CA2831805A1 - Mixed-material multispectral staring array sensor - Google Patents
Mixed-material multispectral staring array sensor Download PDFInfo
- Publication number
- CA2831805A1 CA2831805A1 CA2831805A CA2831805A CA2831805A1 CA 2831805 A1 CA2831805 A1 CA 2831805A1 CA 2831805 A CA2831805 A CA 2831805A CA 2831805 A CA2831805 A CA 2831805A CA 2831805 A1 CA2831805 A1 CA 2831805A1
- Authority
- CA
- Canada
- Prior art keywords
- array
- spectral
- sensors
- lens
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000463 material Substances 0.000 title description 17
- 230000003595 spectral effect Effects 0.000 claims abstract description 87
- 230000035945 sensitivity Effects 0.000 claims abstract description 15
- 239000004065 semiconductor Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 8
- 238000000701 chemical imaging Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 238000002211 ultraviolet spectrum Methods 0.000 description 3
- 238000002329 infrared spectrum Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0294—Multi-channel spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/08—Beam switching arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/10—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths
- H04N23/11—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths for generating image signals from visible and infrared light wavelengths
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/673,045 US8975594B2 (en) | 2012-11-09 | 2012-11-09 | Mixed-material multispectral staring array sensor |
| US13/673,045 | 2012-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2831805A1 true CA2831805A1 (en) | 2014-05-09 |
Family
ID=49683411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2831805A Abandoned CA2831805A1 (en) | 2012-11-09 | 2013-11-01 | Mixed-material multispectral staring array sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8975594B2 (enExample) |
| EP (1) | EP2730900A3 (enExample) |
| JP (1) | JP6348271B2 (enExample) |
| CN (1) | CN103808409B (enExample) |
| BR (1) | BR102013027425A2 (enExample) |
| CA (1) | CA2831805A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9883149B2 (en) | 2014-08-01 | 2018-01-30 | Sri International | Imaging sensor and method for color night vision |
| EP3210372B1 (en) * | 2014-10-21 | 2023-07-19 | University College Cork-National University of Ireland, Cork | Smart photonic imaging method and apparatus |
| EP3029931A1 (en) * | 2014-12-04 | 2016-06-08 | Thomson Licensing | Image sensor unit and imaging apparatus |
| US10257393B2 (en) | 2016-02-12 | 2019-04-09 | Contrast, Inc. | Devices and methods for high dynamic range video |
| US10264196B2 (en) | 2016-02-12 | 2019-04-16 | Contrast, Inc. | Systems and methods for HDR video capture with a mobile device |
| AU2017308749A1 (en) | 2016-08-09 | 2019-02-21 | Contrast, Inc. | Real-time HDR video for vehicle control |
| JP6848662B2 (ja) * | 2017-05-09 | 2021-03-24 | 富士電機株式会社 | 分光装置及び分光方法 |
| WO2019014057A1 (en) | 2017-07-10 | 2019-01-17 | Contrast, Inc. | Stereoscopic camera |
| CN108362212A (zh) * | 2018-04-02 | 2018-08-03 | 无锡星微科技有限公司 | 一种用于晶圆厚度及弯曲度检测的运动平台及其实现方法 |
| US10951888B2 (en) | 2018-06-04 | 2021-03-16 | Contrast, Inc. | Compressed high dynamic range video |
| WO2020036957A1 (en) | 2018-08-14 | 2020-02-20 | Contrast, Inc. | Image compression |
| US10859436B2 (en) * | 2019-02-19 | 2020-12-08 | Renesas Electronics America Inc. | Spectrometer on a chip |
| DE102019210244A1 (de) * | 2019-07-11 | 2021-01-14 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung |
| US11201993B1 (en) | 2020-06-15 | 2021-12-14 | Samsung Electronics Co., Ltd. | Multi-camera on a chip and camera module design |
| FR3116899B1 (fr) * | 2020-11-30 | 2023-07-21 | Silios Tech | Imageur multispectral à domaine spectral élargi. |
| CN114754694B (zh) * | 2022-06-13 | 2022-09-02 | 新乡职业技术学院 | 一种基于多光谱的材料形变检测设备 |
| CN119509696A (zh) * | 2024-11-20 | 2025-02-25 | 西安电子科技大学 | 一种单像素式紫外-可见-红外宽光谱范围的多光谱成像系统及成像方法 |
| CN120176845A (zh) * | 2025-03-27 | 2025-06-20 | 中国科学院上海技术物理研究所 | 基于动态fp腔的光路调制光谱成像系统 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4678332A (en) * | 1984-02-21 | 1987-07-07 | Dan Rock | Broadband spectrometer with fiber optic reformattor |
| US4988858A (en) | 1986-11-12 | 1991-01-29 | The Boeing Company | Catoptric multispectral band imaging and detecting device |
| DE4133481C2 (de) | 1991-10-09 | 1994-08-11 | Ultrakust Electronic Gmbh | Multispektralsensor |
| US5373182A (en) | 1993-01-12 | 1994-12-13 | Santa Barbara Research Center | Integrated IR and visible detector |
| JPH08233658A (ja) | 1995-02-24 | 1996-09-13 | Olympus Optical Co Ltd | 分光装置及び分光画像記録装置 |
| US5587784A (en) | 1995-06-16 | 1996-12-24 | Hughes Electronics | Multispectral-staring sensor |
| WO1997012212A1 (de) | 1995-09-27 | 1997-04-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multispektralsensorvorrichtung |
| EP0889307B1 (de) * | 1997-07-01 | 2003-09-03 | OptoMed Optomedical Systems GmbH | Bildgebendes Spektrometer |
| JP4374120B2 (ja) * | 2000-01-31 | 2009-12-02 | Hoya株式会社 | 測光装置 |
| US7196790B2 (en) * | 2002-03-18 | 2007-03-27 | Honeywell International Inc. | Multiple wavelength spectrometer |
| JP2004198439A (ja) * | 2004-02-16 | 2004-07-15 | Olympus Corp | 分光装置及び分光画像記録装置 |
| JP4717363B2 (ja) * | 2004-03-10 | 2011-07-06 | オリンパス株式会社 | マルチスペクトル画像撮影装置及びアダプタレンズ |
| SE0402576D0 (sv) * | 2004-10-25 | 2004-10-25 | Forskarpatent I Uppsala Ab | Multispectral and hyperspectral imaging |
| US7274454B2 (en) | 2005-12-23 | 2007-09-25 | Eastman Kodak Company | Imaging system with programmable spectral switch |
| US7459686B2 (en) | 2006-01-26 | 2008-12-02 | L-3 Communications Corporation | Systems and methods for integrating focal plane arrays |
| US7623165B2 (en) | 2006-02-28 | 2009-11-24 | Aptina Imaging Corporation | Vertical tri-color sensor |
| US8081244B2 (en) | 2006-07-24 | 2011-12-20 | Michael Golub | Snapshot spectral imaging systems and methods |
| JP4876812B2 (ja) * | 2006-09-19 | 2012-02-15 | 株式会社デンソー | 車載用カラーセンサおよびその製造方法 |
| US7714998B2 (en) | 2006-11-28 | 2010-05-11 | Applied Materials South East Asia Pte. Ltd. | Image splitting in optical inspection systems |
| US20090021598A1 (en) | 2006-12-06 | 2009-01-22 | Mclean John | Miniature integrated multispectral/multipolarization digital camera |
| US7949019B2 (en) | 2007-01-19 | 2011-05-24 | The General Hospital | Wavelength tuning source based on a rotatable reflector |
| DE102008002270A1 (de) | 2008-06-06 | 2009-12-17 | Robert Bosch Gmbh | Multispektraler Sensor |
| US8018586B2 (en) * | 2008-10-23 | 2011-09-13 | Applied Materials, Inc. | Metrology of thin film devices using an addressable micromirror array |
| JP5723881B2 (ja) | 2009-08-11 | 2015-05-27 | コーニンクレッカ フィリップス エヌ ヴェ | マルチスペクトル撮像 |
| US8143565B2 (en) | 2009-09-30 | 2012-03-27 | Ricoh Co., Ltd. | Adjustable multimode lightfield imaging system having an actuator for changing position of a non-homogeneous filter module relative to an image-forming optical module |
| JP5848754B2 (ja) | 2010-05-12 | 2016-01-27 | ペリカン イメージング コーポレイション | 撮像装置アレイおよびアレイカメラのためのアーキテクチャ |
| DE102010023344A1 (de) | 2010-06-10 | 2012-01-19 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Kameraobjektiv und Kamerasystem |
| US8717484B2 (en) | 2010-08-11 | 2014-05-06 | Inview Technology Corporation | TIR prism to separate incident light and modulated light in compressive imaging device |
| US8908087B2 (en) | 2010-11-16 | 2014-12-09 | Nikon Corporation | Multiband camera, and multiband image capturing method |
-
2012
- 2012-11-09 US US13/673,045 patent/US8975594B2/en not_active Expired - Fee Related
-
2013
- 2013-10-24 BR BRBR102013027425-9A patent/BR102013027425A2/pt not_active Application Discontinuation
- 2013-11-01 CA CA2831805A patent/CA2831805A1/en not_active Abandoned
- 2013-11-05 JP JP2013228917A patent/JP6348271B2/ja not_active Expired - Fee Related
- 2013-11-07 EP EP13191947.4A patent/EP2730900A3/en not_active Withdrawn
- 2013-11-08 CN CN201310553498.XA patent/CN103808409B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014095702A (ja) | 2014-05-22 |
| CN103808409B (zh) | 2017-12-29 |
| EP2730900A3 (en) | 2014-07-09 |
| BR102013027425A2 (pt) | 2015-05-26 |
| EP2730900A2 (en) | 2014-05-14 |
| CN103808409A (zh) | 2014-05-21 |
| US20140132946A1 (en) | 2014-05-15 |
| US8975594B2 (en) | 2015-03-10 |
| JP6348271B2 (ja) | 2018-06-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20180828 |
|
| FZDE | Discontinued |
Effective date: 20211110 |
|
| FZDE | Discontinued |
Effective date: 20211110 |