CA2400294A1 - Ameliorations se rapportant a une mosaique de micromiroirs bidimensionnels - Google Patents
Ameliorations se rapportant a une mosaique de micromiroirs bidimensionnels Download PDFInfo
- Publication number
- CA2400294A1 CA2400294A1 CA002400294A CA2400294A CA2400294A1 CA 2400294 A1 CA2400294 A1 CA 2400294A1 CA 002400294 A CA002400294 A CA 002400294A CA 2400294 A CA2400294 A CA 2400294A CA 2400294 A1 CA2400294 A1 CA 2400294A1
- Authority
- CA
- Canada
- Prior art keywords
- mirror
- sensor
- electrodes
- micro
- hinge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
L'invention concerne un ensemble ruban de micromiroirs qui comprend plusieurs structures de micromiroirs bidimensionnelles présentant des caractéristiques de déviation et autres améliorées. Dans les structures de micromiroirs, des électrodes de déviation électrostatique sont disposées en entités coniques ou quasi coniques usinées, fixées ou moulées dans un substrat. Les électrodes sont disposées en quartiers approximativement parallèles ou décalés de 45 degrés relativement à des axes de rotation afin de former des quadrants. Des détecteurs à torsion sont disposés les long des axes de rotation pour contrôler la déviation des électrodes de déviation à quadrants.
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18311700P | 2000-02-17 | 2000-02-17 | |
US18324600P | 2000-02-17 | 2000-02-17 | |
US60/183,117 | 2000-02-17 | ||
US60/183,246 | 2000-02-17 | ||
US20361700P | 2000-05-11 | 2000-05-11 | |
US60/203,617 | 2000-05-11 | ||
US20775200P | 2000-05-30 | 2000-05-30 | |
US60/207,752 | 2000-05-30 | ||
US71594500A | 2000-11-16 | 2000-11-16 | |
US09/715,945 | 2000-11-16 | ||
PCT/US2001/005309 WO2001061400A2 (fr) | 2000-02-17 | 2001-02-16 | Ameliorations se rapportant a une mosaique de micromiroirs bidimensionnels |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2400294A1 true CA2400294A1 (fr) | 2001-08-23 |
Family
ID=27539092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002400294A Abandoned CA2400294A1 (fr) | 2000-02-17 | 2001-02-16 | Ameliorations se rapportant a une mosaique de micromiroirs bidimensionnels |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1342121A2 (fr) |
AU (1) | AU2001260986A1 (fr) |
CA (1) | CA2400294A1 (fr) |
WO (1) | WO2001061400A2 (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6788981B2 (en) * | 2001-02-07 | 2004-09-07 | Movaz Networks, Inc. | Multiplexed analog control system for electrostatic actuator array |
WO2003040801A1 (fr) * | 2001-10-19 | 2003-05-15 | Input/Output, Inc. | Commutateur optique numerique et son procede de fabrication |
EP1518822A3 (fr) * | 2001-12-06 | 2007-02-28 | Microfabrica Inc. | Microdispositifs et appareils complexes et leur procédé de fabrication. |
US6968101B2 (en) | 2002-05-28 | 2005-11-22 | Jds Uniphase Inc. | Electrode configuration for piano MEMs micromirror |
US7110635B2 (en) | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Electrical x-talk shield for MEMS micromirrors |
US7110637B2 (en) | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Two-step electrode for MEMs micromirrors |
CA2429508C (fr) | 2002-05-28 | 2013-01-08 | Jds Uniphase Inc. | Miroir microelectromecanique a clavier |
US7302131B2 (en) | 2002-05-28 | 2007-11-27 | Jds Uniphase Inc. | Sunken electrode configuration for MEMs Micromirror |
EP1479647B1 (fr) * | 2003-05-23 | 2009-02-25 | JDS Uniphase Inc. | Blindage électrique à faible diaphonie pour MEMS micro-miroirs |
CA2514924A1 (fr) | 2003-07-28 | 2005-02-03 | Olympus Corporation | Commutateur optique et procede de commande de commutateur optique |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5488862A (en) * | 1993-10-18 | 1996-02-06 | Armand P. Neukermans | Monolithic silicon rate-gyro with integrated sensors |
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
-
2001
- 2001-02-16 CA CA002400294A patent/CA2400294A1/fr not_active Abandoned
- 2001-02-16 WO PCT/US2001/005309 patent/WO2001061400A2/fr not_active Application Discontinuation
- 2001-02-16 AU AU2001260986A patent/AU2001260986A1/en not_active Abandoned
- 2001-02-16 EP EP01934837A patent/EP1342121A2/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2001061400A9 (fr) | 2002-10-10 |
EP1342121A2 (fr) | 2003-09-10 |
AU2001260986A1 (en) | 2001-08-27 |
WO2001061400A2 (fr) | 2001-08-23 |
WO2001061400A3 (fr) | 2003-07-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |