AU2001260986A1 - Two-dimensional micro-mirror array enhancements - Google Patents

Two-dimensional micro-mirror array enhancements

Info

Publication number
AU2001260986A1
AU2001260986A1 AU2001260986A AU6098601A AU2001260986A1 AU 2001260986 A1 AU2001260986 A1 AU 2001260986A1 AU 2001260986 A AU2001260986 A AU 2001260986A AU 6098601 A AU6098601 A AU 6098601A AU 2001260986 A1 AU2001260986 A1 AU 2001260986A1
Authority
AU
Australia
Prior art keywords
mirror array
dimensional micro
enhancements
array enhancements
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001260986A
Other languages
English (en)
Inventor
Sateesh S. Bajikar
Sam Calmes
James P. Downing
John Green
Armand P. Neukermans
Alexander B. Romansovsky
Marc R. Schuman
Timothy G Slater
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xros Inc
Original Assignee
Xros Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xros Inc filed Critical Xros Inc
Publication of AU2001260986A1 publication Critical patent/AU2001260986A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001260986A 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements Abandoned AU2001260986A1 (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US18324600P 2000-02-17 2000-02-17
US18311700P 2000-02-17 2000-02-17
US60/183,117 2000-02-17
US60/183,246 2000-02-17
US20361700P 2000-05-11 2000-05-11
US60/203,617 2000-05-11
US20775200P 2000-05-30 2000-05-30
US60/207,752 2000-05-30
US71594500A 2000-11-16 2000-11-16
US09/715,945 2000-11-16
PCT/US2001/005309 WO2001061400A2 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Publications (1)

Publication Number Publication Date
AU2001260986A1 true AU2001260986A1 (en) 2001-08-27

Family

ID=27539092

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001260986A Abandoned AU2001260986A1 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Country Status (4)

Country Link
EP (1) EP1342121A2 (de)
AU (1) AU2001260986A1 (de)
CA (1) CA2400294A1 (de)
WO (1) WO2001061400A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788981B2 (en) * 2001-02-07 2004-09-07 Movaz Networks, Inc. Multiplexed analog control system for electrostatic actuator array
DE60226262T2 (de) * 2001-10-19 2009-05-20 ION Geophysical Corp., Houston Digitale optische schaltvorrichtung und verfahren zu ihrer herstellung
EP1518822A3 (de) * 2001-12-06 2007-02-28 Microfabrica Inc. Komplexe Mikrobauelemente und Vorrichtungen und deren Herstellungsverfahren.
CA2429508C (en) 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US6968101B2 (en) 2002-05-28 2005-11-22 Jds Uniphase Inc. Electrode configuration for piano MEMs micromirror
US7110637B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7302131B2 (en) 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
US7110635B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Electrical x-talk shield for MEMS micromirrors
EP1479647B1 (de) * 2003-05-23 2009-02-25 JDS Uniphase Inc. Elektrische Übersprechungsabschirmung für MEMS Mikrospiegel
US7263252B2 (en) 2003-07-28 2007-08-28 Olympus Corporation Optical switch and method of controlling optical switch

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors

Also Published As

Publication number Publication date
WO2001061400A3 (en) 2003-07-10
CA2400294A1 (en) 2001-08-23
EP1342121A2 (de) 2003-09-10
WO2001061400A2 (en) 2001-08-23
WO2001061400A9 (en) 2002-10-10

Similar Documents

Publication Publication Date Title
AU2001249323A1 (en) Nanocylinder arrays
AU2001227849A1 (en) Ultrasonic imager
AU2002231207A1 (en) Microneedle array systems
AU2002232910A1 (en) Combinatorial optical processor
AU2001294960A1 (en) Second order microphone array
AU2001294192A1 (en) Solid preparations
AU2001279972A1 (en) Pesticidal formulations
AU2001296189A1 (en) Position transducer
AU2001280410A1 (en) Angle transducer
AU2001266490A1 (en) One aperture simultaneous rx-tx-antenna
AU2001250833A1 (en) Film scanner
AU2001218821A1 (en) 3d camera
AU6732201A (en) Tracking device
AU2002225025A1 (en) Agrochemical formulations
AU2001260986A1 (en) Two-dimensional micro-mirror array enhancements
AU2001288156A1 (en) Beam adjusting device
AU2001217313A1 (en) Aerial ultrasonic sensor
AU2001240791A1 (en) Sequence
AU2001295777A1 (en) Target
AU2001262689A1 (en) Oligopeptides
AU2000267447A1 (en) Microphone array system
AU2001263024A1 (en) Multiple planar complex optical devices
AU2002249823A1 (en) Acne vaccine
AU2001279748A1 (en) Herbicides
AU2001288102A1 (en) Solid preparations