CA2540691C - Flexural plate wave sensor - Google Patents
Flexural plate wave sensor Download PDFInfo
- Publication number
- CA2540691C CA2540691C CA2540691A CA2540691A CA2540691C CA 2540691 C CA2540691 C CA 2540691C CA 2540691 A CA2540691 A CA 2540691A CA 2540691 A CA2540691 A CA 2540691A CA 2540691 C CA2540691 C CA 2540691C
- Authority
- CA
- Canada
- Prior art keywords
- plate
- wave sensor
- flexural
- flexural plate
- teeth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012528 membrane Substances 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 6
- FHUGMWWUMCDXBC-UHFFFAOYSA-N gold platinum titanium Chemical compound [Ti][Pt][Au] FHUGMWWUMCDXBC-UHFFFAOYSA-N 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 4
- UUWCBFKLGFQDME-UHFFFAOYSA-N platinum titanium Chemical compound [Ti].[Pt] UUWCBFKLGFQDME-UHFFFAOYSA-N 0.000 claims description 4
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 239000011787 zinc oxide Substances 0.000 claims description 3
- QLJCFNUYUJEXET-UHFFFAOYSA-K aluminum;trinitrite Chemical compound [Al+3].[O-]N=O.[O-]N=O.[O-]N=O QLJCFNUYUJEXET-UHFFFAOYSA-K 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 210000001520 comb Anatomy 0.000 description 27
- 238000010897 surface acoustic wave method Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 7
- 230000001788 irregular Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/675,398 US7109633B2 (en) | 2003-09-30 | 2003-09-30 | Flexural plate wave sensor |
| US10/675,398 | 2003-09-30 | ||
| PCT/US2004/032061 WO2005033660A2 (en) | 2003-09-30 | 2004-09-30 | Flexural plate wave sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2540691A1 CA2540691A1 (en) | 2005-04-14 |
| CA2540691C true CA2540691C (en) | 2012-09-25 |
Family
ID=34377140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2540691A Expired - Fee Related CA2540691C (en) | 2003-09-30 | 2004-09-30 | Flexural plate wave sensor |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7109633B2 (zh) |
| EP (1) | EP1671378B1 (zh) |
| JP (1) | JP4620674B2 (zh) |
| KR (2) | KR20060088558A (zh) |
| CN (1) | CN1883059B (zh) |
| AU (1) | AU2004278769B2 (zh) |
| CA (1) | CA2540691C (zh) |
| WO (1) | WO2005033660A2 (zh) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040141541A1 (en) * | 2002-12-02 | 2004-07-22 | John Williams | MEMS-based thermogravimetric analyzer |
| US7449821B2 (en) * | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| US7243549B2 (en) * | 2005-05-19 | 2007-07-17 | Honeywell International Inc. | Acoustic wave lubricity sensor |
| US7319284B2 (en) * | 2005-09-02 | 2008-01-15 | Precision Instrument Development Center National Applied Research Laboratories | Surface acoustic wave device and method for fabricating the same |
| US7854505B2 (en) * | 2006-03-15 | 2010-12-21 | The Board Of Trustees Of The University Of Illinois | Passive and active photonic crystal structures and devices |
| ATE539336T1 (de) | 2006-03-21 | 2012-01-15 | Radi Medical Systems | Drucksensor |
| US8004021B2 (en) * | 2006-04-21 | 2011-08-23 | Bioscale, Inc. | Microfabricated devices and method for fabricating microfabricated devices |
| JP4900387B2 (ja) * | 2006-06-16 | 2012-03-21 | 株式会社村田製作所 | 液中物質検出センサ |
| JP5204116B2 (ja) * | 2006-11-03 | 2013-06-05 | リサーチ・トライアングル・インスティチュート | 撓みモードの圧電性変換器を用いる増強された超音波画像診断用プローブ |
| US7999440B2 (en) * | 2006-11-27 | 2011-08-16 | Bioscale, Inc. | Micro-fabricated devices having a suspended membrane or plate structure |
| US20080121042A1 (en) * | 2006-11-27 | 2008-05-29 | Bioscale, Inc. | Fluid paths in etchable materials |
| JP4867858B2 (ja) * | 2007-08-29 | 2012-02-01 | セイコーエプソン株式会社 | Ｓａｗセンサ |
| GB0723526D0 (en) * | 2007-12-03 | 2008-01-09 | Airbus Uk Ltd | Acoustic transducer |
| US8525619B1 (en) * | 2010-05-28 | 2013-09-03 | Sandia Corporation | Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material |
| US9140667B2 (en) * | 2010-08-15 | 2015-09-22 | Vlad Novotny | Chemical and biomedical NanoSensors |
| MY174066A (en) * | 2010-12-15 | 2020-03-06 | Mimos Berhad | Interdigitated capacitor and dielectric membrane sensing device |
| US10234425B2 (en) | 2013-03-15 | 2019-03-19 | Qorvo Us, Inc. | Thin film bulk acoustic resonator with signal enhancement |
