JP6128189B2 - Diamond bite and manufacturing method thereof - Google Patents

Description

  The present invention relates to a diamond tool used for manufacturing a mold used in manufacturing a wire grit type polarizer and a manufacturing method thereof.

In recent years, optical elements having a periodic fine structure have been developed.
An example of such an optical element is a wire grit type polarizer (for example, Patent Document 1). The wire grit type polarizer has a concavo-convex structure in which conductor wires made of metal or the like are arranged in parallel with a predetermined width and a predetermined pitch (hereinafter, may be referred to as a grit structure). Is. The wire grid type polarizer is an element that separates the target light for each polarization component, reflects a polarization component parallel to the conductor line, and transmits a polarization component perpendicular to the conductor line. It has a function of creating a single polarized light.

  In the wire grit type polarizer, the pitch dimension of the grit structure needs to be equal to or less than the wavelength of the target light, and usually the grit structure needs to be formed with a pitch dimension of several hundred nm or less. And it is necessary to form the width dimension of a conductor wire in a dimension still smaller than the pitch dimension of the above-mentioned uneven structure. That is, in the manufacture of a wire grit type polarizer, it is required to form a grit structure with a high precision with a dimension of submicron order.

Such a wire grit type polarizer generally prepares a mold having sub-micron-order fine uneven grooves corresponding to the above-mentioned grit structure on the surface, and transfers the fine uneven grooves on the mold surface to a transparent resin molded body. It is manufactured by doing. The concave and convex grooves on the surface of the mold are cut on the surface of the metal substrate using, for example, a diamond bit made of a single crystal diamond having a plurality of striped fine concave portions corresponding to the fine concave and convex grooves described above in the drawing portion. It is formed by doing.
Therefore, in order to form a highly accurate grit structure in the wire grit type polarizer, it is necessary to form the above-described plurality of fine recesses in the above-described diamond bit drawing portion with high accuracy.

  Here, as a method for forming a plurality of high-definition fine concave portions in the drawing portion of the diamond tool described above, a method is proposed in which a surface of the diamond tool is sputtered by a focused ion beam (FIB). (For example, Patent Document 1). The above-mentioned method is a method of directly drawing by skipping atoms on the surface of the diamond tool by sputtering an ion beam mainly using gallium ions or argon ions on the surface of the diamond tool, and depends on the shape of the diamond tool. It is possible to perform processing without having to do this, and there is an advantage that no complicated pretreatment or the like is required.

  However, when the metal substrate surface is cut using a diamond tool in which a plurality of high-definition fine recesses are formed by the above-described method using FBI, a mold having desired fine uneven grooves is obtained. In some cases, it is difficult to form a wire-grit type polarizer exhibiting desired polarization characteristics.

JP 2009-83052 A

As a result of diligent research in view of the above circumstances, the present inventors have found that the following phenomenon may occur in the drawing portion of a diamond bit in which a plurality of fine recesses are formed using FBI. It was. That is, in FBI, gallium ions having a relatively large atomic weight are preferably used, and therefore, the inner surface of a plurality of fine recesses in the drawing portion is made amorphous by breaking the crystallinity of diamond due to the influence of FBI. A damaged layer may be formed. When the damage layer is formed, its hardness decreases and becomes brittle, and the damage layer is destroyed when the surface of the metal substrate is cut when manufacturing the mold. May change, and the shape of the fine concavo-convex groove formed in the mold may be different from the desired shape.
Therefore, the present inventors examined using a manufacturing method different from the manufacturing method of the diamond bit using the conventional FBI, and further conducted intensive research, so that a plurality of fine concave portions of the drawing portion in the diamond bit were formed. A diamond bite manufacturing method that can be formed with high definition and that can suppress the formation of a damage layer on the inner surfaces of a plurality of fine recesses in the drawing portion has been found, and the present invention has been completed. It was.

  That is, the present invention provides a diamond tool having a drawing portion capable of forming a desired fine uneven groove in a mold used for manufacturing a wire grit type polarizer, and a high-definition in the above-described diamond bit drawing portion. The main object is to provide a method for producing a diamond tool capable of forming a plurality of fine recesses.

  In order to solve the above-mentioned problems, the present invention provides a diamond tool having a drawing portion composed of a plurality of fine recesses formed in a stripe shape on a convex portion of the surface of a diamond substrate, wherein the plurality of fine recesses of the drawing portion. The diamond bite is characterized in that the inner surface is made of diamond having crystallinity.

  According to the present invention, since the inner surfaces of the plurality of fine recesses of the drawing unit are made of diamond having crystallinity, the hardness of the drawing unit can be increased, so that the surface of the metal substrate is processed. Then, when producing a mold, it is possible to suppress the destruction of a plurality of fine concave portions of the drawing portion, so that a diamond tool having a desired fine concave and convex groove can be obtained. .

  In this invention, it is preferable that the said convex part is a corner | angular part which consists of two adjacent planes. This is because by having the drawing portions at the corners, it becomes easy to cut the surface of the metal substrate when the mold is manufactured.

  In this invention, it is preferable to have the metal layer formed in surfaces other than the inner surface of the said several fine recessed part of the said drawing part. It is because it becomes possible to protect a drawing part by having the said metal layer.

  The present invention has a drawing portion composed of a plurality of fine concave portions formed in a stripe shape on a convex portion on the surface of a diamond substrate, and an inner surface of the plurality of fine concave portions of the drawing portion is made of diamond having crystallinity. A method for manufacturing a diamond tool, comprising preparing a laminate having the diamond substrate and a metal layer formed on the diamond substrate, and applying a resist on the metal layer of the laminate to form a resist layer. A resist layer forming step, a drawing step of drawing the resist layer using an electron beam and then patterning the resist layer by developing, and an etching process on the metal layer exposed by patterning the resist layer The metal layer removing step of removing the metal layer in a pattern by applying, and the metal layer is removed and exposed There is provided a method for producing a diamond tool, comprising: a step of forming a plurality of fine recesses in the form of stripes on a surface of the diamond substrate by performing an oxygen plasma etching process on the diamond base. .

  According to the present invention, a high-definition pattern can be drawn on the resist layer by having a drawing step using an electron beam, and the resist layer can be patterned with high definition. Further, in the metal layer removing step and the fine recess forming step, the metal layer is removed in a pattern using the above-described resist layer having a high-definition pattern, and the oxygen plasma etching process is performed on the diamond substrate. It is possible to form the plurality of fine recesses with high definition while maintaining the crystallinity of diamond on the inner surfaces of the plurality of fine recesses.

Since the diamond bite of the present invention is composed of diamond having crystallinity on the inner surface of the plurality of fine recesses of the drawing part, when producing a mold by cutting the surface of the metal substrate, It is possible to suppress the destruction of the plurality of fine concave portions of the drawing unit, and it is possible to produce a mold having a desired fine concave and convex groove.
In the method for manufacturing a diamond tool of the present invention, a resist layer having a high-definition pattern can be formed on a laminate having a diamond substrate and a metal layer by using an electron beam. Further, by using a resist layer formed in a pattern, the metal layer is removed in a pattern, and an oxygen plasma etching process is performed on the diamond substrate, whereby the inner surfaces of the plurality of fine recesses of the drawing portion in the diamond bite There is an effect that it becomes possible to form a high-definition fine concave portion while maintaining the crystallinity of the diamond.

It is the schematic which shows an example of the diamond bite of this invention. It is the schematic which shows the other example of the diamond bite of this invention. It is the schematic which shows the other example of the diamond bite of this invention. It is the schematic which shows the other example of the diamond bite of this invention. It is the schematic which shows the other example of the diamond bite of this invention. It is a figure for demonstrating the use of the diamond bite of this invention. It is process drawing which shows an example of the manufacturing method of the diamond bite of this invention. It is the schematic which shows an example of the manufacturing method of the diamond cutting tool of this invention.

  Hereinafter, the diamond tool of the present invention and the manufacturing method thereof will be described.

