CA2266803A1 - Method for producing needle diamond-type structure - Google Patents

Method for producing needle diamond-type structure Download PDF

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Publication number
CA2266803A1
CA2266803A1 CA002266803A CA2266803A CA2266803A1 CA 2266803 A1 CA2266803 A1 CA 2266803A1 CA 002266803 A CA002266803 A CA 002266803A CA 2266803 A CA2266803 A CA 2266803A CA 2266803 A1 CA2266803 A1 CA 2266803A1
Authority
CA
Canada
Prior art keywords
diamond
type structure
anodized alumina
producing needle
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002266803A
Other languages
French (fr)
Other versions
CA2266803C (en
Inventor
Akira Fujishima
Hideki Masuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Publication of CA2266803A1 publication Critical patent/CA2266803A1/en
Application granted granted Critical
Publication of CA2266803C publication Critical patent/CA2266803C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A method for producing a needle diamond-type structure comprises steps of placing an anodized alumina on a diamond substrate, which anodized alumina has a plurality of through holes and functions as a mask; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on the diamond substrate;
removing the anodized alumina; and performing a plasma etching treatment using the dots as a mask, thereby forming regularly arranged needle-type diamond columns.
CA002266803A 1998-06-12 1999-03-25 Method for producing needle diamond-type structure Expired - Fee Related CA2266803C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10-164,772 1998-06-12
JP10164772A JP3020155B2 (en) 1998-06-12 1998-06-12 Method for producing needle-shaped diamond array structure

Publications (2)

Publication Number Publication Date
CA2266803A1 true CA2266803A1 (en) 1999-12-12
CA2266803C CA2266803C (en) 2003-07-08

Family

ID=15799653

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002266803A Expired - Fee Related CA2266803C (en) 1998-06-12 1999-03-25 Method for producing needle diamond-type structure

Country Status (3)

Country Link
US (1) US6309554B1 (en)
JP (1) JP3020155B2 (en)
CA (1) CA2266803C (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6461528B1 (en) * 1999-10-29 2002-10-08 California Institute Of Technology Method of fabricating lateral nanopores, directed pore growth and pore interconnects and filter devices using the same
JP3971090B2 (en) * 2000-04-05 2007-09-05 株式会社神戸製鋼所 Method for producing diamond having needle-like surface and method for producing carbon-based material having cilia-like surface
US6607673B2 (en) 2000-05-17 2003-08-19 The University Of Tokyo Method for manufacturing a diamond cylinder array having dents therein
JP3385364B2 (en) * 2000-05-17 2003-03-10 東京大学長 Method for manufacturing diamond cylinder array having concave portion
KR20040035529A (en) * 2002-10-22 2004-04-29 송오성 Diamond etching with selective oxidation
JP4464041B2 (en) * 2002-12-13 2010-05-19 キヤノン株式会社 Columnar structure, electrode having columnar structure, and manufacturing method thereof
ITTO20030167A1 (en) * 2003-03-06 2004-09-07 Fiat Ricerche PROCEDURE FOR THE CREATION OF NANO-STRUCTURED EMITTERS FOR INCANDESCENT LIGHT SOURCES.
JPWO2009060973A1 (en) * 2007-11-10 2011-03-24 並木精密宝石株式会社 Needle-shaped diamond, cantilever using it, probe for photomask correction or cell manipulation
US8951317B1 (en) * 2009-04-27 2015-02-10 Us Synthetic Corporation Superabrasive elements including ceramic coatings and methods of leaching catalysts from superabrasive elements
JP2014176909A (en) * 2013-03-13 2014-09-25 Shingijutsu Kaihatsu Kk Abrasive grain for high performance precise working, tool using the same, and method of manufacturing them
US9586279B2 (en) * 2013-09-17 2017-03-07 Kangmin Hsia Method and system of surface polishing
JP6128189B2 (en) * 2015-11-09 2017-05-17 大日本印刷株式会社 Diamond bite and manufacturing method thereof
KR101817246B1 (en) * 2016-04-22 2018-01-10 (주)포인트엔지니어링 Mask for organic light emitting diode
US20200355857A1 (en) * 2017-08-30 2020-11-12 Ecole Polytechnique Federale De Lausanne Single crystalline diamond defractive optical elements and method of fabricating the same
CN110323350B (en) * 2018-03-29 2021-01-29 京东方科技集团股份有限公司 Thin film packaging method, thin film packaging structure and display device
CN112992675B (en) * 2021-02-05 2022-12-27 中国电子科技集团公司第十三研究所 Preparation method of porous diamond substrate for terahertz Schottky diode

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334927A (en) 1986-07-29 1988-02-15 Matsushita Electric Ind Co Ltd Working of diamond
JPH01246116A (en) 1988-03-29 1989-10-02 Natl Inst For Res In Inorg Mater Production of acicular, fibrous or porous diamond or their aggregate
US5399238A (en) * 1991-11-07 1995-03-21 Microelectronics And Computer Technology Corporation Method of making field emission tips using physical vapor deposition of random nuclei as etch mask
JP3104433B2 (en) * 1992-10-16 2000-10-30 住友電気工業株式会社 Diamond etching method
US5844252A (en) 1993-09-24 1998-12-01 Sumitomo Electric Industries, Ltd. Field emission devices having diamond field emitter, methods for making same, and methods for fabricating porous diamond
JPH07202164A (en) 1993-12-28 1995-08-04 Furukawa Electric Co Ltd:The Manufacture of semiconductor micro-structure
EP0931859B1 (en) * 1996-08-26 2008-06-04 Nippon Telegraph And Telephone Corporation Method of manufacturing porous anodized alumina film
JP3020154B2 (en) * 1998-06-12 2000-03-15 東京大学長 Method for producing porous diamond body

Also Published As

Publication number Publication date
JP2000001392A (en) 2000-01-07
JP3020155B2 (en) 2000-03-15
CA2266803C (en) 2003-07-08
US6309554B1 (en) 2001-10-30

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Effective date: 20150325