CA2349031A1 - Methode de fabrication d'un convertisseur mode-taille a guide-d'ondes conique ayant une grande tolerance de traitement - Google Patents
Methode de fabrication d'un convertisseur mode-taille a guide-d'ondes conique ayant une grande tolerance de traitement Download PDFInfo
- Publication number
- CA2349031A1 CA2349031A1 CA 2349031 CA2349031A CA2349031A1 CA 2349031 A1 CA2349031 A1 CA 2349031A1 CA 2349031 CA2349031 CA 2349031 CA 2349031 A CA2349031 A CA 2349031A CA 2349031 A1 CA2349031 A1 CA 2349031A1
- Authority
- CA
- Canada
- Prior art keywords
- layer
- taper
- waveguide
- mode
- size converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000004519 manufacturing process Methods 0.000 title description 10
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 description 12
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000000835 fiber Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2349031 CA2349031A1 (fr) | 2001-05-28 | 2001-05-28 | Methode de fabrication d'un convertisseur mode-taille a guide-d'ondes conique ayant une grande tolerance de traitement |
PCT/CA2002/000780 WO2002097489A2 (fr) | 2001-05-28 | 2002-05-28 | Procede de realisation de convertisseur mode-taille avec partie effilee tridimensionnelle |
AU2002302262A AU2002302262A1 (en) | 2001-05-28 | 2002-05-28 | Method of fabricating mode-size converter with three-dimensional taper |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2349031 CA2349031A1 (fr) | 2001-05-28 | 2001-05-28 | Methode de fabrication d'un convertisseur mode-taille a guide-d'ondes conique ayant une grande tolerance de traitement |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2349031A1 true CA2349031A1 (fr) | 2002-11-28 |
Family
ID=4169125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2349031 Abandoned CA2349031A1 (fr) | 2001-05-28 | 2001-05-28 | Methode de fabrication d'un convertisseur mode-taille a guide-d'ondes conique ayant une grande tolerance de traitement |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2002302262A1 (fr) |
CA (1) | CA2349031A1 (fr) |
WO (1) | WO2002097489A2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150086153A1 (en) * | 2013-09-20 | 2015-03-26 | Oki Electric Industry Co., Ltd. | Optical device having a stepwise or tapered light input/output part and manufacturing method therefor |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004008203A1 (fr) * | 2002-07-11 | 2004-01-22 | Redfern Integrated Optics Pty Ltd | Guide d'ondes a zone conique |
US9268089B2 (en) * | 2011-04-21 | 2016-02-23 | Octrolix Bv | Layer having a non-linear taper and method of fabrication |
US9310555B2 (en) | 2014-05-16 | 2016-04-12 | Tyco Electronics Corporation | Mode size converters and methods of fabricating the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4938841A (en) * | 1989-10-31 | 1990-07-03 | Bell Communications Research, Inc. | Two-level lithographic mask for producing tapered depth |
US5574742A (en) * | 1994-05-31 | 1996-11-12 | Lucent Technologies Inc. | Tapered beam expander waveguide integrated with a diode laser |
-
2001
- 2001-05-28 CA CA 2349031 patent/CA2349031A1/fr not_active Abandoned
-
2002
- 2002-05-28 WO PCT/CA2002/000780 patent/WO2002097489A2/fr not_active Application Discontinuation
- 2002-05-28 AU AU2002302262A patent/AU2002302262A1/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150086153A1 (en) * | 2013-09-20 | 2015-03-26 | Oki Electric Industry Co., Ltd. | Optical device having a stepwise or tapered light input/output part and manufacturing method therefor |
US9335475B2 (en) * | 2013-09-20 | 2016-05-10 | Oki Electric Industry Co., Ltd. | Method of manufacturing an optical device having a stepwise or tapered light input/output part |
US20160223748A1 (en) * | 2013-09-20 | 2016-08-04 | Oki Electric Industry Co., Ltd. | Optical device having a stepwise or tapered light input/output part and manufacturing method therefor |
US9869815B2 (en) | 2013-09-20 | 2018-01-16 | Oki Electric Industry Co., Ltd. | Optical device having a stepwise or tapered light input/output part and manufacturing method therefor |
Also Published As
Publication number | Publication date |
---|---|
WO2002097489A3 (fr) | 2003-11-20 |
WO2002097489A2 (fr) | 2002-12-05 |
AU2002302262A1 (en) | 2002-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Dead |