A. Diamond Bit The diamond bit of the present invention will be described.
The diamond bite of the present invention has a drawing portion composed of a plurality of fine recesses formed in a stripe shape on the convex portion of the diamond base surface, and the inner surface of the plurality of fine recesses of the drawing portion has crystallinity. It is comprised from the diamond which has.

Here, the diamond tool of the present invention will be described with reference to the drawings. FIG. 1A is a schematic view showing an example of the diamond cutting tool of the present invention, and FIG. 1B is a view of the portion A of FIG. 1A viewed from the plane 1α side. (c) is the figure which looked at the A section of Drawing 1 (a) from the plane 1 beta side.
As shown in FIGS. 1A to 1C, a diamond cutting tool 10 of the present invention has a drawing portion 2 composed of a plurality of fine recesses 21 formed in a stripe shape on a protrusion 1 ′ on the surface of a diamond substrate 1. Is. Further, the diamond cutting tool 10 of the present invention is characterized in that the inner surfaces of the plurality of fine recesses 21 of the drawing unit 2 are composed of diamond having crystallinity. FIG. 1A shows an example in which the convex portion 1 ′ is a corner portion composed of two adjacent planes, that is, a 1α plane and a 1β plane, and the drawing section 2 is formed at the corner section. .

Here, the diamond bite of the present invention is obtained by applying a resist layer formed on the surface of a metal layer of a laminate of a diamond base and a metal layer to an electron beam, as will be described later in “B. Method for producing diamond bite”. After drawing using a beam (EB: Electron Beam), the resist layer is patterned by developing, the metal layer is removed in a pattern according to the patterned resist layer, and the metal layer is removed and exposed. By subjecting the diamond base to oxygen plasma etching, a plurality of fine recesses of the drawing portion are formed.
In the above-described method, since the diamond substrate is processed using oxygen ions having a smaller atomic weight than gallium ions used for FBI, the crystallinity of diamond is not easily broken even on the inner surface of the fine recess, and the damage layer It is possible to suppress the formation of.

  Therefore, according to the present invention, since the inner surfaces of the plurality of fine recesses of the drawing unit are made of diamond having crystallinity, the hardness of the drawing unit can be increased. Since a plurality of fine recesses in the drawing portion can be prevented from being broken when a mold is produced by processing the above, a diamond tool capable of producing a die having a desired fine uneven groove is obtained. be able to.

  Hereinafter, the diamond tool of the present invention will be described in detail.

1. Drawing part The drawing part in this invention consists of a several fine recessed part formed in the stripe form at the convex part of the diamond base | substrate surface, and the inner surface of the said several fine recessed part of the said drawing part is from the diamond which has crystallinity. It is a configured part.

  Here, in the present invention, “the inner surfaces of the plurality of fine concave portions of the drawing portion are composed of diamond having crystallinity” means that the inner surfaces of the plurality of fine concave portions of the drawing portion are diamond bases other than the inner surfaces of the fine concave portions. It means that there is no amorphous diamond on the inner surface of a plurality of fine concave portions of the drawing portion having the same degree of crystallinity.

(1) Fine concave portion The fine concave portion in the present invention is formed in a plurality of stripes on the convex portion on the surface of the diamond substrate, and constitutes a drawing portion.
Moreover, the said fine recessed part is comprised from the diamond which has the crystallinity mentioned above.

In the present invention, the cross-sectional shape of the fine recess in the cross section in the substantially vertical direction with respect to the stripe of the drawing portion (hereinafter sometimes referred to as a vertical cross-sectional shape) is formed on the convex portion on the surface of the diamond substrate. The shape is not particularly limited as long as the shape can be a drawing portion capable of cutting a desired fine uneven groove on the mold surface. For example, a rectangular shape (square shape, rectangular shape), a table Examples thereof include a shape, a triangular shape, a semicircular shape, and shapes obtained by deforming these shapes. In the present invention, the vertical cross-sectional shape is preferably rectangular.
Here, in the wire grit type polarizer, when the cross-sectional shape of the convex part or concave part of the grit structure is rectangular, it tends to exhibit high polarization characteristics. Therefore, in order to obtain a wire grit-type polarizer having a desired grit structure, the cross-sectional shape of the convex or concave portion of the fine concave and convex groove of the mold used for transferring the grit structure, and the fine concave and convex groove of the above mold It is preferable that the vertical cross-sectional shape of the fine recesses in the diamond tool used for forming is also rectangular.
In addition, the vertical cross-sectional shape of a fine recessed part points out the cross-sectional shape of the fine recessed part in the BB line cross section shown to Fig.1 (a), and points out the cross-sectional shape of a fine recessed part as shown in FIG.1 (b).

In addition, the cross-sectional shape of the fine concave portion in the cross section in the substantially parallel direction with respect to the stripe of the drawing portion in the present invention (hereinafter referred to as a parallel cross-sectional shape) can be formed on the convex portion on the surface of the diamond substrate. The shape is not particularly limited as long as the shape can be a drawing portion capable of cutting a desired fine uneven groove on the mold surface.
For example, as shown in FIGS. 2A to 2C, when the fine concave portion 21 is formed in the convex portion 1 ′ having the flat surface 1β, as shown in FIG. May be parallel to the plane 1β, or may have a parallel sectional shape such that the bottom surface t of the fine recess intersects the plane 1β as shown in FIG.
In addition, the cross-sectional shape in the vertical direction of the stripe of the fine concave portion refers to the cross-sectional shape of the fine concave portion in the cross section taken along the line C-C shown in FIG. 2A, and the fine shape as shown in FIGS. It refers to the cross-sectional shape of the recess.
2A is a schematic view showing another example of the diamond tool of the present invention, and FIGS. 2B and 2C are examples of a cross section taken along the line CC in FIG. 2A. FIG. Also, reference numerals not described in FIGS. 2A to 2C can be the same as those in FIG. 1A and the like, and thus description thereof is omitted here.

  Further, the width of the fine concave portion can be formed in a convex portion on the surface of the diamond substrate, and can be formed so that a desired fine concave and convex groove can be formed in the mold by the drawing portion including the plurality of fine concave portions. There is no particular limitation. In addition, the width | variety of a fine recessed part points out the distance shown by W in FIG.1 (b).

The depth of the fine concave portion is not particularly limited as long as it can be formed on the convex portion of the surface of the diamond substrate and a desired fine concave / convex groove can be formed in the mold, but specifically, 70 nm to 90 nm. It is preferable to be within the range. If the depth of the fine recess is less than the above range, it may be difficult to form a desired fine uneven groove in the mold. If the depth of the fine recess exceeds the above range, This is because the drawing portion of the diamond tool may become brittle.
In addition, the depth of a fine recessed part refers to the maximum depth of the fine recessed part formed in the diamond base | substrate surface, and refers to the distance shown by T in FIG.1 (b). Moreover, the depth of the fine recessed part mentioned above is an average value of the depth of the several fine recessed part formed in the diamond base | substrate surface.

(2) Drawing part The drawing part of this invention is a part formed in the convex part of the diamond base | substrate surface, and the several above-mentioned fine recessed part is formed in stripe form.

The stripe pitch of the drawing portion is not particularly limited as long as it can be formed on the convex portion of the surface of the diamond substrate and a desired fine uneven groove can be formed on the mold using the drawing portion. Specifically, it is preferably 200 nm or less, and more preferably in the range of 160 nm to 200 nm. This is because, when the pitch exceeds the above range, there is a possibility that the polarization characteristics of the wire grit type polarizer manufactured using the mold manufactured using the diamond tool of the present invention may deteriorate.
Here, the pitch of the stripes of the drawing portion refers to the distance from the center of one fine convex portion to the center of the adjacent concave portion, and refers to the distance indicated by P in FIG.

  The ratio W / P of the width (W) of the fine recesses to the pitch (P) of the stripes of the drawing parts is a drawing part capable of producing a mold having a desired fine uneven groove. The value is not particularly limited as long as the value can be obtained.

