CA982708A - Ion source with reduced emittance - Google Patents

Ion source with reduced emittance

Info

Publication number
CA982708A
CA982708A CA176,773A CA176773A CA982708A CA 982708 A CA982708 A CA 982708A CA 176773 A CA176773 A CA 176773A CA 982708 A CA982708 A CA 982708A
Authority
CA
Canada
Prior art keywords
ion source
reduced emittance
emittance
reduced
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA176,773A
Other languages
English (en)
Other versions
CA176773S (en
Inventor
John H. Ormrod
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atomic Energy of Canada Ltd AECL
Original Assignee
Atomic Energy of Canada Ltd AECL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy of Canada Ltd AECL filed Critical Atomic Energy of Canada Ltd AECL
Application granted granted Critical
Publication of CA982708A publication Critical patent/CA982708A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
CA176,773A 1972-10-24 1973-07-18 Ion source with reduced emittance Expired CA982708A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29976372A 1972-10-24 1972-10-24

Publications (1)

Publication Number Publication Date
CA982708A true CA982708A (en) 1976-01-27

Family

ID=23156191

Family Applications (1)

Application Number Title Priority Date Filing Date
CA176,773A Expired CA982708A (en) 1972-10-24 1973-07-18 Ion source with reduced emittance

Country Status (6)

Country Link
US (1) US3767952A (cs)
JP (1) JPS49100498A (cs)
CA (1) CA982708A (cs)
FR (1) FR2204099B1 (cs)
GB (1) GB1413602A (cs)
NL (1) NL7312494A (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923432A (ja) * 1982-07-30 1984-02-06 Hitachi Ltd プラズマイオン源
FR2550681B1 (fr) * 1983-08-12 1985-12-06 Centre Nat Rech Scient Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs
JPH0736323B2 (ja) * 1983-08-15 1995-04-19 アプライド マテリアルズ インコーポレーテッド イオン打込み装置
US4649278A (en) * 1985-05-02 1987-03-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Generation of intense negative ion beams
US9386681B2 (en) 2011-05-23 2016-07-05 Schmor Particle Accelerator Consulting Inc. Particle accelerator and method of reducing beam divergence in the particle accelerator

Also Published As

Publication number Publication date
GB1413602A (en) 1975-11-12
FR2204099A1 (cs) 1974-05-17
FR2204099B1 (cs) 1978-04-21
NL7312494A (cs) 1974-04-26
JPS49100498A (cs) 1974-09-24
US3767952A (en) 1973-10-23

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