CA2370044A1 - Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines - Google Patents
Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines Download PDFInfo
- Publication number
- CA2370044A1 CA2370044A1 CA002370044A CA2370044A CA2370044A1 CA 2370044 A1 CA2370044 A1 CA 2370044A1 CA 002370044 A CA002370044 A CA 002370044A CA 2370044 A CA2370044 A CA 2370044A CA 2370044 A1 CA2370044 A1 CA 2370044A1
- Authority
- CA
- Canada
- Prior art keywords
- comb drive
- fingers
- comb
- microactuator
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Cette invention concerne un micro-actionneur électrostatique (23) composé d'un substrat (27) sur lequel est monté un premier ensemble peigne de commande (61), lequel substrat est surmonté par un second peigne de commande (62). On trouve au moins un élément à ressort (83) avec une première partie d'extrémité (83a) fixée au substrat et une seconde partie d'extrémité (83b) fixée au second peigne de commande. Le second peigne de commande une pluralité de secondes dents espacées (72) partant de l'un des côtés d'un second élément allongé (71). Ce second élément allongé peut se déplacer entre une première position, dans laquelle ses diverses dents ne s'encastrent pas complètement dans des paires adjacentes de dents du premier élément allongé, et une seconde position dans laquelle chacune de ses dents vient s'encastrer pratiquement complètement dans une paire de dents du premier élément allongé.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12876499P | 1999-04-12 | 1999-04-12 | |
US60/128,764 | 1999-04-12 | ||
US09/464,361 | 1999-12-15 | ||
US09/464,361 US6329737B1 (en) | 1998-12-15 | 1999-12-15 | Rotary electrostatic microactuator |
PCT/US2000/009919 WO2000062410A1 (fr) | 1999-04-12 | 2000-04-12 | Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2370044A1 true CA2370044A1 (fr) | 2000-10-19 |
Family
ID=26826924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002370044A Abandoned CA2370044A1 (fr) | 1999-04-12 | 2000-04-12 | Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1188225A4 (fr) |
AU (1) | AU4346000A (fr) |
CA (1) | CA2370044A1 (fr) |
WO (1) | WO2000062410A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001043268A2 (fr) * | 1999-11-29 | 2001-06-14 | Iolon, Inc. | Micro-dispositif equilibre et microactionneur electrostatique rotatif s'utilisant avec ce micro-dispositif |
US6903486B2 (en) | 1999-11-29 | 2005-06-07 | Iolon, Inc. | Balanced microdevice |
US6333584B1 (en) | 2000-01-05 | 2001-12-25 | Iolon, Inc. | Tiltable electrostatic microactuator and method for using same |
US6671078B2 (en) | 2001-05-23 | 2003-12-30 | Axsun Technologies, Inc. | Electrostatic zipper actuator optical beam switching system and method of operation |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5998906A (en) * | 1998-01-13 | 1999-12-07 | Seagate Technology, Inc. | Electrostatic microactuator and method for use thereof |
-
2000
- 2000-04-12 CA CA002370044A patent/CA2370044A1/fr not_active Abandoned
- 2000-04-12 EP EP00923312A patent/EP1188225A4/fr not_active Withdrawn
- 2000-04-12 WO PCT/US2000/009919 patent/WO2000062410A1/fr not_active Application Discontinuation
- 2000-04-12 AU AU43460/00A patent/AU4346000A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1188225A4 (fr) | 2005-11-02 |
AU4346000A (en) | 2000-11-14 |
EP1188225A1 (fr) | 2002-03-20 |
WO2000062410A1 (fr) | 2000-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |