CA2276197C - Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme - Google Patents

Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme Download PDF

Info

Publication number
CA2276197C
CA2276197C CA002276197A CA2276197A CA2276197C CA 2276197 C CA2276197 C CA 2276197C CA 002276197 A CA002276197 A CA 002276197A CA 2276197 A CA2276197 A CA 2276197A CA 2276197 C CA2276197 C CA 2276197C
Authority
CA
Canada
Prior art keywords
optical
optical waveguide
substrate
silicon
electrical wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002276197A
Other languages
English (en)
Other versions
CA2276197A1 (fr
Inventor
Yasufumi Yamada
Shinji Mino
Ikuo Ogawa
Hiroshi Terui
Kaoru Yoshino
Kuniharu Kato
Kazuyuki Moriwaki
Akio Sugita
Masahiro Yanagisawa
Toshikazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to CA002441159A priority Critical patent/CA2441159C/fr
Priority claimed from CA002129762A external-priority patent/CA2129762C/fr
Publication of CA2276197A1 publication Critical patent/CA2276197A1/fr
Application granted granted Critical
Publication of CA2276197C publication Critical patent/CA2276197C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
CA002276197A 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme Expired - Fee Related CA2276197C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA002441159A CA2441159C (fr) 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP19732593 1993-08-09
JP197,325/1993 1993-08-09
JP306,578/1993 1993-12-07
JP30657893 1993-12-07
JP106,492/1994 1994-05-20
JP10649294 1994-05-20
JP14822294 1994-06-29
JP148,222/1994 1994-06-29
CA002129762A CA2129762C (fr) 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA002129762A Division CA2129762C (fr) 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CA002441159A Division CA2441159C (fr) 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme

Publications (2)

Publication Number Publication Date
CA2276197A1 CA2276197A1 (fr) 1995-02-10
CA2276197C true CA2276197C (fr) 2004-08-03

Family

ID=31192385

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002276197A Expired - Fee Related CA2276197C (fr) 1993-08-09 1994-08-09 Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme

Country Status (1)

Country Link
CA (1) CA2276197C (fr)

Also Published As

Publication number Publication date
CA2276197A1 (fr) 1995-02-10

Similar Documents

Publication Publication Date Title
EP1083450B1 (fr) Plate-forme pour intégration optoélectronique hybride, sous-module optique
JPH0878657A (ja) 光／電子ハイブリッド実装基板およびその製法、並びに光サブモジュールおよび光／電子ハイブリッド集積回路
US6935792B2 (en) Optoelectronic package and fabrication method
JP3803596B2 (ja) パッケージ型半導体装置
US6376268B1 (en) Optoelectronic assembly and method of making the same
KR100575969B1 (ko) 티오-캔 구조의 광 모듈
EP2059841B1 (fr) Convertisseur photoelectrique
US7037002B2 (en) Optical component and method of manufacturing the same
US20050169596A1 (en) Holder of optical transmission lines and multi-core optical wave-guide
CA2276197C (fr) Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme
Mino et al. Planar lightwave circuit platform with coplanar waveguide for opto-electronic hybrid integration
JP3434473B2 (ja) 光モジュール用シリコンプラットフォーム
JP3389226B2 (ja) 光サブモジュール
CA2441159C (fr) Plate-forme d'integration d'elements opto-electroniques, sous-module optique, circuit opto-electronique integre hybride et methode de fabrication de la plate-forme
Mino et al. A 10 Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure
US6882761B2 (en) Silicon platform for optical modules
US20230021029A1 (en) Wafer-level optoelectronic packaging
JP2002111110A (ja) 光通信モジュール
EP1225667B1 (fr) Platforme de silicium pour modules optiques et procédé de fabrication
JP2001313438A (ja) 光電子モジュール
JP2004200331A (ja) 光通信装置
JP2001356232A (ja) ハイブリッド光集積用実装基板
JP2000156511A (ja) 電気配線構造およびその製造方法

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20140811

MKLA Lapsed

Effective date: 20140811