73A IT992543B (it) 1972-02-09 1973-02-07 Dispositivo per la misura mediante ionizzazione del flusso di vapore emesso durante l evaporazione sot to vuoto

Country Status (12)

Country Link
US (1) US3842267A (cs)
JP (1) JPS4889794A (cs)
BE (1) BE795278A (cs)
CA (1) CA983581A (cs)
CH (1) CH570610A5 (cs)
DE (1) DE2305102A1 (cs)
FR (1) FR2171824A5 (cs)
GB (1) GB1394155A (cs)
IE (1) IE37274B1 (cs)
IT (1) IT992543B (cs)
LU (1) LU66996A1 (cs)
NL (1) NL7301762A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
US4010366A (en) * 1975-09-22 1977-03-01 Xerox Corporation Measurement of the mass and charge of charged particles
JPS6311808A (ja) * 1986-07-02 1988-01-19 Mitsubishi Electric Corp 膜厚監視装置
TW222650B (cs) * 1991-04-01 1994-04-21 Dow Corning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2694151A (en) * 1953-06-26 1954-11-09 Cons Eng Corp Mass spectrometry
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
US2958774A (en) * 1957-05-07 1960-11-01 Ca Nat Research Council Omegatron with orbit increment detection
NL109528C (cs) * 1958-03-15
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output

Also Published As

Publication number Publication date
CH570610A5 (cs) 1975-12-15
FR2171824A5 (cs) 1973-09-21
GB1394155A (en) 1975-05-14
IE37274L (en) 1973-08-09
JPS4889794A (cs) 1973-11-22
BE795278A (fr) 1973-08-09
DE2305102A1 (de) 1973-08-16
IE37274B1 (en) 1977-06-22
CA983581A (en) 1976-02-10
US3842267A (en) 1974-10-15
NL7301762A (cs) 1973-08-13
LU66996A1 (cs) 1973-04-19

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