CA2400294A1 - Two-dimensional micro-mirror array enhancements - Google Patents

Two-dimensional micro-mirror array enhancements Download PDF

Info

Publication number
CA2400294A1
CA2400294A1 CA002400294A CA2400294A CA2400294A1 CA 2400294 A1 CA2400294 A1 CA 2400294A1 CA 002400294 A CA002400294 A CA 002400294A CA 2400294 A CA2400294 A CA 2400294A CA 2400294 A1 CA2400294 A1 CA 2400294A1
Authority
CA
Canada
Prior art keywords
mirror
sensor
electrodes
micro
hinge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002400294A
Other languages
English (en)
French (fr)
Inventor
John Green
Sam Calmes
Alexander B. Romansovsky
Marc R. Schuman
James P. Downing
Sateesh S. Bajikar
Armand P. Neukermans
Timothy G. Slater
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Xros Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xros Inc filed Critical Xros Inc
Publication of CA2400294A1 publication Critical patent/CA2400294A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA002400294A 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements Abandoned CA2400294A1 (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US18311700P 2000-02-17 2000-02-17
US18324600P 2000-02-17 2000-02-17
US60/183,117 2000-02-17
US60/183,246 2000-02-17
US20361700P 2000-05-11 2000-05-11
US60/203,617 2000-05-11
US20775200P 2000-05-30 2000-05-30
US60/207,752 2000-05-30
US71594500A 2000-11-16 2000-11-16
US09/715,945 2000-11-16
PCT/US2001/005309 WO2001061400A2 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Publications (1)

Publication Number Publication Date
CA2400294A1 true CA2400294A1 (en) 2001-08-23

Family

ID=27539092

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002400294A Abandoned CA2400294A1 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Country Status (4)

Country Link
EP (1) EP1342121A2 (de)
AU (1) AU2001260986A1 (de)
CA (1) CA2400294A1 (de)
WO (1) WO2001061400A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788981B2 (en) 2001-02-07 2004-09-07 Movaz Networks, Inc. Multiplexed analog control system for electrostatic actuator array
WO2003040801A1 (en) 2001-10-19 2003-05-15 Input/Output, Inc. Digital optical switch apparatus and process for manufacturing same
EP1518822A3 (de) * 2001-12-06 2007-02-28 Microfabrica Inc. Komplexe Mikrobauelemente und Vorrichtungen und deren Herstellungsverfahren.
US6968101B2 (en) 2002-05-28 2005-11-22 Jds Uniphase Inc. Electrode configuration for piano MEMs micromirror
US7110635B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Electrical x-talk shield for MEMS micromirrors
CA2429508C (en) 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US7110637B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7302131B2 (en) 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
EP1479647B1 (de) * 2003-05-23 2009-02-25 JDS Uniphase Inc. Elektrische Übersprechungsabschirmung für MEMS Mikrospiegel
WO2005011322A2 (en) 2003-07-28 2005-02-03 Olympus Corporation Optical switch and method of controlling optical switch

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors

Also Published As

Publication number Publication date
WO2001061400A3 (en) 2003-07-10
WO2001061400A9 (en) 2002-10-10
EP1342121A2 (de) 2003-09-10
AU2001260986A1 (en) 2001-08-27
WO2001061400A2 (en) 2001-08-23

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Legal Events

Date Code Title Description
FZDE Discontinued