CA919312A - Method of producing piezoelectric thin films - Google Patents

Method of producing piezoelectric thin films

Info

Publication number
CA919312A
CA919312A CA123190A CA123190A CA919312A CA 919312 A CA919312 A CA 919312A CA 123190 A CA123190 A CA 123190A CA 123190 A CA123190 A CA 123190A CA 919312 A CA919312 A CA 919312A
Authority
CA
Canada
Prior art keywords
thin films
piezoelectric thin
producing piezoelectric
producing
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA123190A
Other languages
English (en)
Other versions
CA123190S (en
Inventor
Wasa Kiyotaka
Hayakawa Shigeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP45086013A external-priority patent/JPS5023917B1/ja
Priority claimed from JP45088552A external-priority patent/JPS5023918B1/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of CA919312A publication Critical patent/CA919312A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CA123190A 1970-09-29 1971-09-20 Method of producing piezoelectric thin films Expired CA919312A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP45086013A JPS5023917B1 (nl) 1970-09-29 1970-09-29
JP45088552A JPS5023918B1 (nl) 1970-10-06 1970-10-06

Publications (1)

Publication Number Publication Date
CA919312A true CA919312A (en) 1973-01-16

Family

ID=26427180

Family Applications (1)

Application Number Title Priority Date Filing Date
CA123190A Expired CA919312A (en) 1970-09-29 1971-09-20 Method of producing piezoelectric thin films

Country Status (6)

Country Link
US (1) US3766041A (nl)
CA (1) CA919312A (nl)
DE (1) DE2148132C3 (nl)
FR (1) FR2108057B1 (nl)
GB (1) GB1369863A (nl)
NL (1) NL173187C (nl)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2353942A1 (de) * 1973-10-27 1975-05-07 Bosch Gmbh Robert Verfahren zur herstellung einer loetfesten kupferschicht
FR2426093A2 (fr) * 1974-03-27 1979-12-14 Anvar Perfectionnements aux procedes et dispositifs de fabrication de couches minces semi-conductrices dopees et aux produits obtenus
US3988232A (en) * 1974-06-25 1976-10-26 Matsushita Electric Industrial Co., Ltd. Method of making crystal films
US3932232A (en) * 1974-11-29 1976-01-13 Bell Telephone Laboratories, Incorporated Suppression of X-ray radiation during sputter-etching
GB1582317A (en) * 1977-01-25 1981-01-07 Murata Manufacturing Co Piezoelectric crystalline films
JPS5396494A (en) * 1977-02-02 1978-08-23 Murata Manufacturing Co Piezooelectric crystal film of zinc oxide
JPS5396495A (en) * 1977-02-02 1978-08-23 Murata Manufacturing Co Piezooelectric crystal film of zinc oxide
DE2811044C3 (de) * 1977-03-16 1981-02-26 Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto (Japan) Piezoelektrische kristalline Filme
US4182793A (en) * 1977-06-09 1980-01-08 Murata Manufacturing Co., Ltd. Piezoelectric crystalline film of zinc oxide
US4174421A (en) * 1977-09-13 1979-11-13 Murata Manufacturing Co., Ltd. Piezoelectric crystalline film of zinc oxide and method for making same
JPS5830752B2 (ja) * 1977-09-13 1983-07-01 株式会社村田製作所 酸化亜鉛の圧電結晶膜
DE2839715A1 (de) * 1977-09-17 1979-03-29 Murata Manufacturing Co Piezoelektrische kristalline filme aus zinkoxyd und verfahren zu ihrer herstellung
JPS5831743B2 (ja) * 1977-09-17 1983-07-08 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS54114484A (en) * 1978-02-27 1979-09-06 Toko Inc Production of piezoelectric thin layer
JPS5516554A (en) * 1978-07-21 1980-02-05 Toko Inc Manufacture of thin film of zinc oxide
US4297189A (en) * 1980-06-27 1981-10-27 Rockwell International Corporation Deposition of ordered crystalline films
US4322277A (en) * 1980-11-17 1982-03-30 Rca Corporation Step mask for substrate sputtering
DE3103509C2 (de) * 1981-02-03 1986-11-20 Günter Dr. Dipl.-Phys. 7801 Buchenbach Kleer Target zum Herstellen dünner Schichten, Verfahren zum Erzeugen des Targets und Verwendung des Targets
US4415427A (en) * 1982-09-30 1983-11-15 Gte Products Corporation Thin film deposition by sputtering
US4640756A (en) * 1983-10-25 1987-02-03 The United States Of America As Represented By The United States Department Of Energy Method of making a piezoelectric shear wave resonator
JPH0731950B2 (ja) * 1985-11-22 1995-04-10 株式会社リコー 透明導電膜の製造方法
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
JP3085043B2 (ja) * 1993-08-05 2000-09-04 株式会社村田製作所 サファイア面上の酸化亜鉛圧電結晶膜
GB2346155B (en) 1999-01-06 2003-06-25 Trikon Holdings Ltd Sputtering apparatus
US7161173B2 (en) * 2003-05-20 2007-01-09 Burgener Ii Robert H P-type group II-VI semiconductor compounds
US20080228073A1 (en) * 2007-03-12 2008-09-18 Silverman Ronald H System and method for optoacoustic imaging of peripheral tissues
US9922809B2 (en) * 2015-10-14 2018-03-20 Qorvo Us, Inc. Deposition system for growth of inclined c-axis piezoelectric material structures
US10571437B2 (en) 2015-12-15 2020-02-25 Qorvo Us, Inc. Temperature compensation and operational configuration for bulk acoustic wave resonator devices
US11824511B2 (en) 2018-03-21 2023-11-21 Qorvo Us, Inc. Method for manufacturing piezoelectric bulk layers with tilted c-axis orientation
US11381212B2 (en) * 2018-03-21 2022-07-05 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
US11401601B2 (en) 2019-09-13 2022-08-02 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2505370A (en) * 1947-11-08 1950-04-25 Bell Telephone Labor Inc Piezoelectric crystal unit
NL293139A (nl) * 1962-05-23
US3409464A (en) * 1964-04-29 1968-11-05 Clevite Corp Piezoelectric materials
US3458426A (en) * 1966-05-25 1969-07-29 Fabri Tek Inc Symmetrical sputtering apparatus with plasma confinement

Also Published As

Publication number Publication date
NL7113378A (nl) 1972-04-04
US3766041A (en) 1973-10-16
FR2108057B1 (nl) 1974-03-15
DE2148132C3 (de) 1980-01-17
DE2148132A1 (de) 1972-04-13
NL173187B (nl) 1983-07-18
DE2148132B2 (de) 1979-05-10
FR2108057A1 (nl) 1972-05-12
GB1369863A (en) 1974-10-09
NL173187C (nl) 1983-12-16

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