CA920798A - Single interferometer multiple axis laser measuring system - Google Patents

Single interferometer multiple axis laser measuring system

Info

Publication number
CA920798A
CA920798A CA105996A CA105996A CA920798A CA 920798 A CA920798 A CA 920798A CA 105996 A CA105996 A CA 105996A CA 105996 A CA105996 A CA 105996A CA 920798 A CA920798 A CA 920798A
Authority
CA
Canada
Prior art keywords
measuring system
laser measuring
multiple axis
axis laser
single interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA105996A
Other languages
English (en)
Other versions
CA105996S (en
Inventor
B. Sipek Charles
E. Brainard Wallace
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kearney and Trecker Corp
Original Assignee
Kearney and Trecker Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kearney and Trecker Corp filed Critical Kearney and Trecker Corp
Application granted granted Critical
Publication of CA920798A publication Critical patent/CA920798A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CA105996A 1970-03-05 1971-02-19 Single interferometer multiple axis laser measuring system Expired CA920798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1684870A 1970-03-05 1970-03-05

Publications (1)

Publication Number Publication Date
CA920798A true CA920798A (en) 1973-02-13

Family

ID=21779307

Family Applications (1)

Application Number Title Priority Date Filing Date
CA105996A Expired CA920798A (en) 1970-03-05 1971-02-19 Single interferometer multiple axis laser measuring system

Country Status (11)

Country Link
US (1) US3661463A (de)
JP (1) JPS5115267B1 (de)
BE (1) BE763782A (de)
CA (1) CA920798A (de)
CH (1) CH537777A (de)
FR (1) FR2084275A5 (de)
GB (1) GB1343636A (de)
IL (1) IL36344A (de)
IT (1) IT939292B (de)
NL (1) NL145673B (de)
SE (1) SE366830B (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
US4152072A (en) * 1977-02-02 1979-05-01 Litton Systems, Inc. Photosensitive diodes for simplified optical heterodyning and cavity length control
US4261107A (en) * 1980-03-06 1981-04-14 Caterpillar Tractor Co. Coordinate locating device
EP0058673A4 (de) * 1980-08-11 1985-04-03 Colt Ind Operating Corp Laser-mess-system und verfahren fur eine drehbank.
ATE9183T1 (de) * 1980-12-02 1984-09-15 Dr. Johannes Heidenhain Gmbh Verfahren zum schrittweisen messen von geometrischen groessen und vorrichtungen zur durchfuehrung des verfahrens.
US4585379A (en) * 1980-12-27 1986-04-29 Hitachi, Ltd. Precision positioning device
DE3279056D1 (en) * 1982-01-15 1988-10-27 Zeiss Carl Fa Threedimensional interferometric length-measuring device
US4589746A (en) * 1982-05-07 1986-05-20 The Gerber Scientific Instrument Company Dual-axis, single mirror interferometer measuring system
DE3233059C2 (de) * 1982-09-06 1985-03-21 Oerlikon-Boehringer GmbH, 7320 Göppingen Tiefbohrmaschine
JPS5956072A (ja) * 1982-09-21 1984-03-31 株式会社省熱学研究所 乾燥装置
US4643577A (en) * 1983-07-15 1987-02-17 Wero Ohg Roth & Co. Length measuring apparatus based on the dual laser beam interferometer principle
JPS60125497U (ja) * 1984-02-02 1985-08-23 株式会社　シノミヤ 通風乾燥機における乾燥室内の通風装置
US4724525A (en) * 1984-12-12 1988-02-09 Moore Special Tool Co., Inc. Real-time data collection apparatus for use in multi-axis measuring machine
GB8616431D0 (en) * 1986-07-05 1986-08-13 Renishaw Plc Locating co-ordinates of object
EP0306509B1 (de) * 1987-03-06 1990-11-22 Renishaw plc Positionsdeterminierungsapparat
JPS63229250A (ja) * 1987-03-13 1988-09-26 Kitamura Mach Co Ltd マニシングセンタ
US4792228A (en) * 1987-08-20 1988-12-20 Cincinnati Milacron Inc. Position error sensing and feedback apparatus and method
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
WO1993009394A1 (en) * 1991-11-08 1993-05-13 British Technology Group Ltd. Measuring instruments
US5940180A (en) * 1994-10-11 1999-08-17 Giddings & Lewis Laser interferometer measurement system for use with machine tools
US5552888A (en) * 1994-12-02 1996-09-03 Nikon Precision, Inc. Apparatus for measuring position of an X-Y stage
JP5036063B2 (ja) * 2008-06-10 2012-09-26 日本発條株式会社 架空線用テンションバランサ装置および架空線用テンションバランサ防水カバー
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3377111A (en) * 1966-02-15 1968-04-09 Optomechanisms Inc Precision coordinate axes table means
US3515481A (en) * 1966-09-09 1970-06-02 Optomechanisms Inc Lead screw measuring means

Also Published As

Publication number Publication date
DE2109954B2 (de) 1973-07-19
FR2084275A5 (de) 1971-12-17
US3661463A (en) 1972-05-09
NL145673B (nl) 1975-04-15
BE763782A (fr) 1971-09-06
NL7102737A (de) 1971-09-07
IL36344A0 (en) 1971-05-26
CH537777A (de) 1973-06-15
IT939292B (it) 1973-02-10
JPS5115267B1 (de) 1976-05-15
DE2109954A1 (de) 1971-09-16
IL36344A (en) 1974-01-14
GB1343636A (en) 1974-01-16
SE366830B (de) 1974-05-06

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