CA2928376C - Hybrid generators and methods of using them - Google Patents

Hybrid generators and methods of using them Download PDF

Info

Publication number
CA2928376C
CA2928376C CA2928376A CA2928376A CA2928376C CA 2928376 C CA2928376 C CA 2928376C CA 2928376 A CA2928376 A CA 2928376A CA 2928376 A CA2928376 A CA 2928376A CA 2928376 C CA2928376 C CA 2928376C
Authority
CA
Canada
Prior art keywords
generator
mode
induction device
circuit
oscillation mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2928376A
Other languages
English (en)
French (fr)
Other versions
CA2928376A1 (en
Inventor
Tak Shun Cheung
Chui Ha Cindy WONG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Revvity Health Sciences Inc
Original Assignee
PerkinElmer Health Sciences Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PerkinElmer Health Sciences Inc filed Critical PerkinElmer Health Sciences Inc
Publication of CA2928376A1 publication Critical patent/CA2928376A1/en
Application granted granted Critical
Publication of CA2928376C publication Critical patent/CA2928376C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/26—Matching networks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CA2928376A 2013-10-23 2014-10-22 Hybrid generators and methods of using them Active CA2928376C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361894560P 2013-10-23 2013-10-23
US61/894,560 2013-10-23
PCT/US2014/061682 WO2015061391A2 (en) 2013-10-23 2014-10-22 Hybrid generators and methods of using them

Publications (2)

Publication Number Publication Date
CA2928376A1 CA2928376A1 (en) 2015-04-30
CA2928376C true CA2928376C (en) 2023-03-07

Family

ID=52825596

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2928376A Active CA2928376C (en) 2013-10-23 2014-10-22 Hybrid generators and methods of using them

Country Status (7)

