AU4346000A - Electrostatic microactuator with offset and/or inclined comb drive fingers - Google Patents

Electrostatic microactuator with offset and/or inclined comb drive fingers

Info

Publication number
AU4346000A
AU4346000A AU43460/00A AU4346000A AU4346000A AU 4346000 A AU4346000 A AU 4346000A AU 43460/00 A AU43460/00 A AU 43460/00A AU 4346000 A AU4346000 A AU 4346000A AU 4346000 A AU4346000 A AU 4346000A
Authority
AU
Australia
Prior art keywords
offset
comb drive
drive fingers
electrostatic microactuator
inclined comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU43460/00A
Inventor
John D. Grade
John H Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/464,361 external-priority patent/US6329737B1/en
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of AU4346000A publication Critical patent/AU4346000A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU43460/00A 1999-04-12 2000-04-12 Electrostatic microactuator with offset and/or inclined comb drive fingers Abandoned AU4346000A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12876499P 1999-04-12 1999-04-12
US60128764 1999-04-12
US09/464,361 US6329737B1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator
US09464361 1999-12-15
PCT/US2000/009919 WO2000062410A1 (en) 1999-04-12 2000-04-12 Electrostatic microactuator with offset and/or inclined comb drive fingers

Publications (1)

Publication Number Publication Date
AU4346000A true AU4346000A (en) 2000-11-14

Family

ID=26826924

Family Applications (1)

Application Number Title Priority Date Filing Date
AU43460/00A Abandoned AU4346000A (en) 1999-04-12 2000-04-12 Electrostatic microactuator with offset and/or inclined comb drive fingers

Country Status (4)

Country Link
EP (1) EP1188225A4 (en)
AU (1) AU4346000A (en)
CA (1) CA2370044A1 (en)
WO (1) WO2000062410A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
EP1240708A2 (en) 1999-11-29 2002-09-18 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator for use therewith
AU2929601A (en) 2000-01-05 2001-07-16 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
US6671078B2 (en) 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Also Published As

Publication number Publication date
CA2370044A1 (en) 2000-10-19
WO2000062410A1 (en) 2000-10-19
EP1188225A1 (en) 2002-03-20
EP1188225A4 (en) 2005-11-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase