CA2306845C - Diffractive vertical cavity surface emitting laser power monitor and system - Google Patents

Diffractive vertical cavity surface emitting laser power monitor and system Download PDF

Info

Publication number
CA2306845C
CA2306845C CA002306845A CA2306845A CA2306845C CA 2306845 C CA2306845 C CA 2306845C CA 002306845 A CA002306845 A CA 002306845A CA 2306845 A CA2306845 A CA 2306845A CA 2306845 C CA2306845 C CA 2306845C
Authority
CA
Canada
Prior art keywords
monitor
power
diffractive
optical element
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002306845A
Other languages
English (en)
French (fr)
Other versions
CA2306845A1 (en
Inventor
Michael R. Feldman
Alan D. Kathman
Robert Te Kolste
Eric G. Johnson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Flir Systems Trading Belgium BVBA
Original Assignee
Tessera North America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tessera North America Inc filed Critical Tessera North America Inc
Publication of CA2306845A1 publication Critical patent/CA2306845A1/en
Application granted granted Critical
Publication of CA2306845C publication Critical patent/CA2306845C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02257—Out-coupling of light using windows, e.g. specially adapted for back-reflecting light to a detector inside the housing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/424—Mounting of the optical light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4245—Mounting of the opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4251—Sealed packages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4255—Moulded or casted packages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
    • G02B6/4259—Details of housings having a supporting carrier or a mounting substrate or a mounting plate of the transparent type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G02B6/4262—Details of housings characterised by the shape of the housing
    • G02B6/4263—Details of housings characterised by the shape of the housing of the transisitor outline [TO] can type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4286—Optical modules with optical power monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Communication System (AREA)
CA002306845A 1998-08-31 1999-08-31 Diffractive vertical cavity surface emitting laser power monitor and system Expired - Fee Related CA2306845C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9783098P 1998-08-31 1998-08-31
US60/097,830 1998-08-31
PCT/US1999/019694 WO2000013051A1 (en) 1998-08-31 1999-08-31 Diffractive vertical cavity surface emitting laser power monitor and system

Publications (2)

Publication Number Publication Date
CA2306845A1 CA2306845A1 (en) 2000-03-09
CA2306845C true CA2306845C (en) 2005-05-03

Family

ID=22265343

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002306845A Expired - Fee Related CA2306845C (en) 1998-08-31 1999-08-31 Diffractive vertical cavity surface emitting laser power monitor and system

Country Status (6)

