CA2984779C - Method for preventing deposits in pipes - Google Patents

Method for preventing deposits in pipes Download PDF

Info

Publication number
CA2984779C
CA2984779C CA2984779A CA2984779A CA2984779C CA 2984779 C CA2984779 C CA 2984779C CA 2984779 A CA2984779 A CA 2984779A CA 2984779 A CA2984779 A CA 2984779A CA 2984779 C CA2984779 C CA 2984779C
Authority
CA
Canada
Prior art keywords
acoustic device
pipes
pipe
system control
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2984779A
Other languages
French (fr)
Other versions
CA2984779A1 (en
Inventor
Danny D. L. Livshitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA2984779A priority Critical patent/CA2984779C/en
Publication of CA2984779A1 publication Critical patent/CA2984779A1/en
Application granted granted Critical
Publication of CA2984779C publication Critical patent/CA2984779C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027Cleaning the internal surfaces; Removal of blockages
    • B08B9/032Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • B08B9/0326Using pulsations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026Using sound waves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning In General (AREA)

Abstract

The current invention discloses a method to prevent heavy chemical deposits in process pipes in industries, such as semiconductors manufacturing and chemical, during factory process, by using controlled changes in fluid dynamics inside said pipes. The controlled changes are created by a series of acoustic pulses, released periodically into the process pipe directly.