| DK2999959T3 (da) | 2013-05-23 | 2021-10-11 | Qorvo Us Inc | Fluidanordning i to dele |
| US9835595B2 (en) | 2013-05-23 | 2017-12-05 | Qorvo Us, Inc. | Sensors, methods of making and devices |
| CN107462192B (zh) * | 2017-09-11 | 2023-06-23 | 重庆大学 | 一种基于soi和压电薄膜的声表面波高温应变传感器芯片及其制备方法 |
| CN107504927B (zh) * | 2017-09-11 | 2024-04-19 | 重庆大学 | 一种基于金属薄板和压电薄膜的声表面波高温应变传感器芯片及其制备方法 |
| FR3083004B1 (fr) * | 2018-06-22 | 2021-01-15 | Commissariat Energie Atomique | Dispositif transducteur piezoelectrique et procede de realisation d'un tel dispositif |
| US11408855B2 (en) | 2018-07-06 | 2022-08-09 | Qorvo Us, Inc. | Bulk acoustic wave resonator with increased dynamic range |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4454440A (en) * | 1978-12-22 | 1984-06-12 | United Technologies Corporation | Surface acoustic wave (SAW) pressure sensor structure |
| JPS6367809A (ja) * | 1986-09-09 | 1988-03-26 | Fujitsu Ltd | 弾性表面波共振子 |
| US4783821A (en) * | 1987-11-25 | 1988-11-08 | The Regents Of The University Of California | IC processed piezoelectric microphone |
| US5216312A (en) * | 1992-02-28 | 1993-06-01 | Hewlett-Packard Company | Fluid sensing device having reduced attenuation of shear transverse waves |
| US5552655A (en) * | 1994-05-04 | 1996-09-03 | Trw Inc. | Low frequency mechanical resonator |
| US5576589A (en) * | 1994-10-13 | 1996-11-19 | Kobe Steel Usa, Inc. | Diamond surface acoustic wave devices |
| US5956292A (en) * | 1995-04-13 | 1999-09-21 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same |
| JP3066393B2 (ja) * | 1996-03-13 | 2000-07-17 | 財団法人神奈川科学技術アカデミー | センサ及びその製造方法 |
| DE69714909T2 (de) * | 1996-05-27 | 2003-04-30 | Ngk Insulators, Ltd. | Piezoelektrisches Element des Dünnschichttyps |
| JPH09325134A (ja) * | 1996-06-05 | 1997-12-16 | Matsushita Electric Ind Co Ltd | 生体成分検査装置 |
| US6091182A (en) * | 1996-11-07 | 2000-07-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
| DE19850803A1 (de) * | 1998-11-04 | 2000-05-11 | Bosch Gmbh Robert | Sensoranordnung und ein Verfahren zur Ermittlung der Dichte und der Viskosität einer Flüssigkeit |
| US6323580B1 (en) * | 1999-04-28 | 2001-11-27 | The Charles Stark Draper Laboratory, Inc. | Ferroic transducer |
| EP1266214B1 (en) * | 2000-03-20 | 2009-09-23 | The Charles Stark Draper Laboratory, INC. | Flexural plate wave sensor |
| US6455980B1 (en) * | 2000-08-28 | 2002-09-24 | The Charles Stark Draper Laboratory, Inc. | Resonator with preferred oscillation mode |
| JP3897229B2 (ja) * | 2001-04-27 | 2007-03-22 | 株式会社村田製作所 | 表面波フィルタ |
-
2003
- 2003-09-30 US US10/675,398 patent/US7109633B2/en not_active Expired - Lifetime
-
2004
- 2004-09-30 KR KR1020067008564A patent/KR20060088558A/ko not_active Application Discontinuation
- 2004-09-30 CA CA2540691A patent/CA2540691C/en not_active Expired - Fee Related
- 2004-09-30 WO PCT/US2004/032061 patent/WO2005033660A2/en active Application Filing
- 2004-09-30 EP EP20040789300 patent/EP1671378B1/en not_active Expired - Lifetime
- 2004-09-30 CN CN2004800337912A patent/CN1883059B/zh not_active Expired - Fee Related
- 2004-09-30 JP JP2006534071A patent/JP4620674B2/ja not_active Expired - Fee Related
- 2004-09-30 AU AU2004278769A patent/AU2004278769B2/en not_active Ceased
- 2004-09-30 KR KR1020087016367A patent/KR100984930B1/ko not_active IP Right Cessation
-
2006
- 2006-07-31 US US11/496,229 patent/US7468138B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1883059A (zh) | 2006-12-20 |
| KR20080075024A (ko) | 2008-08-13 |
| EP1671378A2 (en) | 2006-06-21 |
| US7468138B2 (en) | 2008-12-23 |
| CN1883059B (zh) | 2012-02-01 |
| US7109633B2 (en) | 2006-09-19 |
| WO2005033660A3 (en) | 2006-02-16 |
| EP1671378A4 (en) | 2010-01-06 |
| US20060260108A1 (en) | 2006-11-23 |
| WO2005033660A2 (en) | 2005-04-14 |
| AU2004278769B2 (en) | 2008-07-03 |
| AU2004278769A1 (en) | 2005-04-14 |
| US20050067920A1 (en) | 2005-03-31 |
| JP4620674B2 (ja) | 2011-01-26 |
| CA2540691A1 (en) | 2005-04-14 |
| JP2007510138A (ja) | 2007-04-19 |
| KR20060088558A (ko) | 2006-08-04 |
| KR100984930B1 (ko) | 2010-10-01 |
| EP1671378B1 (en) | 2015-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20181001 |
|
| MKLA | Lapsed |
Effective date: 20181001 |