WO2010069035A1 - Procédé permettant de détecter la composition et la pression d'un gaz - Google Patents

Procédé permettant de détecter la composition et la pression d'un gaz Download PDF

Info

Publication number
WO2010069035A1
WO2010069035A1 PCT/CA2008/002231 CA2008002231W WO2010069035A1 WO 2010069035 A1 WO2010069035 A1 WO 2010069035A1 CA 2008002231 W CA2008002231 W CA 2008002231W WO 2010069035 A1 WO2010069035 A1 WO 2010069035A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
variable electrical
electrical resistor
gas pressure
sensor assembly
Prior art date
Application number
PCT/CA2008/002231
Other languages
English (en)
Inventor
Jean-François VIENS
Löic LE NOC
Original Assignee
Institut National D'optique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut National D'optique filed Critical Institut National D'optique
Priority to PCT/CA2008/002231 priority Critical patent/WO2010069035A1/fr
Priority to CA2746335A priority patent/CA2746335C/fr
Publication of WO2010069035A1 publication Critical patent/WO2010069035A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested

Definitions

  • the present invention is directed to a method and apparatus for sensing gas composition or pressure or both.
  • a conventional sensor such as a Pirani gauge
  • a Pirani gauge is calibrated against several known pressures to determine a relationship between ambient pressure and power dissipated by the sensor.
  • a Pirani gauge may be designed to have a wide dynamic range and be relatively simple and inexpensive, there is a need to be able to use this type of pressure gauge as a substitute for much higher priced gauges such as capacitance manometers and ionization gauges.
  • the growing markets of high-performance wafer-level micro-packaging require miniaturization of the pressure sensors and integration to standard CMOS processes and MEMS micro-devices such as bolometers, gyroscopes and accelerometers. In addition, these markets may require the capability of the sensor for measuring both the gas composition and the gas pressure.
  • Pressure sensors based on MEMS micro-sensor devices can achieve both low-cost and CMOS-compatible integration.
  • existing MEMS micro-sensor devices may show inaccurate pressure readings when subjected to temperature fluctuations, especially at low pressures.
  • US 2007/0069133 A1 relates to such temperature- sensitive micro-bolometer sensor, whereas the electrical response of the sensor depends on the substrate and environment temperatures by virtue of the temperature dependency of the variable resistance.
  • the method for pressure measurement relies on an absolute voltage reading instead of differential voltage readings, wherein absolute voltage reading may be subjected to inaccuracies if fabrication errors occur from one sensor to the other.
  • the method described in this prior art does not provide gas composition measurements.
  • US 7,456,633 An apparatus and method for measuring both the gas composition and the gas pressure is disclosed in US 7,456,633. This disclosure relates to an apparatus comprising a vacuum container, a pressure container, a discharge container, an ion gauge and a residual gas analyzer; arranged in such a way that miniaturization becomes very difficult and integration to standard CMOS processes and to MEMS micro-device is not achievable in practice.
  • the invention presents a novel method for measuring gas composition or gas pressure of a given atmospheric environment.
  • the gas sensor and method of operation herein described in this invention disclosure provides real-time gas composition or gas pressure measurements over a large dynamic range.
  • the gas sensor and method of operation are compatible with standard CMOS fabrication processes and readout circuits.
  • the method for sensing gas composition and gas pressure is based on the thermal constants of a variable electrical resistor.
  • the method consists of monitoring the variable electrical resistor whose dynamic thermal response is determined by the thermal conductivity and thermal capacity of the surrounding gas of a given atmospheric environment.
  • the gas sensor and method of operation herein described in this invention disclosure comprises a variable electrical resistor and a readout circuit for driving the electrical voltage across the variable resistor.
  • the variable resistor When the variable resistor is electrically excited and heated by the readout circuit, its temperature at equilibrium is a function of applied electrical power and of thermal transfer to the environment and to the surrounding gas.
  • the method for gas sensing consists of heating the variable resistor with modulated electrical excitations, at a given modulation frequency, and of measuring its dynamic thermal response.
  • the resistor has a low-pass characteristic, whose phase delay is determined by the thermodynamic characteristics of the surrounding gas such as composition and pressure.
  • the method consists of measuring the phase delay between the modulated excitation and the thermal response of the variable resistor.
  • the phase delay provides a measurement of the thermal capacity and thermal conductivity of the surrounding gas, both being related to gas composition and gas pressure.
  • a method for sensing gas consisting of: providing a variable electrical resistor in a gas environment, said variable electrical resistor changing electrical resistance with a change of temperature; electrically exciting said variable electrical resistor with a periodically modulated voltage source signal; measuring a time delay between the signal modulation of said periodically modulated voltage source and the signal modulation of said variable electrical resistor; and determining gas pressure from said time delay; or determining gas composition from said time delay, said gas pressure or said gas composition being determined from a mathematical parameter relation.
  • a gas sensor assembly comprising: at least one variable electrical resistor proximal to a substrate, exposed to the gas pressure of a given atmospheric environment; an electrical readout circuit connected to said variable electrical resistor, said variable electrical resistor acting as a variable electrical resistance in said electrical readout circuit; a periodically modulated voltage source electrically connected to said variable electrical resistor, wherein said periodically modulated voltage source is part of said readout electrical circuit; and a passband filter electrically connected to a phase comparator.
  • FIG 1. is a schematic representation of the gas sensor device and its surroundings.
  • FIG. shows the total heat budget of the system defined as the thermal transfers between the variable electrical resistor and the substrate and environment.
  • FIG 3. shows the variation of time delay t o as a function of air pressure p, for a 35x35 urn 2 variable electrical resistor gas pressure sensor at small modulation frequency ⁇ .
  • FIG 4. shows a variation of time delay t o as a function of carbon dioxide (CO 2 ) concentration in air at atmospheric pressure, for a 35x35 urn 2 variable electrical resistor gas pressure sensor at small modulation frequency ⁇ .
  • FIG 5. shows an exemplary embodiment of the gas sensor assembly.
  • the invention presents a novel method for measuring gas composition or gas pressure of a given atmospheric environment.
  • the gas sensor and method of operation herein described in this invention disclosure provides real-time gas composition or gas pressure measurements over a large dynamic range.
  • the gas sensor and method of operation are compatible to standard CMOS fabrication processes and readout circuits.
  • FIG. 1 schematizes an exemplary embodiment of the gas sensor.
  • the gas pressure sensing element consists of a variable electrical resistor [100], whose electrical resistance changes with respect to a change of its temperature.
  • the variable electrical resistor [100] is suspended in close proximity to a substrate [300] through suspending legs [200].
  • the variable electrical resistor [100] may consist of a suspended micro-thermistor, a suspended micro-electro-mechanical (MEMS) element, a suspended micro-bolometer platform, a suspended micro-wire, a suspended coil, or any variable electrical resistor device proximal to a substrate [300] and connected to the said substrate by suspending legs [200].
  • MEMS suspended micro-electro-mechanical
  • the variable electrical resistor [100] may have a width between 0.1 ⁇ m and 1000 ⁇ m, a length between 0.1 ⁇ m and 1000 ⁇ m, and a thickness of up to 10 ⁇ m.
  • the suspending legs [200] must provide enough mechanical rigidity for suspending the variable electrical resistor [100] at least 0.1 ⁇ m above the substrate [300]. Standard CMOS fabrication processes, or MEMS fabrication processes, can be used to fabricate the suspended electrical resistor device on the substrate.
  • the suspending legs [200] may be made of silicon nitride or silicon dioxide materials, and have a length between 1 ⁇ m and 1000 ⁇ m.
  • the suspending legs [200] should have smaller widths than the variable electrical resistor [100] in order to procure thermal isolation of the variable resistor [100] from the substrate [300] and to provide a path for electrical connection to the substrate [300].
  • the substrate [300] may consist of a silicon wafer or a CMOS electrical readout circuit or any CMOS integrated device.
  • the substrate is partly or fully enclosed within a gas pressure environment [400] which may include a window [500] (e.g. infrared window or diaphragm or mask) for shielding the variable resistor [100] from excess infrared radiation coming from the environment [400], and may include an optical aperture [600] for providing the variable resistor [100] infrared radiation from a scene.
  • a window [500] e.g. infrared window or diaphragm or mask
  • the environment [400] must be large enough to entirely encapsulate the variable electrical resistor [100] and suspending legs [200]. Since the variable electrical resistor [100] and suspending legs [200] have micrometer-scale dimensions, the environment [400] encompassing the variable resistor may have a volume as small as 1 picoliter (10 '15 m 3 ).
  • the environment [400] is filled with a gas that exerts pressure equally everywhere in the environment, including the top and bottom surfaces of the variable electrical resistor [100].
  • the gas may be composed of air, oxygen, nitrogen, noble gas or a mixture of several different gases including water vapor, carbon dioxide, nitrogen dioxide or any other trace gases or pollutant gases.
  • the temperature of the variable electrical resistor [100] is a function of applied heating power and thermal transfers to the substrate and to the environment.
  • Figure 2 shows the total heat budget of the system defined as the thermal transfers between the variable electrical resistor [100] and the substrate [300] and environment [400].
  • the variable electrical resistor [100] receives heat from a plurality of sources:
  • variable electrical resistor [100] dissipates heat to a plurality of thermal conduction paths: . P rad , by thermal radiation [40]
  • the heat budget is the sum of all inward and outward power components of the variable electrical resistor [100], as shown in Figure 2.
  • the main component to the heat budget, the electrical excitation P e iec [30], is related to the electrical resistance R b of the variable resistor [100], the electrical potential V b across the legs [200] of the resistor, and the electrical current i b applied through the resistor.
  • variable electrical resistor [100] may comprise a plurality of materials or a plurality of thin film materials surrounded by gas.
  • the heat capacity C of the variable electrical resistor [100] can be expressed as a combination of resistor heat capacity Cresistor and gas heat capacity C gas :
  • V is the volume of each of the resistor materials
  • p is the density of each of the resistor materials
  • c is the mass specific heat of each of the resistor materials.
  • C g is the effective heat capacity of the gas surrounding the variable resistor [100] and is dependent on the density p gas of the gas, the mass specific heat c gas of the gas and the effective volume V gas of the gas surrounding the variable resistor.
  • the effective heat capacity C gas of the gas surrounding the variable resistor is therefore dependent on the gas composition and pressure p by virtue of the ideal gas law:
  • the variable electrical resistor [100] comprises a combination of silicon dioxide and silicon nitride thin films for procuring mechanical rigidity to the resistor; a metallic thin film for procuring electrical conductivity to the resistor; and a thermally sensitive thin film material for procuring change of electrical properties with a change of temperature of the resistor.
  • the thermally sensitive thin film material may consist of vanadium oxide, titanium oxide or amorphous silicon. Vanadium oxide (such as VO x with 1 ⁇ x ⁇ 3) has received most attention as a variable electrical resistor material because of the large temperature coefficient of resistance (TCR) of about 2% per Kelvin near 2O 0 C. The properties of vanadium oxide films are dependent of the microstructure and crystallinity.
  • thermally sensitive membrane materials can be used for the variable electrical resistor [100] ideally with a temperature coefficient of resistance (TCR) of at least 0.5% per Kelvin.
  • the thermally sensitive membrane material is not limited to a specific material composition; it may consist of vanadium oxide, titanium oxide, amorphous silicon or any material with a temperature coefficient of resistance (TCR) of at least 0.5% per Kelvin.
  • the coefficient of thermal conduction G between the variable electrical resistor [100] and its surroundings [300] [400] can be described by the contribution of several thermal dissipation mechanisms of the system [40] [50] [60] [70] [80]:
  • G Gieg + Gradiation + G gas + G conv + ...
  • G ⁇ eg is the coefficient of thermal conduction between the variable electrical resistor [100] and the substrate [300] through the suspending legs [200] which determines the heat dissipation through the legs [50]. This coefficient depends on the leg length, leg cross-section and leg material.
  • the typical thermal conductivity to the substrate through the legs is less than 10 ⁇ 6 W/K.
  • G rad i at i on is the coefficient of thermal conduction between the variable electrical resistor [100] and the environment [400] by emitted infrared radiation which determines the heat dissipation through radiation [40].
  • This coefficient depends on the surface area of the variable electrical resistor [100] and on its spectral emissivity which could be a blackbody or non-blackbody function of temperature.
  • this coefficient of thermal conduction can be approximated as the sum of radiated power from the resistor bottom surface facing the substrate [300] and from the resistor top surface facing the environment [400]:
  • ⁇ is the Stefan-Boltzmann constant
  • ⁇ is the effective emissivity of the variable electrical resistor [100]
  • A is its surface area
  • ⁇ is a form factor that includes thermal dissipation through other parts of the resistor structure
  • T b is the resistor temperature
  • T 3 is the substrate temperature and T env is an effective environment temperature related to the hemispheric distribution of all thermal components of the environment seen by the variable electrical resistor [100].
  • T env is an effective environment temperature related to the hemispheric distribution of all thermal components of the environment seen by the variable electrical resistor [100].
  • the right-hand side of the equation assumes that the temperature difference between the resistor and the substrate is small with respect to the absolute temperature of the resistor (
  • Ggas is the coefficient of thermal conduction between the variable electrical resistor [100] and its surroundings through the gas, which comprises heat dissipation to the substrate [300] through the gas [60] and heat dissipation to the environment [400] through the gas [70]. This coefficient can be obtained by the kinetic theory of gases.
  • the heat conduction G gas (p) of a platform, a wire or a coil follows similar mathematical form with respect to pressure p.
  • the mathematical form is the following;
  • d s the distance between the variable electrical resistor [100] and the substrate [300]
  • d e the distance between the variable electrical resistor [100] and the window [500]
  • A is the surface area of the variable electrical resistor [100]
  • ⁇ is a form factor that includes thermal dissipation through other parts of the 5 resistor structure
  • k (T b - T en v)/(T b - T 5 ).
  • d e can be defined as an effective distance between the variable electrical resistor [100] and the environment [400].
  • ⁇ gas is the thermal conductivity of the gas in the high-pressure regime and ⁇ gas is the thermal conductivity per unit pressure and length in the low- pressure regime.
  • Other gases show different coefficients.
  • the coefficient of thermal conduction Ggas between the variable electrical resistor [100] and its surroundings [300] [400] through the gas is thus function of gas composition and pressure.
  • GooTM is the coefficient of thermal conduction between the variable electrical resistor [100] and its surroundings by gas convection [80].
  • the heat transferred by free convection [80] from the variable electrical resistor [100] into the gas to the environment [400] at the temperature T env is given by
  • the convection coefficient h is not always known precisely, and the gas pressure measurement method herein described in this invention cancels the need for precise knowledge of this term of the equation.
  • the thermal conduction G CO nv by free air convection through gas movement is negligible compared to the thermal conduction G gas through the gas.
  • the thermal conduction G between the variable electrical resistor [100] and its surroundings [300] [400] can also be described by the contribution from additional factors herein not mentioned, dependent on the resistor three-dimensional design and fabrication. In practice, these additional factors are not always known precisely, and the gas measurement method herein described in this invention cancels the need for precise knowledge of these terms of the equation.