Country Link
US (3) US6314223B1 (enExample)
EP (1) EP1047970B1 (enExample)
JP (2) JP2002523910A (enExample)
AU (1) AU5789999A (enExample)
CA (1) CA2306845C (enExample)
WO (1) WO2000013051A1 (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8153957B2 (en) * 1996-09-27 2012-04-10 Digitaloptics Corporation East Integrated optical imaging systems including an interior space between opposing substrates and associated methods
US6452669B1 (en) * 1998-08-31 2002-09-17 Digital Optics Corp. Transmission detection for vertical cavity surface emitting laser power monitor and system
US6496621B1 (en) 1998-09-22 2002-12-17 Digital Optics Corp. Fiber coupler system and associated methods for reducing back reflections
US8529139B2 (en) 1998-09-22 2013-09-10 Digitaloptics Corporation East Optical element and system using the same
US6530697B1 (en) 1998-09-22 2003-03-11 Digital Optics Corp. Multi-mode fiber coupler, system and associated methods
US6600845B1 (en) * 1999-10-18 2003-07-29 Digital Optics Corporation Integrated parallel transmitter
US6526076B2 (en) * 2000-12-15 2003-02-25 Agilent Technologies, Inc. Integrated parallel channel optical monitoring for parallel optics transmitter
US6863444B2 (en) 2000-12-26 2005-03-08 Emcore Corporation Housing and mounting structure
US6799902B2 (en) 2000-12-26 2004-10-05 Emcore Corporation Optoelectronic mounting structure
US20030057363A1 (en) * 2000-12-26 2003-03-27 Anderson Gene R. Optical power control system
US6867377B2 (en) 2000-12-26 2005-03-15 Emcore Corporation Apparatus and method of using flexible printed circuit board in optical transceiver device
US6905260B2 (en) 2000-12-26 2005-06-14 Emcore Corporation Method and apparatus for coupling optical elements to optoelectronic devices for manufacturing optical transceiver modules
US7021836B2 (en) 2000-12-26 2006-04-04 Emcore Corporation Attenuator and conditioner
US6963683B2 (en) 2002-09-30 2005-11-08 Intel Corporation System and method for a packaging a monitor photodiode with a laser in an optical subassembly
US6863453B2 (en) 2003-01-28 2005-03-08 Emcore Corporation Method and apparatus for parallel optical transceiver module assembly
US7418016B2 (en) 2003-02-13 2008-08-26 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Method and apparatus for modifying the spread of a laser beam
JP3804834B2 (ja) * 2003-03-25 2006-08-02 住友電気工業株式会社 光送受信モジュール
EP1953577B1 (en) 2003-03-26 2013-07-17 DigitalOptics Corporation East Package for optoelectronic device on wafer level
DE10319901A1 (de) * 2003-04-29 2004-11-25 Infineon Technologies Ag Optische Anordnung mit mindestens einem Sendebauelement und einem dem Sendebauelement jeweils zugeordneten Monitorbauelement
US7165896B2 (en) * 2004-02-12 2007-01-23 Hymite A/S Light transmitting modules with optical power monitoring
GB2443662A (en) * 2006-11-09 2008-05-14 Firecomms Ltd Laser motion detector
US7889993B2 (en) * 2007-08-17 2011-02-15 Avago Technologies Fiber Ip (Singapore) Pte. Ltd Optical transceiver module having a front facet reflector and methods for making and using a front facet reflector
FR2932562B1 (fr) * 2008-06-12 2010-08-27 Univ Pasteur Dispositif de projection de lumiere structuree au moyen de vcsel et de composants optiques diffractifs de phase.
US8000358B2 (en) * 2009-04-20 2011-08-16 Emcore Corporation Power monitoring system for a parallel optical transmitter
KR101994405B1 (ko) 2010-06-11 2019-06-28 가부시키가이샤 리코 정보 저장 장치가 탈착 장치로부터 이탈하는 것을 방지하는 장치 및 방법
US8483571B2 (en) * 2010-06-30 2013-07-09 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical beam splitter for use in an optoelectronic module, and a method for performing optical beam splitting in an optoelectronic module
JP5749592B2 (ja) * 2011-07-15 2015-07-15 株式会社エンプラス 光レセプタクルおよびこれを備えた光モジュール
JP5946611B2 (ja) * 2011-07-15 2016-07-06 株式会社エンプラス 光レセプタクルおよびこれを備えた光モジュール
TW201415614A (zh) * 2012-07-17 2014-04-16 Heptagon Micro Optics Pte Ltd 精巧型光學模組及其製造方法
TW201417250A (zh) 2012-07-17 2014-05-01 海特根微光學公司 光學模組，特別是光電模組，及其製造方法
US9165591B2 (en) 2013-08-07 2015-10-20 Seagate Technology Llc Grating based laser and power monitor for a heat-assisted magnetic recording device
US9547142B1 (en) 2015-09-16 2017-01-17 Sae Magnetics (H.K.) Ltd. Optical transmitter module
DE102016104947A1 (de) * 2016-03-17 2017-09-21 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement und Verfahren zum Betreiben eines optoelektronischen Bauelements
EP3992596A1 (en) * 2020-10-30 2022-05-04 Ricoh Company, Ltd. Optical element, optical device, distance measurement apparatus, and mobile object
JP2022074031A (ja) * 2020-10-30 2022-05-17 株式会社リコー 光学素子、光学装置、距離測定装置及び移動体

