CA2471864A1 - System and method for using magneto-resistive sensors as dual purpose sensors - Google Patents
System and method for using magneto-resistive sensors as dual purpose sensors Download PDFInfo
- Publication number
- CA2471864A1 CA2471864A1 CA002471864A CA2471864A CA2471864A1 CA 2471864 A1 CA2471864 A1 CA 2471864A1 CA 002471864 A CA002471864 A CA 002471864A CA 2471864 A CA2471864 A CA 2471864A CA 2471864 A1 CA2471864 A1 CA 2471864A1
- Authority
- CA
- Canada
- Prior art keywords
- sensing device
- magnetoresistive element
- sensing
- dual purpose
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000009977 dual effect Effects 0.000 title claims description 36
- 238000000034 method Methods 0.000 title description 8
- 238000005259 measurement Methods 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 238000010586 diagram Methods 0.000 description 18
- 239000010408 film Substances 0.000 description 8
- 230000005415 magnetization Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 229910000889 permalloy Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000005381 magnetic domain Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/36—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
- G01R17/10—AC or DC measuring bridges
- G01R17/105—AC or DC measuring bridges for measuring impedance or resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measuring Magnetic Variables (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/035,957 | 2001-12-26 | ||
| US10/035,957 US6667682B2 (en) | 2001-12-26 | 2001-12-26 | System and method for using magneto-resistive sensors as dual purpose sensors |
| PCT/US2002/038698 WO2003058173A1 (en) | 2001-12-26 | 2002-12-03 | System and method for using magneto-resistive sensors as dual purpose sensors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2471864A1 true CA2471864A1 (en) | 2003-07-17 |
Family
ID=21885767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002471864A Abandoned CA2471864A1 (en) | 2001-12-26 | 2002-12-03 | System and method for using magneto-resistive sensors as dual purpose sensors |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6667682B2 (https=) |
| EP (1) | EP1459038B1 (https=) |
| JP (1) | JP4458849B2 (https=) |
| KR (1) | KR100983128B1 (https=) |
| AU (1) | AU2002359592A1 (https=) |
| CA (1) | CA2471864A1 (https=) |
| WO (1) | WO2003058173A1 (https=) |
Families Citing this family (67)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7259545B2 (en) * | 2003-02-11 | 2007-08-21 | Allegro Microsystems, Inc. | Integrated sensor |
| US6999339B2 (en) * | 2003-04-22 | 2006-02-14 | Micron Technology, Inc. | Integrated circuit including sensor to sense environmental data, method of compensating an MRAM integrated circuit for the effects of an external magnetic field, MRAM integrated circuit, and method of testing |
| US7476816B2 (en) * | 2003-08-26 | 2009-01-13 | Allegro Microsystems, Inc. | Current sensor |
| US20060219436A1 (en) * | 2003-08-26 | 2006-10-05 | Taylor William P | Current sensor |
| US7709754B2 (en) * | 2003-08-26 | 2010-05-04 | Allegro Microsystems, Inc. | Current sensor |
| US7239123B2 (en) * | 2003-10-09 | 2007-07-03 | Hewlett-Packard Development Company, L.P. | Multiplexed dual-purpose magnetoresistive sensor and method of measuring current and temperature |
| DE102004009267B3 (de) * | 2004-02-26 | 2005-09-22 | Siemens Ag | Ausleseeinrichtung wenigstens eines magnetoresistiven Elementes |
| DE102004062474A1 (de) * | 2004-03-23 | 2005-10-13 | Siemens Ag | Vorrichtung zur potenzialfreien Strommessung |