Description

Method for Preventing Deposits in Pipes The present invention is generally related to surface treatment by fluid waves and fluid flow.
Particularly related to the methods, that use type of systems, which usually known as sonic or acoustic horns, air cannons, soot blowers and shock wave generators.
Background of the invention Chemical and semiconductors manufacturing industries require cleaning technology of various types, to clean and prevent deposit accumulation in pipes, using intrusion and touch methods, such as brushes, wipers, wires, etc. The factory process must be stopped, for conducting such a process and in many cases pipes must be disassembled for cleaning. This causes factory's critical parameters drop ¨ such as availability and yield. There are methods to decrease the amount of accumulated deposits during the factory process run, such as heat-blankets and dilution gas injections. These methods have some disadvantages, such as cold points, high energy consumption and consistency. Use of these methods is wide, but still there is a need for further improvements and alternative methods, which would allow to reduce even more the deposits levels towards minimum, specifically during the process runtime.
Conventional acoustic methods are not used to prevent deposit accumulation in post-process gas pipes in semiconductor manufacturing and chemical industries because these methods are not studied enough and consequently not configured to be implemented on smaller diameter chemical gases pipes.
Several factors were not considered in prior art to be implemented in chemical gases pipes, such as:
low or no chemical compatibility, physical size and mechanical configurations of acoustic devices, depreciation of the acoustic wave inside pipe, non-sufficient control method, non-variable output wave frequency and merging methods of acoustic wave with gas flow in pipes.
The list of related art:
US 6290778 - Method and apparatus for sonic cleaning of heat exchangers US 6964709B2 ¨ Acoustic soot blower, and method for operating
2 US20170030503 ¨ Apparatus and Method for Securing Pipe Heaters and Pipe Insulation to Pipe Systems.
US20130092028 ¨ Device and Method for Cleaning Baghouse Filters.
US 3421939 - Method and apparatus for cleaning a pipe with sonic energy US 20150337630 - Shock waves for pipe cleaning US 6702248 B2 - Blast aerator with spring less, pneumatically dampened actuator US 3278165A - Method and apparatus for generating acoustic vibrations in flowing fluids US 7918309B1 - Apparatus for producing a continuous sonic boom US 3436899 - Supersonic cleaning of filtering media W02015008010 - Acoustic cleaning apparatus CN105509077 - Acoustic wave soot-cleaning device capable of automatically controlling audio frequency CN202411047 - Sound wave ash cleaning device US20120227761 - Cleaning apparatus and method, and monitoring thereof US20100170529 - Acoustic Cleaning Device and Method CN201231147 - Low frequency sound wave ash-removal device CN2554590 - Acoustic-wave ash remover US5459699 - Method and apparatus for generating high energy acoustic pulses US5082502 - Cleaning apparatus and process:
US20150239021 - System and method for surface cleaning
3 CN103080564 - Shockwave generation device and method of delivering a shockwave RU2009723 - Method of cleaning heat-exchange surfaces EP0254104 - Shock-wave generator for producing an acoustic shock-wave pulse JP2573928 - Shock wave generator and generation method US4285415 - Blasting device Summary of the invention The current invention addresses to a field of use, where there is a need for periodical noninvasive deposits accumulation prevention.
The current invention extends use of an acoustic cleaning methods, to be practically applied in form of programmable sequence of operation, to prevent heavy deposits in process pipes for semiconductor manufacturing and chemical industries. The acoustic device is configured to generate fluid pulses in controllable and variable frequency, to be conducted directly into a process gas pipe. The acoustic device is configured to create fluid waves in a form of shock waves.
In the current invention, a working fluid, such as nitrogen is supplied to the acoustic device. The acoustic device has an outlet, fluidly connected with process pipe by a joining unit. The acoustic device is configured to deliver fluid waves into a process pipe, without fluid wave depreciation for known limited distance from the outlet of the acoustic device. The outlet is located within a certain ' distance from point, where the accumulation of deposits starts. The acoustic device is controlled by a control system with programmed sequence of operation and known control parameters, such as pulse frequency, pulse width and series of pulses release period. Working fluid shock waves travel into the process pipe directly from the acoustic device outlet in axial direction of the process pipe.
A series of shock waves released from the acoustic device outlet periodically, consequently creates drag vortexes, resulting in loosening and conveying released deposit particles along the process pipe towards the pipe exit.
List of drawings:
4 FIG.1 is a schematic illustration showing basic configuration and basic flow dynamics of the current invention.
FIG.2 is a schematic illustration showing the current invention with basic control components.
FIG.3 is a schematic illustration showing implementation of the current invention on post-process gas pipe.
FIG.4 is a schematic illustration showing example of practical implementation of the current invention as a configuration for long pipe-work.
Detailed description of the current invention Acoustic device 1 (FIG. 1), configured to release a series of shock waves 5, in direction 3, is having fluid connection to a pipe-work 8 trough adaptor 2, allowing shock waves 5 to be entirely directed into pipe-work 8 and consequently advance in direction 10, towards pipe-work exit 9. Acoustic device 1 is configured to receive a supply of a working gas. Acoustic device 1, having and outlet directed into adapter 2 to direct released shock waves into direction 3 only. Adapter 2 is configured to completely seal the outlet of the acoustic device and its connection to the pipe-work from the outside environment. Acoustic device 1 is configured to isolate any fluid flow in the opposite direction of the direction 3, consequently preventing any backflow from pipe-work 8 towards the outside environment. Acoustic device 1 is configured to create shock waves 5, wherein vortexes 6 are created and advancing with each one of the created shock wave in direction 10. Created vortexes 6, further on create drag effect, which is expressed in pressure difference between upstream and downstream of each one of the waves 5. In addition to the shock waves creation, the acoustic device is configured to create high momentum change between released shock waves 5, for amplification of the drag force of the shock waves. Process gas is moving in direction 4, through a joining unit 7, which has a fluid connection with the acoustic device 1 outlet and pipe-work 8. Acoustic device 1 is located within a certain linear distance from estimate deposit accumulation start point 11A, to allow a full shock wave development, from its fluid dynamics perspective.
The configuration shown on FIG. 2 allows automatic deposit prevention in places where the acoustic shock waves 5 have less effect, such as at point 11B, which is near the outlet of the check-valve 15.
In case of deposits start to build up at point 11B, pressure sensor 17 is configured to send a signal to a control system 25, consequently triggering valve 18 to open position which allows fluid connection from the acoustic device 1 outlet with check-valve 15 inlet, through tube or pipe 12 and check-valve
5 adapter 13 in direction 14. Valve 18 will open when there is an increase in pressure, sensed by pressure transducer 17, and only during operation of acoustic device 1, i.e. during the release of shock waves 5, allowing a small portion of pressure and flow pulses, created by the acoustic device, to influence on point 11B through check-valve 15 and advance deposits from point 11B into direction 16, towards area, where the shock waves have better efficiency ¨ i.e. point 11A in FIG.1.
Control system 25 is configured to analyze readings from at least sensor 17, and operate acoustic device 1 and components such as valve 18, according to the user defined conditions. Pressure sensor 19, is shown as additional sensor, configured to signal when pipe-work 8 has a pressure rise for reasons such as high level of deposits or leak in pipe-work 8.
A fore-line portion 20 (FIG. 3), conducts post-process gases from a process chamber in cleanroom of semiconductor manufacturing factory. Post-process gasses past through gate-valve 21 into vacuum pump 23 inlet 22. The post-process gases are pumped by pump 23 towards pump outlet 24 and through check-valve adapter 13 to check-valve 15, continuing to the joining unit 7, into the pipe-work 8.
During regular clean-room process, acoustic device 1 is automatically triggered to generate acoustic shock waves 5 to me merged with the post-process gasses in joining unit 7. The acoustic device 1 is configured to operate in automatic mode, in a pre-determined sequence, wherein this sequence depends on a nature of the post-process gasses flow and chemicals compositions. Drier residues will require different sequence, than wetter ones. The ideal sequence, beyond theoretical calculations, would possibly be a combination of several iterations, by using try and error technique till the desired result is achieved on a pilot installation, and then implemented on full scale production. Manual mode of operation of the device 1 is optional and used upon need.
Several acoustic devices 1, 1A and 1N (FIG. 4), are installed on pipe-work 8, to cover entire length of the pipe-work. Since each one of the devices covers only limited length of the pipe-work, for long lengths several acoustic devices might be required, merged into the pipe-work by using joining units 7, 7A and 7N. There might be more of acoustic devices and joining units, installed as sets on the pipe-work accordingly to the pipe-work length. The acoustic devices are configured to be operationally synchronized between each other through control system 25 (FIG. 2) or by alternative communication means.
Three modes of operation configured to operate several acoustic devices, which are installed on one pipe-work:
Mode 1: A single device is operated per time. After the first device has finished its programmed sequence, second in device is operated and so on. Operating one acoustic device per time will prevent
6 the pipe-work 8 from overflow by the working gas, being released from the acoustic device in forms of the shock waves.
Mode 2: All devices are operated simultaneously with same sequence of operation or different sequences of operation.
Mode 3: A combination sequence of mode 1 and mode 2. The combination sequence may be time based or triggered by sensors 17, 19 (FIG. 2), or alternative control means based, or a combination of time periods and said control means.
Consequently, accumulated deposits in pipe-work 8, are being removed towards pipe-work outlet 9 (FIG. 4) periodically for further treatment.
The acoustic device is configured for immediate flow stop from its outlet and isolating the working gas supply by additional fluid control means, such as check-valves and solenoid valves. In addition, the acoustic device is equipped with flow detection means, to allow an immediate uncontrolled flow to stop, in case of leakage from its outlet and generate an alarm through the control system 25.
Similar to described above methods and configurations, the current invention to be used to prevent deposits accumulation in process chambers and compartments of equipment, related to semiconductors manufacturing and chemical industries, such as reactor chambers, pump compartments and gate valves. In such a case the compartment of said equipment or the process chamber will have fluid connection to the acoustic device outlet, during operation of the acoustic device.
The acoustic device might have additional flow isolation means, such as ball valve for easy replacement of the acoustic device from joining unit 7, without stopping factory process.

