EP1188225A4 - Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines - Google Patents

Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines

Info

Publication number
EP1188225A4
EP1188225A4 EP00923312A EP00923312A EP1188225A4 EP 1188225 A4 EP1188225 A4 EP 1188225A4 EP 00923312 A EP00923312 A EP 00923312A EP 00923312 A EP00923312 A EP 00923312A EP 1188225 A4 EP1188225 A4 EP 1188225A4
Authority
EP
European Patent Office
Prior art keywords
offset
comb drive
drive fingers
electrostatic microactuator
inclined comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00923312A
Other languages
German (de)
English (en)
Other versions
EP1188225A1 (fr
Inventor
John D Grade
John H Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iolon Inc
Original Assignee
Iolon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/464,361 external-priority patent/US6329737B1/en
Application filed by Iolon Inc filed Critical Iolon Inc
Publication of EP1188225A1 publication Critical patent/EP1188225A1/fr
Publication of EP1188225A4 publication Critical patent/EP1188225A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
EP00923312A 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines Withdrawn EP1188225A4 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US464361 1990-01-12
US12876499P 1999-04-12 1999-04-12
US128764P 1999-04-12
US09/464,361 US6329737B1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator
PCT/US2000/009919 WO2000062410A1 (fr) 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines

Publications (2)

Publication Number Publication Date
EP1188225A1 EP1188225A1 (fr) 2002-03-20
EP1188225A4 true EP1188225A4 (fr) 2005-11-02

Family

ID=26826924

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00923312A Withdrawn EP1188225A4 (fr) 1999-04-12 2000-04-12 Nicro-actionneur electrostatique avec doigts de commande decales et/ou inclines

Country Status (4)

Country Link
EP (1) EP1188225A4 (fr)
AU (1) AU4346000A (fr)
CA (1) CA2370044A1 (fr)
WO (1) WO2000062410A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001043268A2 (fr) 1999-11-29 2001-06-14 Iolon, Inc. Micro-dispositif equilibre et microactionneur electrostatique rotatif s'utilisant avec ce micro-dispositif
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
US6333584B1 (en) 2000-01-05 2001-12-25 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
US6671078B2 (en) 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *
See also references of WO0062410A1 *

Also Published As

Publication number Publication date
CA2370044A1 (fr) 2000-10-19
EP1188225A1 (fr) 2002-03-20
WO2000062410A1 (fr) 2000-10-19
AU4346000A (en) 2000-11-14

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20011109

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: IOLON, INC.

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB

A4 Supplementary search report drawn up and despatched

Effective date: 20050921

RIC1 Information provided on ipc code assigned before grant

Ipc: 7H 02N 1/00 A

Ipc: 7G 02B 6/35 B

17Q First examination report despatched

Effective date: 20060301

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20061207