CA2410909A1 - Accelerometre pourvu de sillons rentrants - Google Patents

Accelerometre pourvu de sillons rentrants Download PDF

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Publication number
CA2410909A1
CA2410909A1 CA002410909A CA2410909A CA2410909A1 CA 2410909 A1 CA2410909 A1 CA 2410909A1 CA 002410909 A CA002410909 A CA 002410909A CA 2410909 A CA2410909 A CA 2410909A CA 2410909 A1 CA2410909 A1 CA 2410909A1
Authority
CA
Canada
Prior art keywords
mass
entrant
accelerometer
layer
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002410909A
Other languages
English (en)
Inventor
Robert P. Ried
Arjun Selvakumar
Howard D. Goldberg
Martin A. Schmidt
Lianzhong Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Geophysical Corp
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2410909A1 publication Critical patent/CA2410909A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Abstract

L'invention concerne un accéléromètre (305) qui comprend un ensemble masse de mesure comprenant une électrode de condensateur supérieure (705), pourvue d'un ou de plusieurs sillons rentrants (1405), une électrode de condensateur inférieure (805), pourvue d'un ou de plusieurs sillons rentrants (1410) et/ou un motif d'électrodes de masse (910, 915) également pourvu d'un ou de plusieurs sillons rentrants (1415, 1420). Un sillon rentrant est un sillon qui est formé dans un élément et qui est plus grand vers le centre de l'élément qu'à la surface de l'élément. Lesdits sillons rentrants (1405, 1410, 1415, 1420) réduisent l'amortissement par fluide, ce qui permet de réduire le taux de bruit thermo-mécanique, et augmentent la pression de fermeture de l'accéléromètre (305), ce qui permet de faire baisser les coûts de fabrication et d'augmenter les rendements de production.
CA002410909A 2000-05-30 2001-05-29 Accelerometre pourvu de sillons rentrants Abandoned CA2410909A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20793400P 2000-05-30 2000-05-30
US60/207,934 2000-05-30
PCT/US2001/017254 WO2001092895A1 (fr) 2000-05-30 2001-05-29 Accelerometre pourvu de sillons rentrants

Publications (1)

Publication Number Publication Date
CA2410909A1 true CA2410909A1 (fr) 2001-12-06

Family

ID=22772562

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002410909A Abandoned CA2410909A1 (fr) 2000-05-30 2001-05-29 Accelerometre pourvu de sillons rentrants

Country Status (5)

Country Link
EP (1) EP1305639A4 (fr)
AU (1) AU2001265084A1 (fr)
CA (1) CA2410909A1 (fr)
NO (1) NO20025744L (fr)
WO (1) WO2001092895A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
CN101049045B (zh) * 2004-10-27 2011-09-21 爱普科斯公司 减少mems器件中的空气阻尼

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0456285A3 (en) * 1986-09-22 1992-01-02 Nippondenso Co., Ltd. Semiconductor accelerometer
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
JP2728807B2 (ja) * 1991-07-24 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
US5616514A (en) * 1993-06-03 1997-04-01 Robert Bosch Gmbh Method of fabricating a micromechanical sensor
DE69702745T2 (de) * 1997-03-04 2000-12-07 St Microelectronics Srl Methode zur Herstellung von mikromechanischen Drucksensoren
JPH1194873A (ja) * 1997-09-18 1999-04-09 Mitsubishi Electric Corp 加速度センサ及びその製造方法
DE69930099T2 (de) * 1999-04-09 2006-08-31 Stmicroelectronics S.R.L., Agrate Brianza Herstellung von vergrabenen Hohlräumen in einer einkristallinen Halbleiterscheibe und Halbleiterscheibe

Also Published As

Publication number Publication date
EP1305639A4 (fr) 2004-03-24
NO20025744L (no) 2003-01-28
EP1305639A1 (fr) 2003-05-02
NO20025744D0 (no) 2002-11-29
AU2001265084A1 (en) 2001-12-11
WO2001092895A1 (fr) 2001-12-06

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Legal Events

Date Code Title Description
FZDE Discontinued