CA2617983A1 - Imagerie tomographique par microscope interferometrique a immersion - Google Patents
Imagerie tomographique par microscope interferometrique a immersion Download PDFInfo
- Publication number
- CA2617983A1 CA2617983A1 CA002617983A CA2617983A CA2617983A1 CA 2617983 A1 CA2617983 A1 CA 2617983A1 CA 002617983 A CA002617983 A CA 002617983A CA 2617983 A CA2617983 A CA 2617983A CA 2617983 A1 CA2617983 A1 CA 2617983A1
- Authority
- CA
- Canada
- Prior art keywords
- interferometer
- plane
- substantially equal
- medium
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 31
- 238000007654 immersion Methods 0.000 title claims description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 62
- 239000006185 dispersion Substances 0.000 claims abstract description 34
- 238000000926 separation method Methods 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 230000004075 alteration Effects 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 4
- 238000005305 interferometry Methods 0.000 description 3
- 238000012014 optical coherence tomography Methods 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000499 gel Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000008363 phosphate buffer Substances 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 230000001944 accentuation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
- G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/14—Condensers affording illumination for phase-contrast observation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Dispersion Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0508428 | 2005-08-08 | ||
| FR0508428A FR2889584B1 (fr) | 2005-08-08 | 2005-08-08 | Imagerie tomographique par microscope interferometrique a immersion |
| PCT/FR2006/001909 WO2007017589A1 (fr) | 2005-08-08 | 2006-08-04 | Imagerie tomograph i que par microscope interférométrique à immersion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2617983A1 true CA2617983A1 (fr) | 2007-02-15 |
Family
ID=36297684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002617983A Abandoned CA2617983A1 (fr) | 2005-08-08 | 2006-08-04 | Imagerie tomographique par microscope interferometrique a immersion |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080246972A1 (https=) |
| EP (1) | EP1913331A1 (https=) |
| JP (1) | JP2009505051A (https=) |
| CN (1) | CN101243298A (https=) |
| CA (1) | CA2617983A1 (https=) |
| FR (1) | FR2889584B1 (https=) |
| WO (1) | WO2007017589A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010025864A (ja) * | 2008-07-23 | 2010-02-04 | Hamamatsu Photonics Kk | 干渉測定装置 |
| DE102010007728A1 (de) * | 2010-02-12 | 2011-09-29 | Leica Microsystems Cms Gmbh | Vorrichtung und Verfahren zum Scannen eines Objekts und Mikroskop |
| JP5930620B2 (ja) * | 2011-06-28 | 2016-06-08 | キヤノン株式会社 | 光干渉断層装置および方法 |
| TWI490542B (zh) | 2013-05-07 | 2015-07-01 | Univ Nat Taiwan | A scanning lens and an interference measuring device using the scanning lens |
| FR3015659B1 (fr) * | 2013-12-20 | 2016-01-29 | Centre Nat Rech Scient | Appareil et procede de tomographie optique |
| TWI553294B (zh) * | 2014-11-05 | 2016-10-11 | Univ Nat Taiwan | 干涉式光學成像裝置、其應用之系統及方法 |
| JP6534889B2 (ja) * | 2015-07-31 | 2019-06-26 | オリンパス株式会社 | 倒立型顕微鏡および倒立型顕微鏡システム |
| JP6697762B2 (ja) * | 2016-05-16 | 2020-05-27 | パナソニックＩｐマネジメント株式会社 | 光干渉測定装置及び光干渉測定方法 |
| CN107894204B (zh) | 2016-10-04 | 2020-02-21 | 财团法人工业技术研究院 | 干涉仪及其成像方法 |
| AU2019207864B2 (en) * | 2018-01-12 | 2023-12-14 | Damae Medical | Dynamic focusing system for an optical device |
| WO2022133433A1 (en) * | 2020-12-15 | 2022-06-23 | Alfred E. Mann Institute For Biomedical Engineering At The University Of Southern California | Optical coherence tomography (oct) system with a multi-pass dispersion compensation cell |
| CN115031623A (zh) * | 2022-05-12 | 2022-09-09 | 中国电子科技集团公司第十一研究所 | 一种白光干涉显微物镜 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5208648A (en) * | 1991-03-11 | 1993-05-04 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
| JP2875181B2 (ja) * | 1995-03-17 | 1999-03-24 | 株式会社生体光情報研究所 | 断層撮影装置 |
| ES2398088T3 (es) * | 2001-06-29 | 2013-03-13 | Universite Libre De Bruxelles | Procedimiento y dispositivo destinado a la obtención por microscopía de imagenes en tres dimensiones de una muestra |
| JP2004061330A (ja) * | 2002-07-30 | 2004-02-26 | Rikogaku Shinkokai | 光学フィルタ及び表面形状測定装置 |
| DE10244552B3 (de) * | 2002-09-25 | 2004-02-12 | Robert Bosch Gmbh | Interferometrische Messeinrichtung |
| US6927860B2 (en) * | 2003-05-19 | 2005-08-09 | Oti Ophthalmic Technologies Inc. | Optical mapping apparatus with optimized OCT configuration |
| TWI335417B (en) * | 2003-10-27 | 2011-01-01 | Zygo Corp | Method and apparatus for thin film measurement |
| JP2005201660A (ja) * | 2004-01-13 | 2005-07-28 | Mitsui Medical Clinic | コンタクトレンズの３次元表面形状測定方法 |
| US7375821B2 (en) * | 2004-12-03 | 2008-05-20 | Veeco Instruments, Inc. | Profilometry through dispersive medium using collimated light with compensating optics |
| FR2881222A1 (fr) * | 2005-01-25 | 2006-07-28 | Debiotech Sa | Procede de mesure de volume par profilometrie optique de surface dans un dispositif micromecanique et ensemble destine a une telle mesure |
| US7630085B2 (en) * | 2005-04-19 | 2009-12-08 | Texas Instruments Incorporated | Interferometers of high resolutions |
-
2005
- 2005-08-08 FR FR0508428A patent/FR2889584B1/fr not_active Expired - Fee Related
-
2006
- 2006-08-04 US US11/997,929 patent/US20080246972A1/en not_active Abandoned
- 2006-08-04 JP JP2008525598A patent/JP2009505051A/ja active Pending
- 2006-08-04 CA CA002617983A patent/CA2617983A1/fr not_active Abandoned
- 2006-08-04 CN CN200680029559.0A patent/CN101243298A/zh active Pending
- 2006-08-04 EP EP06794295A patent/EP1913331A1/fr not_active Withdrawn
- 2006-08-04 WO PCT/FR2006/001909 patent/WO2007017589A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| FR2889584B1 (fr) | 2008-07-11 |
| WO2007017589A1 (fr) | 2007-02-15 |
| CN101243298A (zh) | 2008-08-13 |
| FR2889584A1 (fr) | 2007-02-09 |
| JP2009505051A (ja) | 2009-02-05 |
| EP1913331A1 (fr) | 2008-04-23 |
| US20080246972A1 (en) | 2008-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |