CA2298960C - Appareil generateur d'ozone - Google Patents
Appareil generateur d'ozone Download PDFInfo
- Publication number
- CA2298960C CA2298960C CA002298960A CA2298960A CA2298960C CA 2298960 C CA2298960 C CA 2298960C CA 002298960 A CA002298960 A CA 002298960A CA 2298960 A CA2298960 A CA 2298960A CA 2298960 C CA2298960 C CA 2298960C
- Authority
- CA
- Canada
- Prior art keywords
- ozone generating
- generating apparatus
- discharge
- gas
- ozone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP092718/1994 | 1994-04-28 | ||
| JP9271894 | 1994-04-28 | ||
| JP7047647A JP2983153B2 (ja) | 1994-04-28 | 1995-03-07 | オゾン発生装置 |
| JP047647/95 | 1995-03-07 | ||
| CA002147534A CA2147534C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002147534A Division CA2147534C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2298960A1 CA2298960A1 (fr) | 1995-10-29 |
| CA2298960C true CA2298960C (fr) | 2001-08-21 |
Family
ID=27169998
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002299126A Expired - Lifetime CA2299126C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002299091A Expired - Lifetime CA2299091C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002298925A Expired - Lifetime CA2298925C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002298942A Expired - Lifetime CA2298942C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002298960A Expired - Lifetime CA2298960C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
Family Applications Before (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002299126A Expired - Lifetime CA2299126C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002299091A Expired - Lifetime CA2299091C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002298925A Expired - Lifetime CA2298925C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
| CA002298942A Expired - Lifetime CA2298942C (fr) | 1994-04-28 | 1995-04-21 | Appareil generateur d'ozone |
Country Status (1)
| Country | Link |
|---|---|
| CA (5) | CA2299126C (fr) |
-
1995
- 1995-04-21 CA CA002299126A patent/CA2299126C/fr not_active Expired - Lifetime
- 1995-04-21 CA CA002299091A patent/CA2299091C/fr not_active Expired - Lifetime
- 1995-04-21 CA CA002298925A patent/CA2298925C/fr not_active Expired - Lifetime
- 1995-04-21 CA CA002298942A patent/CA2298942C/fr not_active Expired - Lifetime
- 1995-04-21 CA CA002298960A patent/CA2298960C/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2299091C (fr) | 2000-12-12 |
| CA2299126C (fr) | 2000-12-12 |
| CA2298925C (fr) | 2000-12-12 |
| CA2298942C (fr) | 2000-12-12 |
| CA2298960A1 (fr) | 1995-10-29 |
| CA2299091A1 (fr) | 1995-10-29 |
| CA2299126A1 (fr) | 1995-10-29 |
| CA2298942A1 (fr) | 1995-10-29 |
| CA2298925A1 (fr) | 1995-10-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2147534C (fr) | Appareil generateur d'ozone | |
| US10366865B2 (en) | Gas distribution system for ceramic showerhead of plasma etch reactor | |
| US9934979B2 (en) | Gas distribution showerhead for inductively coupled plasma etch reactor | |
| KR100421276B1 (ko) | 세라믹 베어링을 포함하고 있는 펄스 레이저 시스템용블로우어 어셈블리 | |
| EP2296166B1 (fr) | Appareil à plasma avec dissipateur de chaleur | |
| AU604908B2 (en) | Resilient dielectric electrode for corona discharge devices | |
| CN1013571B (zh) | 生产臭氧装置 | |
| EP1167287B1 (fr) | Générateur d' ozone | |
| US20070154650A1 (en) | Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure | |
| US10336612B2 (en) | Ozone generator unit and system | |
| CA2298960C (fr) | Appareil generateur d'ozone | |
| EP0300452B1 (fr) | Appareil pour établir un champ | |
| JP3592700B2 (ja) | オゾン発生装置 | |
| WO2000032841A1 (fr) | Appareil de production d'un film mince | |
| JPH11343105A (ja) | オゾン発生装置 | |
| JP2003327415A (ja) | オゾン発生装置 | |
| KR20010099008A (ko) | 오존발생기 | |
| AU658532B1 (en) | Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus | |
| CN114727468A (zh) | 一种原位生长双介电体阻挡放电的电极结构 | |
| JP2021091585A (ja) | 誘電体電極およびオゾン発生装置 | |
| JPH11246202A (ja) | オゾン発生装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKEX | Expiry |
Effective date: 20150421 |