FI3830565T3 - Ultraäänianturi - Google Patents

Ultraäänianturi Download PDF

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Publication number
FI3830565T3
FI3830565T3 FIEP19845051.2T FI19845051T FI3830565T3 FI 3830565 T3 FI3830565 T3 FI 3830565T3 FI 19845051 T FI19845051 T FI 19845051T FI 3830565 T3 FI3830565 T3 FI 3830565T3
Authority
FI
Finland
Prior art keywords
piezoelectric
ultrasonic sensor
acoustic impedance
electrical permittivity
relative electrical
Prior art date
Application number
FIEP19845051.2T
Other languages
English (en)
Finnish (fi)
Inventor
Nicholas Chris Chaggares
Eric M Rieder
Khachic Karshafian
Original Assignee
Resonant Acoustics Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Resonant Acoustics Int Inc filed Critical Resonant Acoustics Int Inc
Application granted granted Critical
Publication of FI3830565T3 publication Critical patent/FI3830565T3/fi

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/852Composite materials, e.g. having 1-3 or 2-2 type connectivity
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/092Forming composite materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
FIEP19845051.2T 2018-07-31 2019-07-31 Ultraäänianturi FI3830565T3 (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862712595P 2018-07-31 2018-07-31
PCT/CA2019/051046 WO2020024051A1 (en) 2018-07-31 2019-07-31 Ultrasonic transducer

Publications (1)

Publication Number Publication Date
FI3830565T3 true FI3830565T3 (fi) 2024-12-10

Family

ID=69229506

Family Applications (1)

Application Number Title Priority Date Filing Date
FIEP19845051.2T FI3830565T3 (fi) 2018-07-31 2019-07-31 Ultraäänianturi

Country Status (9)

Country Link
US (2) US11701689B2 (https=)
EP (2) EP3830565B1 (https=)
JP (2) JP2021533707A (https=)
CN (2) CN112513629B (https=)
AU (2) AU2019314579A1 (https=)
CA (1) CA3107647A1 (https=)
ES (1) ES2997785T3 (https=)
FI (1) FI3830565T3 (https=)
WO (1) WO2020024051A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3107647A1 (en) * 2018-07-31 2020-02-06 Resonant Acoustics International Inc. Ultrasonic transducer
US11937979B2 (en) * 2021-04-27 2024-03-26 Kulicke And Soffa Industries, Inc. Ultrasonic transducers, wire bonding machines including ultrasonic transducers, and related methods
CN113473309A (zh) * 2021-06-23 2021-10-01 中国船舶重工集团公司第七一五研究所 一种低q值弯曲圆盘换能器及制作方法
CN114094007B (zh) * 2021-11-30 2025-07-18 安徽膜感科技有限公司 压电形状确定的整体式薄膜压力传感器及制备方法
TW202434334A (zh) * 2022-11-14 2024-09-01 加拿大商共振聲學國際股份有限公司 超音波影像引導聚焦超音波系統及相關方法
CN117483216A (zh) * 2023-10-20 2024-02-02 中国船舶集团有限公司第七一五研究所 一种1-3型水声换能器匹配层及其制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514247A (en) * 1983-08-15 1985-04-30 North American Philips Corporation Method for fabricating composite transducers
JP2794720B2 (ja) * 1988-08-23 1998-09-10 松下電器産業株式会社 複合圧電振動子
US5329496A (en) 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
US5629906A (en) 1995-02-15 1997-05-13 Hewlett-Packard Company Ultrasonic transducer
US20050225211A1 (en) * 2004-04-01 2005-10-13 Siemens Medical Solutions Usa, Inc. Matching layer systems and methods for ultrasound transducers
US20100168582A1 (en) * 2008-12-29 2010-07-01 Boston Scientific Scimed, Inc. High frequency transducers and methods of making the transducers
CN101524682B (zh) * 2009-03-31 2011-06-22 广州多浦乐电子科技有限公司 压电单晶复合材料高频超声换能器及其制作方法与应用
GB0916427D0 (en) * 2009-09-21 2009-10-28 Univ Dundee Ultrasound transducer array
KR101354604B1 (ko) * 2012-01-16 2014-01-23 삼성메디슨 주식회사 초음파 프로브 및 그 제조방법
US9180490B2 (en) 2012-05-22 2015-11-10 General Electric Company Ultrasound transducer and method for manufacturing an ultrasound transducer
CA2895821A1 (en) * 2012-12-21 2014-06-26 Volcano Corporation Focused rotational ivus transducer using single crystal composite material
WO2015095721A1 (en) * 2013-12-20 2015-06-25 Fujifilm Sonosite, Inc. High frequency ultrasound transducers
CN104090032B (zh) * 2014-07-10 2017-07-21 北京工业大学 基于气体基1‑3型压电复合材料的空耦传感器
KR102633430B1 (ko) * 2015-09-03 2024-02-02 후지필름 소노사이트, 인크. 초음파 변환기 조립체
TWI664755B (zh) 2016-03-23 2019-07-01 伊凡聖斯股份有限公司 使用熔合結合工序在cmos基板上整合ain超音波傳感器
CA3107647A1 (en) 2018-07-31 2020-02-06 Resonant Acoustics International Inc. Ultrasonic transducer

Also Published As

Publication number Publication date
CN112513629A (zh) 2021-03-16
CN112513629B (zh) 2024-11-29
EP3830565A1 (en) 2021-06-09
JP2025131866A (ja) 2025-09-09
EP3830565A4 (en) 2022-04-20
US20200038912A1 (en) 2020-02-06
WO2020024051A1 (en) 2020-02-06
CA3107647A1 (en) 2020-02-06
CN119413905A (zh) 2025-02-11
ES2997785T3 (en) 2025-02-18
AU2019314579A1 (en) 2021-01-28
JP2021533707A (ja) 2021-12-02
AU2025201581A1 (en) 2025-03-20
US20230302496A1 (en) 2023-09-28
US11701689B2 (en) 2023-07-18
US12390835B2 (en) 2025-08-19
EP4484025A2 (en) 2025-01-01
EP4484025A3 (en) 2025-03-05
EP3830565B1 (en) 2024-09-11

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