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900008380B1 (ko) * 1986-07-01 1990-11-17 미쓰비시덴기 가부시기 가이샤 광학식 헤드장치
US4842404A (en) * 1988-01-13 1989-06-27 Ilc Technology, Inc. Dual detector laser beam power monitor
US5191204A (en) * 1991-10-28 1993-03-02 International Business Machines Corporation Multi-beam optical system and method with power detection of overlapping beams
JPH05144074A (ja) * 1991-11-22 1993-06-11 Sharp Corp 半導体レーザ装置
US5410468A (en) * 1992-06-26 1995-04-25 Matsushita Electric Industrial Co., Ltd. Optical pick-up apparatus
US5247167A (en) * 1992-08-06 1993-09-21 International Business Machines Corporation Multiple beam power monitoring system and method with radiation detection and focusing means of overlapping beams
US6072607A (en) * 1993-10-15 2000-06-06 Sanyo Electric Co., Ltd. Optical pickup device
JPH07326810A (ja) * 1994-05-30 1995-12-12 Sanyo Electric Co Ltd 半導体レーザ装置
DE4440976A1 (de) 1994-11-17 1996-05-23 Ant Nachrichtentech Optische Sende- und Empfangseinrichtung mit einem oberflächenemittierenden Laser
JP3327042B2 (ja) * 1995-04-17 2002-09-24 松下電器産業株式会社 半導体レーザ装置
JPH09198692A (ja) * 1996-01-04 1997-07-31 Motorola Inc 並列読取りｖｃｓｅｌ ｃｄ−ｒｏｍヘッド
DE19601955C2 (de) * 1996-01-09 1997-12-11 Siemens Ag Optoelektronische Sendebaugruppe
US5809050A (en) 1996-01-25 1998-09-15 Hewlett-Packard Company Integrated controlled intensity laser-based light source using diffraction, scattering and transmission
US5661737A (en) * 1996-02-09 1997-08-26 Coherent, Inc. Multi-wavelength laser beam detector with refractive element
JPH1051067A (ja) * 1996-04-29 1998-02-20 Motorola Inc 垂直空洞面放出レーザ用反射型パワ−監視システム
US5661727A (en) 1996-06-12 1997-08-26 International Business Machines Corporation Schemes to determine presence of hidden terminals in wireless networks environment and to switch between them
JPH11513198A (ja) * 1996-07-16 1999-11-09 モトローラ・インコーポレーテッド ホログラムを使用した光学的エミッタのための光学的フィードバックを提供する装置、方法、バーコード・スキャナおよび光学的記憶ユニット
US5812581A (en) * 1996-07-26 1998-09-22 Honeywell Inc. Lens for a semiconductive device with a laser and a photodetector in a common container
US5939773A (en) 1996-08-05 1999-08-17 Motorola, Inc. Semiconductor laser package including a lead frame and plastic resin housing
US5832156A (en) * 1996-10-31 1998-11-03 Lucent Technologies Inc. Article comprising an optical waveguide tap
US6037644A (en) 1997-09-12 2000-03-14 The Whitaker Corporation Semi-transparent monitor detector for surface emitting light emitting devices

Also Published As

Publication number Publication date
EP1047970A4 (en) 2006-03-22
WO2000013051A1 (en) 2000-03-09
US6404959B1 (en) 2002-06-11
JP2002523910A (ja) 2002-07-30
JP2011009782A (ja) 2011-01-13
EP1047970A1 (en) 2000-11-02
EP1047970B1 (en) 2014-10-29
JP5021064B2 (ja) 2012-09-05
US6314223B1 (en) 2001-11-06
US6591043B2 (en) 2003-07-08
US20020150341A1 (en) 2002-10-17
AU5789999A (en) 2000-03-21
CA2306845A1 (en) 2000-03-09

Similar Documents

Publication Publication Date Title
CA2306845C (en) Diffractive vertical cavity surface emitting laser power monitor and system
JP3709372B2 (ja) 光学モニタ・システム
US6646745B2 (en) Method and apparatus for locking the transmission wavelength in optical communication laser packages
US6829258B1 (en) Rapidly tunable external cavity laser
US7286581B2 (en) Self-monitoring light emitting apparatus
US6600845B1 (en) Integrated parallel transmitter
US8705975B2 (en) Single wavelength bidirectional fiber optical link with beam-splitting element
US6661818B1 (en) Etalon, a wavelength monitor/locker using the etalon and associated methods
CN112219326B (zh) 波长光束组合激光系统中的功率和光谱监测
EP3540371B1 (en) Laser projection module, depth camera and electronic device
GB2326760A (en) Optical emission device
US6690709B2 (en) Device and method for reduction of spontaneous emission from external cavity lasers
US6892007B2 (en) Monitoring optical transmitter signals
US7496120B2 (en) Compact laser output monitoring using reflection and diffraction
US20030053499A1 (en) Optical module
US12001043B2 (en) Optical device for controlling light from an external light source
US6934086B2 (en) Optical component and compact wavelength locking arrangement including such a component
SE519224C2 (sv) Optiskt arrangemang
JP2008166577A (ja) 波長モニタ付レーザモジュール
US6920168B1 (en) Optical assembly
HK40008198B (en) Laser projection module, depth camera, and electronic device
JP2000337816A (ja) 光学式変位センサ
CN117470366A (zh) 低噪声光学组件
JPH03212985A (ja) 半導体レーザ装置
GB2427023A (en) Light monitoring device

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20160831