CA982708A - Ion source with reduced emittance - Google Patents

Ion source with reduced emittance

Info

Publication number
CA982708A
CA982708A CA176,773A CA176773A CA982708A CA 982708 A CA982708 A CA 982708A CA 176773 A CA176773 A CA 176773A CA 982708 A CA982708 A CA 982708A
Authority
CA
Canada
Prior art keywords
ion source
reduced emittance
emittance
reduced
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA176,773A
Other versions
CA176773S (en
Inventor
John H. Ormrod
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atomic Energy of Canada Ltd AECL
Original Assignee
Atomic Energy of Canada Ltd AECL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy of Canada Ltd AECL filed Critical Atomic Energy of Canada Ltd AECL
Application granted granted Critical
Publication of CA982708A publication Critical patent/CA982708A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
CA176,773A 1972-10-24 1973-07-18 Ion source with reduced emittance Expired CA982708A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29976372A 1972-10-24 1972-10-24

Publications (1)

Publication Number Publication Date
CA982708A true CA982708A (en) 1976-01-27

Family

ID=23156191

Family Applications (1)

Application Number Title Priority Date Filing Date
CA176,773A Expired CA982708A (en) 1972-10-24 1973-07-18 Ion source with reduced emittance

Country Status (6)

Country Link
US (1) US3767952A (en)
JP (1) JPS49100498A (en)
CA (1) CA982708A (en)
FR (1) FR2204099B1 (en)
GB (1) GB1413602A (en)
NL (1) NL7312494A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923432A (en) * 1982-07-30 1984-02-06 Hitachi Ltd Plasma ion source
FR2550681B1 (en) * 1983-08-12 1985-12-06 Centre Nat Rech Scient ION SOURCE HAS AT LEAST TWO IONIZATION CHAMBERS, PARTICULARLY FOR THE FORMATION OF CHEMICALLY REACTIVE ION BEAMS
JPH0727766B2 (en) * 1983-08-15 1995-03-29 アプライド マテリアルズ インコーポレーテッド Ion implantation device and ion source device operating method
US4649278A (en) * 1985-05-02 1987-03-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Generation of intense negative ion beams
CA2836816C (en) * 2011-05-23 2018-02-20 Schmor Particle Accelerator Consulting Inc. Particle accelerator and method of reducing beam divergence in the particle accelerator

Also Published As

Publication number Publication date
NL7312494A (en) 1974-04-26
FR2204099A1 (en) 1974-05-17
GB1413602A (en) 1975-11-12
US3767952A (en) 1973-10-23
FR2204099B1 (en) 1978-04-21
JPS49100498A (en) 1974-09-24

Similar Documents

Publication Publication Date Title
AU462348B2 (en) Saf-t-jet
AU468458B2 (en) Lamp assemblies
AU454372B2 (en) Childsafe actuator-overcap
CA999487A (en) Door arrangement
CA978841A (en) Tire with radiation means
CA979120A (en) Magnetron
CA982708A (en) Ion source with reduced emittance
CA998936A (en) Humidifier assembly
CA984979A (en) Ion source
AU464991B2 (en) Variabole resistaance control
AU466344B2 (en) Cycloalkyllactamimides
AU465912B2 (en) Ion source
AU4575372A (en) 2-acyl-5-nitrothiazoles
CA907226A (en) Ion beam sources
CA869077A (en) Ion source
AU411963B2 (en) Ion source
CA819824A (en) Ion source
CA895206A (en) Cobalt-rhenium energy source
AU5491573A (en) Improvements indoor handle assemblies
CA912711A (en) Ion source for slow-ion sputtering
CA903383A (en) Ion implantation
CA891190A (en) Variable rate neutron source
CA1025050A (en) Contrallable current source
CA898318A (en) Humidifying means
CA955989A (en) Humidifier