CA2421520A1 - Combinatorial coating systems and methods - Google Patents
Combinatorial coating systems and methods Download PDFInfo
- Publication number
- CA2421520A1 CA2421520A1 CA002421520A CA2421520A CA2421520A1 CA 2421520 A1 CA2421520 A1 CA 2421520A1 CA 002421520 A CA002421520 A CA 002421520A CA 2421520 A CA2421520 A CA 2421520A CA 2421520 A1 CA2421520 A1 CA 2421520A1
- Authority
- CA
- Canada
- Prior art keywords
- materials
- substrate
- delivery
- coating
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 158
- 239000011248 coating agent Substances 0.000 title claims abstract description 122
- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 221
- 239000000758 substrate Substances 0.000 claims abstract description 126
- 230000007246 mechanism Effects 0.000 claims abstract description 61
- 238000004891 communication Methods 0.000 claims description 12
- 238000007740 vapor deposition Methods 0.000 claims description 10
- 230000000873 masking effect Effects 0.000 claims description 8
- 150000003384 small molecules Chemical class 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 6
- -1 oxides Chemical class 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 229920001169 thermoplastic Polymers 0.000 claims description 5
- 229920001187 thermosetting polymer Polymers 0.000 claims description 5
- 239000004634 thermosetting polymer Substances 0.000 claims description 5
- 150000003568 thioethers Chemical class 0.000 claims description 5
- 238000009501 film coating Methods 0.000 claims 6
- 230000008016 vaporization Effects 0.000 claims 2
- 238000004458 analytical method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000000203 mixture Substances 0.000 description 18
- 238000001723 curing Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- 239000010410 layer Substances 0.000 description 10
- 239000007921 spray Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 239000011247 coating layer Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000008199 coating composition Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000012705 liquid precursor Substances 0.000 description 3
- 239000011343 solid material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000006115 industrial coating Substances 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229960004592 isopropanol Drugs 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000012860 organic pigment Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
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- 239000002243 precursor Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 239000012720 thermal barrier coating Substances 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- Chemical & Material Sciences (AREA)
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Nanotechnology (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Spray Control Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66832300A | 2000-09-22 | 2000-09-22 | |
| US09/668,323 | 2000-09-22 | ||
| PCT/US2001/019159 WO2002024321A1 (en) | 2000-09-22 | 2001-06-14 | Combinatorial coating systems and methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2421520A1 true CA2421520A1 (en) | 2002-03-28 |
Family
ID=24681881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002421520A Abandoned CA2421520A1 (en) | 2000-09-22 | 2001-06-14 | Combinatorial coating systems and methods |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP1328341A1 (ru) |
| JP (1) | JP2004508927A (ru) |
| KR (1) | KR20030038760A (ru) |
| CN (1) | CN1461234A (ru) |
| AU (1) | AU2001266929A1 (ru) |
| BR (1) | BR0114076A (ru) |
| CA (1) | CA2421520A1 (ru) |
| MX (1) | MXPA03002455A (ru) |
| RU (1) | RU2270881C2 (ru) |
