CA2746335C - Procede permettant de detecter la composition et la pression d'un gaz - Google Patents
Procede permettant de detecter la composition et la pression d'un gaz Download PDFInfo
- Publication number
- CA2746335C CA2746335C CA2746335A CA2746335A CA2746335C CA 2746335 C CA2746335 C CA 2746335C CA 2746335 A CA2746335 A CA 2746335A CA 2746335 A CA2746335 A CA 2746335A CA 2746335 C CA2746335 C CA 2746335C
- Authority
- CA
- Canada
- Prior art keywords
- gas
- variable electrical
- gas pressure
- electrical resistor
- sensor assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 50
- 230000004044 response Effects 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims description 211
- 239000000758 substrate Substances 0.000 claims description 37
- 238000005259 measurement Methods 0.000 claims description 27
- 230000000737 periodic effect Effects 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 16
- 230000008859 change Effects 0.000 claims description 12
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 5
- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 16
- 238000012546 transfer Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 238000009530 blood pressure measurement Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000003570 air Substances 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 5
- 230000010354 integration Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000036039 immunity Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000009462 micro packaging Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- 230000018199 S phase Effects 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005511 kinetic theory Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003530 single readout Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
L'invention concerne un procédé permettant de détecter la composition d'un gaz et la pression d'un gaz, sur la base des constantes thermiques d'une résistance électrique variable. Le procédé permettant de détecter la composition et la pression d'un gaz consiste à surveiller une résistance électrique variable dont la réponse thermique dynamique est déterminée par la conductivité thermique et la capacité thermique du gaz environnant d'un environnement atmosphérique donné. Dans le domaine thermique, le capteur possède une caractéristique passe-bas, dont le retard de phase est déterminé par les caractéristiques thermodynamiques du gaz environnant comme la composition et la pression. La présente invention peut servir de procédé permettant de détecter la composition d'un gaz. La présente invention peut également servir de procédé de détection de la pression d'un gaz.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CA2008/002231 WO2010069035A1 (fr) | 2008-12-19 | 2008-12-19 | Procédé permettant de détecter la composition et la pression d'un gaz |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2746335A1 CA2746335A1 (fr) | 2010-06-24 |
| CA2746335C true CA2746335C (fr) | 2014-05-13 |
Family
ID=42268213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2746335A Active CA2746335C (fr) | 2008-12-19 | 2008-12-19 | Procede permettant de detecter la composition et la pression d'un gaz |
Country Status (2)
| Country | Link |
|---|---|
| CA (1) | CA2746335C (fr) |
| WO (1) | WO2010069035A1 (fr) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6938493B2 (en) * | 1997-07-21 | 2005-09-06 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
| JP2002310826A (ja) * | 2001-02-08 | 2002-10-23 | Tgk Co Ltd | 圧力センサの調整方法 |
| US20060021444A1 (en) * | 2004-07-28 | 2006-02-02 | Helix Technology Corporation | Method of operating a resistive heat-loss pressure sensor |
| US7385199B2 (en) * | 2005-09-26 | 2008-06-10 | Teledyne Licensing, Llc | Microbolometer IR focal plane array (FPA) with in-situ mirco vacuum sensor and method of fabrication |
| US7331237B2 (en) * | 2006-02-01 | 2008-02-19 | Brooks Automation, Inc. | Technique for improving Pirani gauge temperature compensation over its full pressure range |
-
2008
- 2008-12-19 CA CA2746335A patent/CA2746335C/fr active Active
- 2008-12-19 WO PCT/CA2008/002231 patent/WO2010069035A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010069035A1 (fr) | 2010-06-24 |
| CA2746335A1 (fr) | 2010-06-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |