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Omron Corp
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NHK Spring Co Ltd
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Priority claimed from JP2002007698Aexternal-prioritypatent/JP3726062B2/ja
Application filed by NHK Spring Co LtdfiledCriticalNHK Spring Co Ltd
Publication of CA2409118A1publicationCriticalpatent/CA2409118A1/fr
Application grantedgrantedCritical
Publication of CA2409118CpublicationCriticalpatent/CA2409118C/fr
Optical chip for arrayed waveguide grating type optical multiplexer/demultiplexer circuit, waveguide substrate, and method for fabricating optical chip for arrayed waveguide grating type optical multiplexer/demultiplexer circuit