Claims (9)

Method for Preventing Deposits in Pipes Claims:
1. A method for preventing deposits in pipes, comprising:
A. At least one acoustic device having an outlet for delivering fluid pulses from said outlet;
B. At least one merging member for fluid connection of said outlet to a pipe-work segment to allow complete merging of said fluid pulses in parallel direction with a gas stream inside said pipe-work segment;
C. Means for supplying of at least one type of a working gas to the acoustic device for further release of fluid pulses and an operational functionality of the acoustic device;
D. A backflow prevention means for physical preventing of said gas stream backflow from the pipe-work segment towards an outside environment and into said means for supplying the working gas, wherein said environment is outside of the acoustic device;
E. Sealing means for preventing any fluid connection between the acoustic device outlet and said outside environment;
F. Safety means configured to shut said working gas supply, and further configured to detect an uncontrolled flow of the working gas;
G. System control means configured to control the acoustic device;
H. The system control means further configured to control the safety means;
I. The system control means further configured to receive a data input;
J. At least steps of: starting and stopping operation of the acoustic device by the system control means; and reducing amount of deposits on inner sides of the pipe-work segment by a periodic release of said fluid pulses from the acoustic device outlet.
2. A method for preventing deposits in pipes as claimed in claim 1, wherein said safety means configured to monitor temperature inside the acoustic device.
3. A method for preventing deposits in pipes as claimed in claim 1, wherein said safety means configured to monitor pressure of the working gas.
4. A method for preventing deposits in pipes as claimed in claim 1, wherein said system control means configured to monitor flow dynamics parameters in said pipe-work segment.
5. A method for preventing deposits in pipes as claimed in claim 1, wherein said acoustic device is configured to create a momentum change at each start and each end of each one of the fluid pulses for amplification of a drag coefficient of the fluid pulse.
6. A method for preventing deposits in pipes as claimed in claim 1, wherein said acoustic device is configured to deliver a series of fluid pulses in a form of series of shock waves.
7. A method for preventing deposits in pipes as claimed in claim 1, wherein an amount of fluid pulses released from the outlet of the acoustic device per a time unit is variable and controlled by the system control means, wherein said time unit is variable and controlled by said system control means.
8. A method for preventing deposits in pipes as claimed in claim 1, wherein said acoustic device configured to be chemically compatible to chemical composition of said gas stream flowing inside said pipe-work segment.
9. A method for preventing deposits in pipes as claimed in claim 1, wherein said system control means further comprising communication means for operational synchronization of multiply number of said acoustic devices.
CA2984779A 2017-11-06 2017-11-06 Method for preventing deposits in pipes Expired - Fee Related CA2984779C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA2984779A CA2984779C (en) 2017-11-06 2017-11-06 Method for preventing deposits in pipes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA2984779A CA2984779C (en) 2017-11-06 2017-11-06 Method for preventing deposits in pipes