| WO (1) | WO2002024321A1 (ru) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7491677B2 (en) | 1999-01-15 | 2009-02-17 | Basf Catalysts Llc | Combinatorial synthesis |
| US8944002B2 (en) | 2004-01-14 | 2015-02-03 | Honda Motor Co., Ltd. | High throughput physical vapor deposition system for material combinatorial studies |
| US7857946B2 (en) | 2007-04-26 | 2010-12-28 | Canon Anelva Corporation | Sputtering film forming method, electronic device manufacturing method, and sputtering system |
| EP2002886A1 (en) * | 2007-05-08 | 2008-12-17 | HTE Aktiengesellschaft The High Throughput Experimentation Company | Coating platform and process for the preparation of thin coatings |
| JPWO2012099019A1 (ja) * | 2011-01-19 | 2014-06-09 | シャープ株式会社 | 有機ｅｌ表示装置および蒸着方法 |
| JP6077906B2 (ja) * | 2013-03-28 | 2017-02-08 | 株式会社アツミテック | スパッタリング装置 |
| GB2529608B (en) * | 2014-06-10 | 2018-07-18 | Monitor Coatings Ltd | A method of coating a sheet of steel |
| CN105618020A (zh) * | 2014-10-28 | 2016-06-01 | 睿泽企业股份有限公司 | 光催化剂基材的制作方法及制作设备 |
| US10644239B2 (en) | 2014-11-17 | 2020-05-05 | Emagin Corporation | High precision, high resolution collimating shadow mask and method for fabricating a micro-display |
| CN104762590B (zh) * | 2015-03-20 | 2017-05-10 | 京东方科技集团股份有限公司 | 蒸镀掩膜板 |
| TWI633197B (zh) * | 2016-05-24 | 2018-08-21 | 美商伊麥傑公司 | 高精準度蔽蔭遮罩沉積系統及其方法 |
| KR102377183B1 (ko) | 2016-05-24 | 2022-03-21 | 이매진 코퍼레이션 | 고정밀 섀도 마스크 증착 시스템 및 그 방법 |
| US10386731B2 (en) | 2016-05-24 | 2019-08-20 | Emagin Corporation | Shadow-mask-deposition system and method therefor |
| RU2669259C2 (ru) * | 2016-12-09 | 2018-10-09 | Федеральное государственное автономное образовательное учреждение высшего образования "Уральский федеральный университет имени первого Президента России Б.Н. Ельцина" | Устройство для получения пленок |
| KR102378672B1 (ko) * | 2017-05-17 | 2022-03-24 | 이매진 코퍼레이션 | 고정밀 섀도 마스크 증착 시스템 및 그 방법 |
| WO2019070665A1 (en) * | 2017-10-04 | 2019-04-11 | Ih Ip Holdings Limited | REASONS FOR DEPOSIT IN THE MANUFACTURE OF REAGENTS |
| CN113275149B (zh) * | 2021-06-01 | 2022-01-18 | 丰县通亚电子科技有限公司 | 环保型电动车喷漆装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6045671A (en) * | 1994-10-18 | 2000-04-04 | Symyx Technologies, Inc. | Systems and methods for the combinatorial synthesis of novel materials |
| US6364956B1 (en) * | 1999-01-26 | 2002-04-02 | Symyx Technologies, Inc. | Programmable flux gradient apparatus for co-deposition of materials onto a substrate |
| US6911129B1 (en) * | 2000-05-08 | 2005-06-28 | Intematix Corporation | Combinatorial synthesis of material chips |
-
2001
- 2001-06-14 JP JP2002528383A patent/JP2004508927A/ja not_active Withdrawn
- 2001-06-14 WO PCT/US2001/019159 patent/WO2002024321A1/en active Application Filing
- 2001-06-14 CN CN01815959A patent/CN1461234A/zh active Pending
- 2001-06-14 KR KR10-2003-7004133A patent/KR20030038760A/ko not_active Application Discontinuation
- 2001-06-14 BR BR0114076-0A patent/BR0114076A/pt not_active IP Right Cessation
- 2001-06-14 AU AU2001266929A patent/AU2001266929A1/en not_active Abandoned
- 2001-06-14 MX MXPA03002455A patent/MXPA03002455A/es unknown
- 2001-06-14 RU RU2003111467/02A patent/RU2270881C2/ru not_active IP Right Cessation
- 2001-06-14 EP EP01944524A patent/EP1328341A1/en not_active Withdrawn
- 2001-06-14 CA CA002421520A patent/CA2421520A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002024321A1 (en) | 2002-03-28 |
| CN1461234A (zh) | 2003-12-10 |
| BR0114076A (pt) | 2003-07-29 |
| KR20030038760A (ko) | 2003-05-16 |
| AU2001266929A1 (en) | 2002-04-02 |
| RU2270881C2 (ru) | 2006-02-27 |
| EP1328341A1 (en) | 2003-07-23 |
| JP2004508927A (ja) | 2004-03-25 |
| MXPA03002455A (es) | 2003-06-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |