CA3107647A1 - Ultrasonic transducer - Google Patents

Ultrasonic transducer Download PDF

Info

Publication number
CA3107647A1
CA3107647A1 CA3107647A CA3107647A CA3107647A1 CA 3107647 A1 CA3107647 A1 CA 3107647A1 CA 3107647 A CA3107647 A CA 3107647A CA 3107647 A CA3107647 A CA 3107647A CA 3107647 A1 CA3107647 A1 CA 3107647A1
Authority
CA
Canada
Prior art keywords
ultrasonic transducer
piezoelectric
electrically insulating
composite layer
acoustic impedance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3107647A
Other languages
English (en)
French (fr)
Inventor
Nicholas Chris CHAGGARES
Eric M. Rieder
Khachic KARSHAFIAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonant Acoustics International Inc
Original Assignee
Resonant Acoustics International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Resonant Acoustics International Inc filed Critical Resonant Acoustics International Inc
Publication of CA3107647A1 publication Critical patent/CA3107647A1/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/092—Forming composite materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CA3107647A 2018-07-31 2019-07-31 Ultrasonic transducer Pending CA3107647A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862712595P 2018-07-31 2018-07-31
US62/712,595 2018-07-31
PCT/CA2019/051046 WO2020024051A1 (en) 2018-07-31 2019-07-31 Ultrasonic transducer

Publications (1)

Publication Number Publication Date
CA3107647A1 true CA3107647A1 (en) 2020-02-06

Family

ID=69229506

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3107647A Pending CA3107647A1 (en) 2018-07-31 2019-07-31 Ultrasonic transducer

Country Status (9)

Country Link
US (2) US11701689B2 (https=)
EP (2) EP3830565B1 (https=)
JP (2) JP2021533707A (https=)
CN (2) CN112513629B (https=)
AU (2) AU2019314579A1 (https=)
CA (1) CA3107647A1 (https=)
ES (1) ES2997785T3 (https=)
FI (1) FI3830565T3 (https=)
WO (1) WO2020024051A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3107647A1 (en) * 2018-07-31 2020-02-06 Resonant Acoustics International Inc. Ultrasonic transducer
US11937979B2 (en) * 2021-04-27 2024-03-26 Kulicke And Soffa Industries, Inc. Ultrasonic transducers, wire bonding machines including ultrasonic transducers, and related methods
CN113473309A (zh) * 2021-06-23 2021-10-01 中国船舶重工集团公司第七一五研究所 一种低q值弯曲圆盘换能器及制作方法
CN114094007B (zh) * 2021-11-30 2025-07-18 安徽膜感科技有限公司 压电形状确定的整体式薄膜压力传感器及制备方法
TW202434334A (zh) * 2022-11-14 2024-09-01 加拿大商共振聲學國際股份有限公司 超音波影像引導聚焦超音波系統及相關方法
CN117483216A (zh) * 2023-10-20 2024-02-02 中国船舶集团有限公司第七一五研究所 一种1-3型水声换能器匹配层及其制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514247A (en) * 1983-08-15 1985-04-30 North American Philips Corporation Method for fabricating composite transducers
JP2794720B2 (ja) * 1988-08-23 1998-09-10 松下電器産業株式会社 複合圧電振動子
US5329496A (en) 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5629906A (en) 1995-02-15 1997-05-13 Hewlett-Packard Company Ultrasonic transducer
US20050225211A1 (en) * 2004-04-01 2005-10-13 Siemens Medical Solutions Usa, Inc. Matching layer systems and methods for ultrasound transducers
US20100168582A1 (en) * 2008-12-29 2010-07-01 Boston Scientific Scimed, Inc. High frequency transducers and methods of making the transducers
CN101524682B (zh) * 2009-03-31 2011-06-22 广州多浦乐电子科技有限公司 压电单晶复合材料高频超声换能器及其制作方法与应用
GB0916427D0 (en) * 2009-09-21 2009-10-28 Univ Dundee Ultrasound transducer array
KR101354604B1 (ko) * 2012-01-16 2014-01-23 삼성메디슨 주식회사 초음파 프로브 및 그 제조방법
US9180490B2 (en) 2012-05-22 2015-11-10 General Electric Company Ultrasound transducer and method for manufacturing an ultrasound transducer
CA2895821A1 (en) * 2012-12-21 2014-06-26 Volcano Corporation Focused rotational ivus transducer using single crystal composite material
WO2015095721A1 (en) * 2013-12-20 2015-06-25 Fujifilm Sonosite, Inc. High frequency ultrasound transducers
CN104090032B (zh) * 2014-07-10 2017-07-21 北京工业大学 基于气体基1‑3型压电复合材料的空耦传感器
KR102633430B1 (ko) * 2015-09-03 2024-02-02 후지필름 소노사이트, 인크. 초음파 변환기 조립체
TWI664755B (zh) 2016-03-23 2019-07-01 伊凡聖斯股份有限公司 使用熔合結合工序在ｃｍｏｓ基板上整合ａｉｎ超音波傳感器
CA3107647A1 (en) 2018-07-31 2020-02-06 Resonant Acoustics International Inc. Ultrasonic transducer

Also Published As

Publication number Publication date
CN112513629A (zh) 2021-03-16
CN112513629B (zh) 2024-11-29
EP3830565A1 (en) 2021-06-09
JP2025131866A (ja) 2025-09-09
EP3830565A4 (en) 2022-04-20
US20200038912A1 (en) 2020-02-06
WO2020024051A1 (en) 2020-02-06
FI3830565T3 (fi) 2024-12-10
CN119413905A (zh) 2025-02-11
ES2997785T3 (en) 2025-02-18
AU2019314579A1 (en) 2021-01-28
JP2021533707A (ja) 2021-12-02
AU2025201581A1 (en) 2025-03-20
US20230302496A1 (en) 2023-09-28
US11701689B2 (en) 2023-07-18
US12390835B2 (en) 2025-08-19
EP4484025A2 (en) 2025-01-01
EP4484025A3 (en) 2025-03-05
EP3830565B1 (en) 2024-09-11

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