  • thermal capacity C and thermal conductivity G of the system are both related to gas composition and gas pressure. Therefore, it is the object of the gas sensor and method of operation herein described in this invention disclosure to provide a measurement of the thermal capacity and thermal conductivity of the system, from which gas composition or gas pressure can be determined.
  • variable electrical resistor [100] is electrically excited by a voltage source connected to it. Since the variable electrical resistor device is electrically resistive, it is well known in the art that this electrical excitation procures heating to the resistor by virtue of the Joule effect.
  • the temperature of the variable electrical resistor [100] at equilibrium is a function of applied electrical power [30] and of thermal transfer to the substrate [300] and to the environment [400] via the plurality of thermal dissipation mechanisms previously described [10] [20] [40] [50] [60] [70] and [80].
  • the principle of gas sensing consists of heating the variable electrical resistor [100] by Joule heating [30] and of measuring dynamically the thermal capacity and thermal conductivity of the system, both being related to gas composition and pressure, and from which gas composition or gas pressure can be determined.
  • the method of sensing gas with a variable electrical resistor device is based on probing its thermal response with modulated electrical excitations [30], wherein the thermal response is determined by the thermal capacity and thermal conductivity of the surrounding gas of a given atmospheric environment.
  • the variable electrical resistor has a low-pass characteristic, whose phase delay is determined by the thermodynamic characteristics of the surrounding gas such as gas composition and pressure. Measurement of the resistor's phase delay in the thermal domain will thus provide information about gas composition and pressure.
  • the Joule heating [30] comes from a periodically modulated electrical excitation, wherein the electrical excitation is modulated in time with a periodic electrical signal.
  • the periodic electrical signal may be a sinusoidal signal, a square signal, a binary signal, a pulsed signal or any bounded periodic signal.
  • the gas sensing method consists of measuring the phase delay (or time delay) between the thermal response of the variable electrical resistor and the modulated electrical excitation; wherein the phase delay (or the time delay) provides a measurement of the thermal capacity and thermal conductivity of the surrounding gas, both being related to gas composition and pressure as described previously.
  • the method for gas sensing herein described in this invention consists of heating the variable resistor [100] with a modulated electrical excitation [30], at a given modulation frequency, and of measuring its dynamic thermal response.
  • the thermal response exhibits a phase delay (or, equivalently, a time delay) due to the thermal constants of the variable electrical resistor.
  • the time delay is related to the thermal dissipation mechanisms of the variable electrical resistor [40] [50] [60] [70] [80] which are related to gas composition and gas pressure.
  • the time delay is also related to the thermal excitations [10] [20] [30] assumed to be dominated by the Joule heating P e ⁇ ec [30]. Taking into account the thermodynamic interactions between the variable electrical resistor [100] and its surroundings [300] [400], the following heat equation can be derived:
  • C is the thermal capacity of the variable electrical resistor [100]
  • G its coefficient of thermal conduction comprising every heat dissipation mechanisms previously defined
  • ⁇ T the temperature change of the variable electrical resistor [100] with respect to the substrate [300]:
  • ⁇ T T b - T s .
  • the right hand side of the equation represents the electrical power applied to the variable electrical resistor [30].
  • T s the solution to the change of temperature ⁇ T of the variable electrical resistor [100] with respect to the temperature of the substrate [300] T s is:
  • G G
  • the first term of the solution on ⁇ T represents a transient that becomes stable after a time t > C/G which is typically 100 msec or more.
  • the second term is a steady-state periodic function.
  • the term dP/dT is the differential Joulean heating of the readout circuit which is assumed to be constant within the ⁇ T range of interest. Let's consider only the steady-state regime:
  • Ru Rao ⁇ 1 + ⁇ T) -s R l ⁇ f i + ⁇ - ⁇ + ⁇ i
  • TCR temperature coefficient of resistance
  • the resistor [100] acts as a variable electrical resistance due to its non-zero TCR, and both its temperature T b and time delay t 0 can be determined by monitoring the periodic modulation of R b at steady- state.
  • Time delay and phase delay are both related to the thermal capacity C and thermal conductivity G of the variable electrical resistor. Therefore a measurement of time delay t 0 , or phase delay ⁇ , by monitoring the periodic modulation of the resistor electrical resistance R b at steady-state will provide a measurement of C and G of the variable electrical resistor [100]. Since C and G depend on gas composition and gas pressure p within the environment as mentioned previously, a measurement of time delay t 0 , or phase delay ⁇ , will procure a measurement of gas composition or of gas pressure p within the environment.
  • the differential Joulean heating term dP/dT depends on the specifics of the readout circuit and is known for a given readout circuit with known resistances.
  • Figure 3 plots the relation between time delay t 0 and gas pressure p for an exemplary variable electrical resistor 35 ⁇ m in size. The plot assumes negligible differential Joulean heating. It can be seen that the time delay t 0 varies between 0.01 msec and 100 msec as function of pressure p in the range of gas pressures between 10 "4 Torr and 10 4 Torr. Therefore, gas pressure measurement can be performed in real time over a wide pressure range with less than 100 msec between each measurement. Also, it can be seen that the time delay t 0 varies according to gas composition. Discrimination between different gas compositions is best obtained at pressures above 10 Torr.
  • gas composition measurement can be performed in real time with less than 1 msec between each measurement at a given gas pressure p in the range between 10 2 Torr and 10 5 Torr.
  • a single measurement of time delay t 0 can provide either a gas pressure measurement or a gas composition measurement, not both at the same time.
  • variable electrical resistor sensor of the present invention can thus be used to monitor the pressure of a gas below and at atmospheric pressure, so the sensor is not limited to sensing gas pressure inside vacuum environments or packages.
  • the gas pressure sensing capability of the variable electrical resistor gas sensor can be tuned below 10 "4 Torr or above 10 3 Torr. Low pressure sensing capability can be achieved, for example, by increasing the surface area A and decreasing the emissivity ⁇ of the variable electrical resistor [100] and by increasing the length of the suspending legs [200].
  • High pressure sensing capability can be achieved, for example, by decreasing the distances d s and d e between the variable electrical resistor [100] and the substrate [300] and window [500].
  • Gas pressure sensing tuning capabilities of the variable electrical resistor gas sensor are not limited to these specific parameter changes.
  • Several variable electrical resistors, with different physical characteristics such as the ones just mentioned, may be combined within a single readout circuit to provide sensing capability over a wider dynamic range than a single variable electrical resistor.
  • variable electrical resistors may be combined and tuned for measuring gas pressure at low pressure regimes, while several other variable electrical resistors may be combined in the same readout circuit and tuned for measuring gas pressure at high pressure regimes; the plurality of variable electrical resistors thus combined to provide sensing capability over an overall wider dynamic range.
  • the plurality of variable electrical resistors may be combined in series or in parallel with respect to the voltage source [120] along with load resistances, or load inductances, or load capacitances, or a combination thereof comprised in the same readout circuit [101].
  • variable electrical resistor gas sensor or plurality of variable electrical resistor gas sensors, can also be used for sensing gas composition.
  • Gas composition measurements can be performed at a given gas pressure p in the range of pressures between 10 2 Torr and 10 5 Torr.
  • Figure 4 plots the relation between time delay t 0 and gas composition for an exemplary variable electrical resistor of 35um in size. The plot assumes negligible differential Joulean heating.
  • the relative concentration of CO 2 in Air at atmospheric pressure modifies significantly the time delay of the gas sensor, which can be used to determine gas composition as long as the nature of the gas mixture is known.
  • the method for sensing gas with a variable electrical resistor is based on measuring the thermal response of the variable resistor with periodically modulated electrical excitations.
  • the method consists of measuring the time delay (or phase delay) between the signal modulation of the variable electrical resistor [100] and the signal modulation of the electrical excitation [30] which acts as a reference signal. Since the time delay (or phase delay) is related to the thermal capacity and thermal conductivity of the variable electrical resistor, a measurement of gas composition or gas pressure within the environment is obtained as described previously.
  • the method for gas sensing herein described in the present invention consists of; 1) Electrically exciting a variable electrical resistor with a periodically modulated voltage source signal, wherein said variable electrical resistor changes electrical resistance with a change of temperature; and 2) Measuring the time delay between the signal modulation of the said periodically modulated voltage source and the signal modulation of the said variable electrical resistor; and 3) Determining gas pressure from said time delay; or 4) Determining gas composition from said time delay.
  • FIG. 5 schematizes an embodiment of a gas sensor assembly of the present invention.
  • the gas sensor assembly of the present invention comprises: 1) At least one variable electrical resistor [100] proximal to a substrate [300] exposed to the gas pressure of a given atmospheric environment [400]; and 2) A readout electrical circuit [101] connected to the said variable electrical resistor [100], wherein said variable electrical resistor acts as a variable electrical resistance in the said readout electrical circuit; and 3) A periodically modulated voltage source [120] electrically connected to the said variable electrical resistor [100], wherein said periodically modulated voltage source is part of said readout electrical circuit [101]; and 4) A passband filter [140] electrically connected to a phase comparator [150].
  • the variable electrical resistor gas sensor assembly of the present invention generally refers to an assembly comprising the variable electrical resistor [100], suspending legs [200] and a substrate [300] all connected electrically to a readout electrical circuit [101].
  • the readout electrical circuit [101] of the present invention comprises the variable electrical resistor [100], the periodically modulated voltage source [120], the passband filter [140] and the phase comparator [150].
  • the readout electrical circuit [101] may comprise a plurality of load resistors, capacitors and inductors.
  • the readout circuit may be integrated on the substrate [300] by CMOS fabrication process, or be external to the substrate and made of standard electronics components electrically connected to the variable electrical resistor [100].
  • variable electrical resistor [100] is a variable electrical resistance whose electrical resistance is function of the temperature, is part of the readout circuit [101] and is exposed to the gas of a given atmospheric environment [400]. The rest of the readout circuit [101] may or may not be exposed to the gas of the environment [400].
  • the readout circuit [101] surface area may be as small as 1 mm 2 or smaller.
  • V V(t, ⁇ )
  • a preferred embodiment consists of a digital readout circuit where the voltage source [120] generates a periodic binary signal of alternating ones and zeros of voltage amplitude ⁇ v described by the summation of several Fourier components of frequency harmonic n:
  • G Gieg + Gradiation + G gas + Gconv " O ⁇ v 2 R b0 (R L -Rbo) / 2(R L + Rbo) 3 -
  • Time delay measurements can also be obtained at other frequency harmonics
  • > 1 with a passband filter [140] transmitting at the frequency ⁇ n ⁇ 0 .
  • the specifics of the readout circuit comprising resistances, capacitances and inductances, may include an additional circuit-related phase delay from 0 to 2 ⁇ , which is known and taken into account during sensor calibration.
  • Figure 5 shows an exemplary readout circuit embodiment of the invention.
  • the readout circuit [101] includes a modulated voltage source [120] driving both a variable electrical resistor [100] and a load resistance [130].
  • the readout circuit [101] also includes an electrical passband filter [140] connected to an electrical phase comparator [150].
  • the voltage V b at the variable electrical resistor [100] is connected to the passband filter [140].
  • the readout circuit [101] may be made of analog or digital electronics components or a combination of analog and digital electronics components. Given this circuit embodiment, the voltage V b at the variable electrical resistor [100] is given by the following transfer function well known in the art:
  • V b V R b / (RL + Rb)
  • the voltage V b will exhibit time-delayed modulation since V b is related to the time-delayed R b by virtue of the abovementioned transfer function.
  • the time delay t O b between the voltage V and the voltage Vb may be different than the abovementioned time delay t 0 between the voltage V and the electrical resistance R b [100] since V b and R b scale differently with respect to V.
  • the ratio between R L and R b will determine the value of the time delay t Ob between the voltage V and the voltage V b , and the time delay t Ob will converge to the value t o under the condition Rb»RL-
  • the modulated voltage source V and the resistor voltage V b are connected to a passband filter [140] and a phase comparator [150], wherein the voltage source V acts as a reference signal with a time delay of zero.
  • the phase comparator [150] provides an electrical output voltage proportional to the difference of phase between V and V b : Vs ⁇ ⁇ o t O b, wherein a calibration curve between the time delay t O b and gas pressure p can be determined.
  • the gas pressure can be determined by the output voltage V s [180] of the phase comparator [150] of the readout circuit [101]. Also, since the time delay (or phase delay) is related to gas composition as described previously, the gas composition can be determined by the output voltage V s [180] of the phase comparator [150] of the readout circuit [101].
  • the phase comparator [150] may consist of a X-OR digital element combined with an integrator, a voltage combiner element combined with an integrator, or any component that provides frequency and phase analysis such as a Fourier analysis apparatus.
  • the invention is not limited to this specific readout circuit embodiment and may show different circuit architectures comprising electrical resistors, capacitors and inductors, connected in such a way as to generate different transfer functions with or without electrical gain, and utilized to provide a measurement of the time delay of the variable electrical resistor [100], wherein the voltage source V [120] acts as a reference signal to the phase comparator [150].
  • the gas sensor assembly of the present invention becomes calibrated for gas pressure measurements by specifying the parametric relation between the output voltage V s [180] of the phase comparator and the gas pressure p within the environment [400].
  • the relation between V 3 and p for the gas sensor assembly is given by a parametric relation. Assuming no temperature dependence, the relation between V s and p, and the relation between t 0 and p, are fundamentally linked to the relation between the thermal capacity C and the thermal conductivity G of the variable electrical resistor and the gas pressure p:
  • calibrating the gas sensor assembly made of a variable electrical resistor [100] and readout circuit [101] requires at least 6 parameters, because the mathematical relation between gas pressure and time delay comprises at least 6 parameters; X1 , X2, X3, X4, X5 and X6. These parameters can be measured by performing at least 6 time delay (or phase delay, or phase comparator output voltage) measurements at a specific modulation frequency ⁇ and at least 6 different gas pressures, from which the parameters can be determined using standard fitting routines. These parameters depend on several factors such as temperature, gas composition and variable electrical resistor physical characteristics. A single parametric relation can be applied to a plurality of gas sensor assemblies if factors such as temperature, gas composition and variable electrical resistor physical characteristics are kept the same. Therefore, if the temperature and gas composition are constant, the same parametric relation applies to a plurality of gas sensor assemblies of the same physical characteristics. Measurements and calibration should always be done at a specific modulation frequency ⁇ .
  • the gas sensor assembly of the present invention becomes calibrated for gas composition measurements by specifying the parametric relation between the output voltage V s [180] of the phase comparator and the gas composition within the environment [400].
  • the gas composition determines the values of ⁇ ga s, ⁇ ga s, and C 2 . Therefore only parameters X2, X3, X4, X5 and X6 have to be calibrated with respect to gas composition, and the same abovementioned mathematical parametric relation can be used for calibrating the gas sensor assembly for gas composition measurements.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