| JP2006047004A (ja) * | 2004-08-02 | 2006-02-16 | Denso Corp | 温度センサおよび磁気抵抗素子を用いたセンサ |
| JP4482667B2 (ja) * | 2004-09-13 | 2010-06-16 | 独立行政法人産業技術総合研究所 | 冷却効果を持つ配線構造 |
| JP4360998B2 (ja) * | 2004-10-01 | 2009-11-11 | Ｔｄｋ株式会社 | 電流センサ |
| US7777607B2 (en) * | 2004-10-12 | 2010-08-17 | Allegro Microsystems, Inc. | Resistor having a predetermined temperature coefficient |
| JP4105142B2 (ja) * | 2004-10-28 | 2008-06-25 | Ｔｄｋ株式会社 | 電流センサ |
| US7409878B2 (en) * | 2005-04-08 | 2008-08-12 | Honeywell International Inc. | Torqueshaft magnetic field measurement systems for gas turbine engines |
| US7511990B2 (en) * | 2005-09-30 | 2009-03-31 | Everspin Technologies, Inc. | Magnetic tunnel junction temperature sensors |
| US7510883B2 (en) * | 2005-09-30 | 2009-03-31 | Everspin Technologies, Inc. | Magnetic tunnel junction temperature sensors and methods |
| US7768083B2 (en) | 2006-01-20 | 2010-08-03 | Allegro Microsystems, Inc. | Arrangements for an integrated sensor |
| CN101416040A (zh) * | 2006-03-30 | 2009-04-22 | 皇家飞利浦电子股份有限公司 | 作为温度传感器的磁阻传感器 |
| US20070279053A1 (en) * | 2006-05-12 | 2007-12-06 | Taylor William P | Integrated current sensor |
| JP2008008883A (ja) * | 2006-06-02 | 2008-01-17 | Denso Corp | 磁気センサ及びセンサ |
| US7795862B2 (en) | 2007-10-22 | 2010-09-14 | Allegro Microsystems, Inc. | Matching of GMR sensors in a bridge |
| US8269491B2 (en) | 2008-02-27 | 2012-09-18 | Allegro Microsystems, Inc. | DC offset removal for a magnetic field sensor |
| DE102008013427A1 (de) * | 2008-03-10 | 2009-11-05 | Siemens Aktiengesellschaft | Anordnung zum Messen einer Stromstärke, Schaltanordnung sowie Verfahren zum Messen einer Stromstärke |
| US7816905B2 (en) | 2008-06-02 | 2010-10-19 | Allegro Microsystems, Inc. | Arrangements for a current sensing circuit and integrated current sensor |
| US8093670B2 (en) | 2008-07-24 | 2012-01-10 | Allegro Microsystems, Inc. | Methods and apparatus for integrated circuit having on chip capacitor with eddy current reductions |
| US7973527B2 (en) | 2008-07-31 | 2011-07-05 | Allegro Microsystems, Inc. | Electronic circuit configured to reset a magnetoresistance element |
| US8063634B2 (en) * | 2008-07-31 | 2011-11-22 | Allegro Microsystems, Inc. | Electronic circuit and method for resetting a magnetoresistance element |
| DE102009028958A1 (de) | 2009-08-28 | 2011-03-03 | Robert Bosch Gmbh | Magnetfeld- und Temperatursensor mit einer Wheatstoneschen Widerstands-Messbrücke und Verfahren zur Messung von Magnetfeld und Temperatur |
| US8952686B2 (en) * | 2011-10-25 | 2015-02-10 | Honeywell International Inc. | High current range magnetoresistive-based current sensor |
| CN102540113B (zh) | 2011-11-11 | 2014-07-02 | 江苏多维科技有限公司 | 磁场传感器 |
| CN102419393B (zh) * | 2011-12-30 | 2013-09-04 | 江苏多维科技有限公司 | 一种电流传感器 |
| US8629539B2 (en) | 2012-01-16 | 2014-01-14 | Allegro Microsystems, Llc | Methods and apparatus for magnetic sensor having non-conductive die paddle |
| US9588194B2 (en) * | 2012-02-01 | 2017-03-07 | MCube Inc. | Method and device for magnetoresistive sensor |
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| US10234513B2 (en) | 2012-03-20 | 2019-03-19 | Allegro Microsystems, Llc | Magnetic field sensor integrated circuit with integral ferromagnetic material |
| US9494660B2 (en) | 2012-03-20 | 2016-11-15 | Allegro Microsystems, Llc | Integrated circuit package having a split lead frame |
| US9666788B2 (en) | 2012-03-20 | 2017-05-30 | Allegro Microsystems, Llc | Integrated circuit package having a split lead frame |
| US9812588B2 (en) | 2012-03-20 | 2017-11-07 | Allegro Microsystems, Llc | Magnetic field sensor integrated circuit with integral ferromagnetic material |
| US9347837B2 (en) | 2012-04-17 | 2016-05-24 | Honeywell International Inc. | Multi-phase brushless DC motor control integrated circuit having magnetic sensor and band-gap temperature sensor formed thereon |
| US9190606B2 (en) | 2013-03-15 | 2015-11-17 | Allegro Micosystems, LLC | Packaging for an electronic device |
| US10345343B2 (en) | 2013-03-15 | 2019-07-09 | Allegro Microsystems, Llc | Current sensor isolation |
| US9411025B2 (en) | 2013-04-26 | 2016-08-09 | Allegro Microsystems, Llc | Integrated circuit package having a split lead frame and a magnet |
| US8885302B1 (en) * | 2013-10-01 | 2014-11-11 | Allegro Microsystems, Llc | Anisotropic magnetoresistive (AMR) sensors and techniques for fabricating same |
| US9013838B1 (en) | 2013-10-01 | 2015-04-21 | Allegro Microsystems, Llc | Anisotropic magnetoresistive (AMR) sensors and techniques for fabricating same |
| JP6115501B2 (ja) * | 2014-03-19 | 2017-04-19 | 株式会社デンソー | 電流センサ |
| US9354284B2 (en) | 2014-05-07 | 2016-05-31 | Allegro Microsystems, Llc | Magnetic field sensor configured to measure a magnetic field in a closed loop manner |
| US9322887B1 (en) | 2014-12-01 | 2016-04-26 | Allegro Microsystems, Llc | Magnetic field sensor with magnetoresistance elements and conductive-trace magnetic source |
| US11448659B2 (en) * | 2015-09-29 | 2022-09-20 | Honeywell International Inc. | AMR speed and direction sensor for use with magnetic targets |
| CN106872914B (zh) * | 2015-11-27 | 2019-09-10 | 爱盛科技股份有限公司 | 磁场感测装置及感测方法 |
| RU2617454C1 (ru) * | 2016-02-17 | 2017-04-25 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Способ изготовления магниторезистивного датчика |
| CN106225959A (zh) * | 2016-07-04 | 2016-12-14 | 电子科技大学 | 一种柔性薄膜热流传感器及其制备方法 |
| JP6309067B2 (ja) * | 2016-10-31 | 2018-04-11 | 三菱電機株式会社 | 磁気検出装置 |
| RU2666582C2 (ru) * | 2016-11-29 | 2018-09-11 | Акционерное общество "Зеленоградский нанотехнологический центр" | Цифровой измеритель тока |
| DE102017127578B4 (de) | 2017-11-22 | 2020-11-05 | Helmholtz-Zentrum Berlin für Materialien und Energie Gesellschaft mit beschränkter Haftung | Vorrichtung und Verfahren zur Nutzung eines anisotrop magnetoresistiven Sensors zur Bestimmung von Magnetfeldern und Temperaturen |
| US10935612B2 (en) | 2018-08-20 | 2021-03-02 | Allegro Microsystems, Llc | Current sensor having multiple sensitivity ranges |
| DE102018216131B4 (de) * | 2018-09-21 | 2020-06-04 | Hochschule Karlsruhe-Technik Und Wirtschaft | Verfahren und Vorrichtung zur gleichzeitigen Bestimmung der Temperatur- und Widerstandsänderung von Sensorwiderständen einer als Viertel- oder Halbbrücke ausgebildeten Brückenschaltung |
| DE102018216136B4 (de) * | 2018-09-21 | 2021-04-01 | Hochschule Karlsruhe-Technik Und Wirtschaft | Zwei Verfahren und eine Vorrichtung zur gleichzeitigen Bestimmung der Temperatur- und Widerstandsänderung von Sensorwiderständen einer Brückenschaltung |
| US10991644B2 (en) | 2019-08-22 | 2021-04-27 | Allegro Microsystems, Llc | Integrated circuit package having a low profile |
| CN110631611B (zh) * | 2019-09-20 | 2022-05-13 | 贵州雅光电子科技股份有限公司 | 一种amr传感器芯片敏感单元结构 |
| US11366182B2 (en) * | 2020-01-24 | 2022-06-21 | Vanguard International Semiconductor Corporation | Magnetoresistive devices and methods for forming the same |
| US11187764B2 (en) | 2020-03-20 | 2021-11-30 | Allegro Microsystems, Llc | Layout of magnetoresistance element |
| US11800813B2 (en) | 2020-05-29 | 2023-10-24 | Allegro Microsystems, Llc | High isolation current sensor |
| US11567108B2 (en) | 2021-03-31 | 2023-01-31 | Allegro Microsystems, Llc | Multi-gain channels for multi-range sensor |
| KR102914138B1 (ko) * | 2021-11-29 | 2026-01-19 | 한국전자기술연구원 | 박막 자기저항 센서의 구동 방법 |
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| US12248039B2 (en) | 2023-08-08 | 2025-03-11 | Allegro Microsystems, Llc | Interleaving sub-arrays of magnetoresistance elements based on reference directions to compensate for bridge offset |
| US12510611B2 (en) | 2023-11-07 | 2025-12-30 | Allegro Microsystems, Llc | TMR sensor having magnetic field generation for pillar stimulation |
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| JPH08242027A (ja) * | 1995-03-03 | 1996-09-17 | Mitsubishi Electric Corp | 磁気抵抗素子回路 |
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| US5820924A (en) | 1996-05-16 | 1998-10-13 | Honeywell Inc. | Method of fabricating a magnetoresistive sensor |
| US5742162A (en) | 1996-07-17 | 1998-04-21 | Read-Rite Corporation | Magnetoresistive spin valve sensor with multilayered keeper |
| US5869963A (en) | 1996-09-12 | 1999-02-09 | Alps Electric Co., Ltd. | Magnetoresistive sensor and head |
| JP3827789B2 (ja) | 1996-12-27 | 2006-09-27 | 株式会社東芝 | 磁気抵抗効果ヘッド |
| US5952825A (en) * | 1997-08-14 | 1999-09-14 | Honeywell Inc. | Magnetic field sensing device having integral coils for producing magnetic fields |
| DE19810369C1 (de) * | 1998-03-10 | 1999-08-12 | Siemens Ag | Vorrichtung zur Messung des Ventilhubes |
| US6313973B1 (en) | 1998-06-30 | 2001-11-06 | Kabushiki Kaisha Toshiba | Laminated magnetorestrictive element of an exchange coupling film, an antiferromagnetic film and a ferromagnetic film and a magnetic disk drive using same |
| JP3623367B2 (ja) * | 1998-07-17 | 2005-02-23 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えたポテンショメータ |
| US6262574B1 (en) | 1999-03-12 | 2001-07-17 | The United States Of America As Represented By The Secretary Of The Navy | Sensor for measuring magnetic field strength and temperature for an electric motor |
| US6282068B1 (en) | 1999-03-30 | 2001-08-28 | International Business Machines Corporation | Antiparallel (AP) pinned read head with improved GMR |
| JP3793669B2 (ja) | 1999-08-26 | 2006-07-05 | 株式会社日立グローバルストレージテクノロジーズ | 巨大磁気抵抗効果ヘッド、薄膜磁気ヘッドならびに磁気記録再生装置 |
-
2001
- 2001-12-26 US US10/035,957 patent/US6667682B2/en not_active Expired - Lifetime
-
2002
- 2002-12-03 CA CA002471864A patent/CA2471864A1/en not_active Abandoned
- 2002-12-03 JP JP2003558436A patent/JP4458849B2/ja not_active Expired - Fee Related
- 2002-12-03 KR KR1020047010217A patent/KR100983128B1/ko not_active Expired - Fee Related
- 2002-12-03 EP EP02794140.0A patent/EP1459038B1/en not_active Expired - Lifetime
- 2002-12-03 WO PCT/US2002/038698 patent/WO2003058173A1/en not_active Ceased
- 2002-12-03 AU AU2002359592A patent/AU2002359592A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003058173A1 (en) | 2003-07-17 |
| KR100983128B1 (ko) | 2010-09-17 |
| KR20040078654A (ko) | 2004-09-10 |
| JP2005514611A (ja) | 2005-05-19 |
| EP1459038B1 (en) | 2017-06-21 |
| US6667682B2 (en) | 2003-12-23 |
| AU2002359592A1 (en) | 2003-07-24 |
| JP4458849B2 (ja) | 2010-04-28 |
| EP1459038A1 (en) | 2004-09-22 |
| US20030117254A1 (en) | 2003-06-26 |
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Legal Events
| Date | Code | Title | Description |
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| FZDE | Discontinued |