CA970256A - Process and apparatus for producing semiconductor material - Google Patents

Process and apparatus for producing semiconductor material

Info

Publication number
CA970256A
CA970256A CA138,628A CA138628A CA970256A CA 970256 A CA970256 A CA 970256A CA 138628 A CA138628 A CA 138628A CA 970256 A CA970256 A CA 970256A
Authority
CA
Canada
Prior art keywords
semiconductor material
producing semiconductor
producing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA138,628A
Other languages
English (en)
Other versions
CA138628S (en
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA970256A publication Critical patent/CA970256A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/073—Hollow body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/135—Removal of substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
CA138,628A 1971-04-14 1972-03-30 Process and apparatus for producing semiconductor material Expired CA970256A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712117933 DE2117933A1 (de) 1971-04-14 1971-04-14 Verfahren zum Herstellen von Hohlkörpern aus Halbleitermaterial von beliebiger Länge

Publications (1)

Publication Number Publication Date
CA970256A true CA970256A (en) 1975-07-01

Family

ID=5804619

Family Applications (1)

Application Number Title Priority Date Filing Date
CA138,628A Expired CA970256A (en) 1971-04-14 1972-03-30 Process and apparatus for producing semiconductor material

Country Status (8)

Country Link
US (1) US3748169A (enExample)
BE (1) BE782171A (enExample)
CA (1) CA970256A (enExample)
DE (1) DE2117933A1 (enExample)
FR (1) FR2133623B1 (enExample)
GB (1) GB1347369A (enExample)
IT (1) IT953298B (enExample)
NL (1) NL7202181A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3980044A (en) * 1972-03-06 1976-09-14 Balzers Patent Und Beteiligungs Ag Apparatus for depositing thin coats by vaporization under the simultaneous action of an ionized gas
DE2253411C3 (de) * 1972-10-31 1978-06-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von aus Halbleitermaterial bestehenden, direkt beheizbaren Hohlkörpern für Diffusionszwecke
GB1586959A (en) * 1976-08-11 1981-03-25 Dunlop Ltd Method and apparatus for the production of carbon/carbon composite material
DE2637836C2 (de) * 1976-08-21 1983-12-08 M.A.N. Maschinenfabrik Augsburg-Nuernberg Ag, 8000 Muenchen Vorrichtung zum Vernickeln von Bauteilen
DE2740129A1 (de) * 1976-09-18 1978-03-23 Claude John Lancelot Hunt Verfahren und vorrichtung zur metallbedampfung
US4179530A (en) * 1977-05-20 1979-12-18 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for the deposition of pure semiconductor material
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
US4123989A (en) * 1977-09-12 1978-11-07 Mobil Tyco Solar Energy Corp. Manufacture of silicon on the inside of a tube
DE2847632A1 (de) * 1977-11-19 1979-05-23 Claude John Lancelot Hunt Vakuummetallisierungsvorrichtung
JPS5591968A (en) * 1978-12-28 1980-07-11 Canon Inc Film forming method by glow discharge
DE3204846A1 (de) * 1982-02-11 1983-08-18 Schott Glaswerke, 6500 Mainz Plasmaverfahren zur innenbeschichtung von glasrohren
GB2119278B (en) * 1982-04-13 1987-04-15 Michael Paul Neary Improvements in or relating to a chemical method
US5084542A (en) * 1990-05-31 1992-01-28 E. I. Du Pont De Nemours And Company Epoxy/isocyanate crosslinked coatings containing 1,3-disubstituted imidazole-2-thione catalysts
US6162298A (en) * 1998-10-28 2000-12-19 The B. F. Goodrich Company Sealed reactant gas inlet for a CVI/CVD furnace

Also Published As

Publication number Publication date
FR2133623B1 (enExample) 1974-07-26
DE2117933A1 (de) 1972-10-19
FR2133623A1 (enExample) 1972-12-01
BE782171A (fr) 1972-07-31
US3748169A (en) 1973-07-24
NL7202181A (enExample) 1972-10-17
GB1347369A (en) 1974-02-27
IT953298B (it) 1973-08-10

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