L'invention concerne un procédé permettant de détecter la composition d'un gaz et la pression d'un gaz, sur la base des constantes thermiques d'une résistance électrique variable. Le procédé permettant de détecter la composition et la pression d'un gaz consiste à surveiller une résistance électrique variable dont la réponse thermique dynamique est déterminée par la conductivité thermique et la capacité thermique du gaz environnant d'un environnement atmosphérique donné. Dans le domaine thermique, le capteur possède une caractéristique passe-bas, dont le retard de phase est déterminé par les caractéristiques thermodynamiques du gaz environnant comme la composition et la pression. La présente invention peut servir de procédé permettant de détecter la composition d'un gaz. La présente invention peut également servir de procédé de détection de la pression d'un gaz.
PCT/CA2008/002231 2008-12-19 2008-12-19 Procédé permettant de détecter la composition et la pression d'un gaz WO2010069035A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CA2008/002231 WO2010069035A1 (fr) 2008-12-19 2008-12-19 Procédé permettant de détecter la composition et la pression d'un gaz
CA2746335A CA2746335C (fr) 2008-12-19 2008-12-19 Procede permettant de detecter la composition et la pression d'un gaz

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CA2008/002231 WO2010069035A1 (fr) 2008-12-19 2008-12-19 Procédé permettant de détecter la composition et la pression d'un gaz