Publications (2)

Publication Number Publication Date
CA2984779A1 CA2984779A1 (en) 2018-01-10
CA2984779C true CA2984779C (en) 2018-07-31

Family

ID=60940395

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2984779A Expired - Fee Related CA2984779C (en) 2017-11-06 2017-11-06 Method for preventing deposits in pipes

Country Status (1)

Country Link
CA (1) CA2984779C (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2573329A (en) * 2018-05-03 2019-11-06 Stewan Kukard Gideon Central heating cleaning process
CN112845413A (en) * 2019-11-26 2021-05-28 东莞新科技术研究开发有限公司 Steel pipe cleaning method
CH717427B1 (en) * 2020-07-07 2021-11-15 Master Craft Eng Gmbh Method and device for cleaning pipeline systems.
CN117028718B (en) * 2023-10-10 2024-01-12 潍柴动力股份有限公司 Pressure pulse filter and engine

Also Published As

Publication number Publication date
CA2984779A1 (en) 2018-01-10

Similar Documents

Publication Publication Date Title
CA2984779C (en) Method for preventing deposits in pipes
US6398518B1 (en) Method and apparatus for increasing the efficiency of a multi-stage compressor
US9194400B2 (en) Centrifugal compressor and washing method
US10933362B2 (en) Pulse-jet valve performance monitoring system and method
JP2005172652A (en) Apparatus for measuring pressure loss of filter
WO2009001142A1 (en) Filtering system with means for purging the system
EP2803886B1 (en) Cleaning valve with dampening mechanism
JP4676486B2 (en) Probes and systems for extracting gases from a processing environment
KR102139146B1 (en) Filter dust collector and Control method of bag filter pulsing of filter dust collector
RU2752222C2 (en) System and method for estimating washing fluid consumption at the exhaust gas inlet of an exhaust gas purification system of a marine vessel
JP2002333000A5 (en)
TW202033263A (en) Detoxifying apparatus, method for replacing piping section of detoxifying apparatus, and method for cleaning pipes of detoxifying apparatus
KR20170126605A (en) Apparatus for cleaning pipe
RU123509U1 (en) DEVICE FOR PULSE CLEANING OF HEATING SURFACES FROM EXTERNAL DEPOSITS
JP2019138878A (en) Filter device and gas analysis system
KR101515888B1 (en) Pipe cleaning method
US9669365B2 (en) Suspension plasma spray apparatus and use methods
US20130160643A1 (en) Self cleaning sorbent injection lance
CA2963474C (en) Variable frequency fluid pulse generator
RU2696525C2 (en) Method of flushing nozzles of gas turbine engine dg-90l2.1
JP4575637B2 (en) Pipe cleaning device
RU113181U1 (en) DEVICE FOR CLEANING THE INTERNAL SURFACE OF PIPELINES
JPH11253727A (en) Dust removing apparatus
RU2772008C1 (en) Complex of micro-hydraulic shock cleaning of the inner surface of the pipes of the heat exchange unit
CN203848861U (en) Simulation device used for boiler superheater oxide skin flushing testing

Legal Events

Date Code Title Description
MKLA Lapsed

Effective date: 20211108