CA2370044A1 - Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines - Google Patents

Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines Download PDF

Info

Publication number
CA2370044A1
CA2370044A1 CA002370044A CA2370044A CA2370044A1 CA 2370044 A1 CA2370044 A1 CA 2370044A1 CA 002370044 A CA002370044 A CA 002370044A CA 2370044 A CA2370044 A CA 2370044A CA 2370044 A1 CA2370044 A1 CA 2370044A1
Authority
CA
Canada
Prior art keywords
comb drive
fingers
comb
microactuator
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002370044A
Other languages
English (en)
Inventor
John H. Jerman
John D. Grade
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iolon Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/464,361 external-priority patent/US6329737B1/en
Application filed by Individual filed Critical Individual
Publication of CA2370044A1 publication Critical patent/CA2370044A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Cette invention concerne un micro-actionneur électrostatique (23) composé d'un substrat (27) sur lequel est monté un premier ensemble peigne de commande (61), lequel substrat est surmonté par un second peigne de commande (62). On trouve au moins un élément à ressort (83) avec une première partie d'extrémité (83a) fixée au substrat et une seconde partie d'extrémité (83b) fixée au second peigne de commande. Le second peigne de commande une pluralité de secondes dents espacées (72) partant de l'un des côtés d'un second élément allongé (71). Ce second élément allongé peut se déplacer entre une première position, dans laquelle ses diverses dents ne s'encastrent pas complètement dans des paires adjacentes de dents du premier élément allongé, et une seconde position dans laquelle chacune de ses dents vient s'encastrer pratiquement complètement dans une paire de dents du premier élément allongé.
CA002370044A 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines Abandoned CA2370044A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12876499P 1999-04-12 1999-04-12
US60/128,764 1999-04-12
US09/464,361 1999-12-15
US09/464,361 US6329737B1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator
PCT/US2000/009919 WO2000062410A1 (fr) 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines

Publications (1)

Publication Number Publication Date
CA2370044A1 true CA2370044A1 (fr) 2000-10-19

Family

ID=26826924

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002370044A Abandoned CA2370044A1 (fr) 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines

Country Status (4)

Country Link
EP (1) EP1188225A4 (fr)
AU (1) AU4346000A (fr)
CA (1) CA2370044A1 (fr)
WO (1) WO2000062410A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001043268A2 (fr) * 1999-11-29 2001-06-14 Iolon, Inc. Micro-dispositif equilibre et microactionneur electrostatique rotatif s'utilisant avec ce micro-dispositif
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
US6333584B1 (en) 2000-01-05 2001-12-25 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
US6671078B2 (en) 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Also Published As

Publication number Publication date
EP1188225A4 (fr) 2005-11-02
AU4346000A (en) 2000-11-14
EP1188225A1 (fr) 2002-03-20
WO2000062410A1 (fr) 2000-10-19

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Legal Events

Date Code Title Description
FZDE Discontinued