Publications (1)

Publication Number Publication Date
WO2010069035A1 true WO2010069035A1 (fr) 2010-06-24

Family

ID=42268213

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CA2008/002231 WO2010069035A1 (fr) 2008-12-19 2008-12-19 Procédé permettant de détecter la composition et la pression d'un gaz

Country Status (2)

Country Link
CA (1) CA2746335C (fr)
WO (1) WO2010069035A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030041670A1 (en) * 2001-02-08 2003-03-06 Hisatoshi Hirota Method of adjusting pressure sensor
US6945119B2 (en) * 1997-07-21 2005-09-20 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
US20070069133A1 (en) * 2005-09-26 2007-03-29 Rockwell Scientific Licensing, Llc Microbolometer IR Focal Plane Array (FPA) with In-Situ Micro Vacuum Sensor and Method of Fabrication
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6945119B2 (en) * 1997-07-21 2005-09-20 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US20030041670A1 (en) * 2001-02-08 2003-03-06 Hisatoshi Hirota Method of adjusting pressure sensor
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
US20070069133A1 (en) * 2005-09-26 2007-03-29 Rockwell Scientific Licensing, Llc Microbolometer IR Focal Plane Array (FPA) with In-Situ Micro Vacuum Sensor and Method of Fabrication
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range

Also Published As

Publication number Publication date
CA2746335C (fr) 2014-05-13
CA2746335A1 (fr) 2010-06-24

Similar Documents

Publication Publication Date Title
US8117898B2 (en) Method for sensing gas composition and pressure
Shie et al. Characterization and modeling of metal-film microbolometer
US8171801B2 (en) Micro-thermistor gas pressure sensor
US8748808B2 (en) Detection and correction of a loss of calibration of microbolometer thermal imaging radiometers
KR20200101989A (ko) 가스 센서 및 가스 센서를 작동하기 위한 방법
US9057739B2 (en) Sensor response calibration for linearization
US20200088669A1 (en) Method for Operating a Sensor Device
US5303167A (en) Absolute pressure sensor and method
EP3690417A1 (fr) Appareil pour la mesure du vide à perte thermique ayant une compensation de température améliorée et une plage de mesure étendue
Sisto et al. Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS
KR100959829B1 (ko) 나노 소자 가스 센서를 이용하고 온도 보상이 가능한 가스측정 장치
US7613586B2 (en) Thermal vacuum gauge
Chou et al. An innovative Pirani pressure sensor
Neuzil et al. Evaluation of thermal parameters of bolometer devices
Pertijs Calibration and Self‐Calibration of Smart Sensors
Zhang et al. Investigating a micro Pirani gauge for multi-function sensing
CA2746335C (fr) Procede permettant de detecter la composition et la pression d'un gaz
Zarfl et al. A novel miniaturised sensor for combined static and dynamic pressure measurements in Harsh Environments
US8893554B2 (en) System and method for passively compensating pressure sensors
CA2746336C (fr) Capteur de pression de gaz a micro-thermistance
RU2389991C2 (ru) Способ устранения вариаций температуры внешней среды в теплоэлектрическом вакуумметре и устройство для его реализации
Freire et al. Dynamic response of a feedback thermoresistive electrical substitution pyranometer
JP3869169B2 (ja) 液面検出装置
Hajipour et al. Precision Temperature Control of Microsystems using On-Package Heaters and Sensors
Allègre et al. A room temperature Si3N4/SiO2 membrane-type electrical substitution radiometer using thin film platinum thermometers

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08878832

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2746335

Country of ref document: CA

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08878832

Country of ref document: EP

Kind code of ref document: A1