Country Link
US (3) US9420679B2 (enExample)
EP (1) EP3061326B1 (enExample)
JP (1) JP6694813B2 (enExample)
CN (1) CN206237661U (enExample)
AU (1) AU2014340176B2 (enExample)
CA (1) CA2928376C (enExample)
WO (1) WO2015061391A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014160091A1 (en) * 2013-03-14 2014-10-02 Perkinelmer Health Sciences, Inc. Asymmetric induction devices and systems and methods using them
US9635750B2 (en) 2013-10-23 2017-04-25 Perkinelmer Health Sciences, Inc. Oscillator generators and methods of using them
CA2928376C (en) 2013-10-23 2023-03-07 Perkinelmer Health Sciences, Inc. Hybrid generators and methods of using them
JP6623557B2 (ja) * 2015-05-27 2019-12-25 株式会社島津製作所 Ｉｃｐ分析装置
US10882021B2 (en) 2015-10-01 2021-01-05 Ion Inject Technology Llc Plasma reactor for liquid and gas and method of use
US12296313B2 (en) 2015-10-01 2025-05-13 Milton Roy, Llc System and method for formulating medical treatment effluents
EP3356026B1 (en) 2015-10-01 2022-11-09 Milton Roy, LLC Plasma reactor for liquid and gas
US11452982B2 (en) 2015-10-01 2022-09-27 Milton Roy, Llc Reactor for liquid and gas and method of use
US10187968B2 (en) * 2015-10-08 2019-01-22 Ion Inject Technology Llc Quasi-resonant plasma voltage generator
US10046300B2 (en) 2015-12-09 2018-08-14 Ion Inject Technology Llc Membrane plasma reactor
CN211860643U (zh) * 2016-04-27 2020-11-03 魄金莱默保健科学有限公司 振荡产生器、射频产生器及包括上述产生器的系统
EP3520126A4 (en) 2016-09-27 2020-05-27 Perkinelmer Health Sciences Canada, Inc RADIO FREQUENCY CAPACITORS AND GENERATORS AND OTHER DEVICES USING THE SAME
JP2019531189A (ja) * 2016-10-06 2019-10-31 ライテン・インコーポレイテッドＬｙｔｅｎ， Ｉｎｃ． 気固分離によるマイクロ波反応器システム
US20180330933A1 (en) * 2017-03-29 2018-11-15 Brian Chan Cooling devices and instruments including them
CN110244209B (zh) * 2019-07-04 2021-06-08 福州丹诺西诚电子科技有限公司 一种基于igbt单元的击穿检测方法
US11107661B2 (en) * 2019-07-09 2021-08-31 COMET Technologies USA, Inc. Hybrid matching network topology
KR102381323B1 (ko) * 2020-05-15 2022-03-31 (주)엘오티씨이에스 유도결합 플라즈마 반응기 및 유도결합 플라즈마 반응기의 안테나 코일용 와이어 구조물
JP7417569B2 (ja) * 2021-10-29 2024-01-18 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法及びプログラム
CN114706210B (zh) * 2022-04-06 2024-12-20 国仪量子技术(合肥)股份有限公司 装载离子的方法
US12483282B2 (en) * 2022-07-20 2025-11-25 Qualcomm Incorporated Expediting field convergence of frequency-temperature model of resonator oscillators used in transceivers
KR102771812B1 (ko) * 2023-01-17 2025-02-25 주식회사 발키다 조명기능과 플라즈마 발생기능을 갖는 제어시스템
JPWO2024171416A1 (enExample) * 2023-02-16 2024-08-22
CN116559555B (zh) * 2023-04-10 2024-12-13 华北电力科学研究院有限责任公司 一种新能源电力系统的谐振检测方法及装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130097A (ja) * 1983-01-14 1984-07-26 古河電気工業株式会社 放電プラズマの発生方法
US4818916A (en) 1987-03-06 1989-04-04 The Perkin-Elmer Corporation Power system for inductively coupled plasma torch
US5155547A (en) 1990-02-26 1992-10-13 Leco Corporation Power control circuit for inductively coupled plasma atomic emission spectroscopy
EP0636285B1 (en) 1992-04-16 1996-09-04 Advanced Energy Industries, Inc. Stabilizer for switch-mode powered rf plasma processing
JP3454394B2 (ja) * 1995-06-27 2003-10-06 日本ビクター株式会社 音声の準可逆符号化装置
JP2884056B2 (ja) * 1995-12-07 1999-04-19 パール工業株式会社 放電プラズマ発生用高周波電源装置及び半導体製造装置
US6329757B1 (en) * 1996-12-31 2001-12-11 The Perkin-Elmer Corporation High frequency transistor oscillator system
JP3350389B2 (ja) * 1997-02-21 2002-11-25 株式会社日立製作所 プラズマ処理方法および装置
US6222186B1 (en) 1998-06-25 2001-04-24 Agilent Technologies, Inc. Power-modulated inductively coupled plasma spectrometry
WO2001005020A1 (en) * 1999-07-13 2001-01-18 Tokyo Electron Limited Radio frequency power source for generating an inductively coupled plasma
US8133218B2 (en) 2000-12-28 2012-03-13 Senorx, Inc. Electrosurgical medical system and method
US6583572B2 (en) * 2001-03-30 2003-06-24 Lam Research Corporation Inductive plasma processor including current sensor for plasma excitation coil
US6587019B2 (en) 2001-04-11 2003-07-01 Eni Technology, Inc. Dual directional harmonics dissipation system
SG111177A1 (en) * 2004-02-28 2005-05-30 Wira Kurnia Fine particle powder production
US7214934B2 (en) * 2004-07-22 2007-05-08 Varian Australia Pty Ltd Radio frequency power generator
US7459899B2 (en) 2005-11-21 2008-12-02 Thermo Fisher Scientific Inc. Inductively-coupled RF power source
US7852471B2 (en) * 2006-05-22 2010-12-14 Varian Australia Pty Ltd Power generator for spectrometry
US8192576B2 (en) * 2006-09-20 2012-06-05 Lam Research Corporation Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing
WO2010132069A1 (en) * 2009-05-15 2010-11-18 Alpha Source Llc Particle beam isotope generator apparatus, system, and method
WO2014160091A1 (en) * 2013-03-14 2014-10-02 Perkinelmer Health Sciences, Inc. Asymmetric induction devices and systems and methods using them
CA2928376C (en) 2013-10-23 2023-03-07 Perkinelmer Health Sciences, Inc. Hybrid generators and methods of using them

Also Published As

Publication number Publication date
US20170055337A1 (en) 2017-02-23
AU2014340176B2 (en) 2019-11-07
EP3061326B1 (en) 2021-08-11
US9420679B2 (en) 2016-08-16
WO2015061391A3 (en) 2015-09-17
CN206237661U (zh) 2017-06-09
JP2017500687A (ja) 2017-01-05
US9942974B2 (en) 2018-04-10
EP3061326A2 (en) 2016-08-31
AU2014340176A1 (en) 2016-06-09
US9648717B2 (en) 2017-05-09
US20180027643A1 (en) 2018-01-25
JP6694813B2 (ja) 2020-05-20
WO2015061391A2 (en) 2015-04-30
CA2928376A1 (en) 2015-04-30
US20150108898A1 (en) 2015-04-23
EP3061326A4 (en) 2017-04-19

Similar Documents

Publication Publication Date Title
CA2928376C (en) Hybrid generators and methods of using them
US10104754B2 (en) Oscillator generators and methods of using them
US8633416B2 (en) Plasmas and methods of using them
US20130214153A1 (en) Devices and systems including a boost device
EP3449700B1 (en) Oscillator generators and methods of using them
CN206100590U (zh) 装置、非感应式耦合等离子体装置、等离子体、套件、仪器、反应器、振荡器、系统和火炬电极组合件
EP1891407A2 (en) Boost devices and methods of using them
AU2012202363B2 (en) Plasmas and methods of using them

Legal Events

Date Code Title Description
EEER Examination request

Effective date: 20191016

EEER Examination request

Effective date: 20191016

EEER Examination request

Effective date: 20191016

EEER Examination request

Effective date: 20191016

EEER Examination request

Effective date: 20191016