CA967856A - Simultaneous diffusion processing - Google Patents

Simultaneous diffusion processing

Info

Publication number
CA967856A
CA967856A CA102,479A CA102479A CA967856A CA 967856 A CA967856 A CA 967856A CA 102479 A CA102479 A CA 102479A CA 967856 A CA967856 A CA 967856A
Authority
CA
Canada
Prior art keywords
diffusion processing
simultaneous diffusion
simultaneous
processing
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA102,479A
Other languages
English (en)
Other versions
CA102479S (en
Inventor
Vincent J. Lyons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA967856A publication Critical patent/CA967856A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources
    • H10P32/00—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Non-Volatile Memory (AREA)
  • Battery Electrode And Active Subsutance (AREA)
CA102,479A 1970-01-12 1971-01-12 Simultaneous diffusion processing Expired CA967856A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US228770A 1970-01-12 1970-01-12

Publications (1)

Publication Number Publication Date
CA967856A true CA967856A (en) 1975-05-20

Family

ID=21700080

Family Applications (1)

Application Number Title Priority Date Filing Date
CA102,479A Expired CA967856A (en) 1970-01-12 1971-01-12 Simultaneous diffusion processing

Country Status (5)

Country Link
JP (1) JPS4936772B1 (OSRAM)
CA (1) CA967856A (OSRAM)
DE (1) DE2100930A1 (OSRAM)
FR (1) FR2076037B1 (OSRAM)
GB (1) GB1335871A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2930780C2 (de) * 1979-07-28 1982-05-27 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zur Herstellung eines VMOS-Transistors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL140657B (nl) * 1968-06-21 1973-12-17 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting door een diffusiebehandeling en halfgeleiderinrichting, vervaardigd volgens deze werkwijze.

Also Published As

Publication number Publication date
FR2076037A1 (OSRAM) 1971-10-15
JPS4936772B1 (OSRAM) 1974-10-03
GB1335871A (en) 1973-10-31
DE2100930A1 (de) 1971-07-29
FR2076037B1 (OSRAM) 1975-01-10

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