The width of the stripe of the drawing portion can be formed on a convex portion on the surface of the diamond base, and a desired fine uneven groove can be formed in the mold using the drawing portion of the diamond bit of the present invention. Although it will not specifically limit if it is possible grade, Specifically, it is preferable to exist in the range of 30 micrometers-100 micrometers. When the width of the stripe of the drawing portion in the present invention is less than the above range, it takes a lot of time to form the fine uneven grooves in the mold, and continuous fine uneven grooves are formed by a plurality of cutting processes. In this case, the accuracy such as the pitch dimension of the fine uneven grooves may be lowered. Further, when the stripe width of the drawing portion exceeds the above range, it may be difficult to form the drawing portion of the diamond bit.
Note that the width of the stripe of the drawing unit refers to the width of the stripe of the drawing unit in plan view according to the present invention, for example, the distance indicated by L1 in FIG.

In addition, the stripe length of the drawing portion in the present invention can be formed on the surface of the diamond substrate, and a desired fine concavo-convex groove can be formed in the mold using the diamond bit of the present invention. Although it will not specifically limit if it is a moderate grade, It is preferable that it is 2 micrometers or more. If the length is less than the above range, the portion other than the drawing part of the diamond tool of the present invention may come into contact with the mold and damage the surface of the mold, and the length is within the above range. This is because it may be difficult to form a desired drawing portion on the convex portion of the diamond substrate surface.
The stripe length of the drawing unit refers to the length of the stripe in plan view of the drawing unit of the present invention, for example, the distance indicated by L2 in FIG.

  Moreover, the drawing part in this invention is formed in the convex part of the diamond base | substrate surface.

  As shown in FIG. 1 (a), the convex portion is not particularly limited as long as at least one is present in the diamond tool 10, and for example, as shown in FIG. May be present. Note that FIG. 3 shows an example having two corners consisting of a plane 1β in which a plurality of fine recesses 21 are continuously formed and a plane 1α or a plane 1γ adjacent to the plane 1β. The plane 1γ is a surface facing the plane 1α. The corner portion will be described later.

As the shape of the convex portion, it is possible to form the above-described drawing portion, and it is possible to produce a mold having a desired fine uneven groove by cutting the surface of the metal substrate using the drawing portion. There is no particular limitation as long as it is a simple shape.
The convex portion may have a flat surface, and although not shown, may have a curved surface structure, but preferably has a flat surface. This is because, when the convex portion has a flat surface, it is possible to easily perform workability when cutting the surface of the metal substrate.

  When the convex portion has a flat surface, the convex portion is a corner portion composed of two adjacent flat surfaces (the flat surface 1α and the flat surface 1β in FIG. 1) as shown in FIG. It is more preferable that It is because the workability at the time of cutting the metal substrate surface can be further improved by the convex portion being a corner portion.

When the convex portion is a corner portion, the angle of the corner portion can form a drawing portion, and the surface of the metal substrate is cut using the drawing portion to form a desired fine uneven groove. The angle is not particularly limited as long as it is an angle at which the mold can be produced.
The angle of the corner is an angle indicated by θ in FIG. In addition, as shown in FIG. 3, when the plurality of convex portions 1 ′ are a plurality of corner portions, it is preferable that the angle θ1 or the angle θ2 of at least one corner portion falls within the above-described numerical range.

Moreover, in this invention, it is preferable to have the metal layer formed in surfaces other than the inner surface of the said several fine recessed part of the said drawing part. As will be described later in the section “B. Diamond Bit Manufacturing Method”, when manufacturing the diamond bit of the present invention, patterning of a resist layer for forming a plurality of fine recesses using an electron beam is required. Done. At this time, by forming a metal layer on the surface of the diamond substrate, the conductivity of the electron beam can be improved, and the resist layer can be patterned with higher definition.
In addition, even after the manufacture of the diamond bite, by having a metal layer on the surface other than the inner surfaces of the plurality of fine recesses of the drawing portion, the drawing portion composed of the plurality of fine recesses is protected and held in a good state. It becomes possible.

  The metal used for the metal layer is not particularly limited as long as it can improve the conductivity of the electron beam when manufacturing the diamond tool and can protect the drawing portion. Alternatively, Cr or the like can be used.

  The thickness of the metal layer is not particularly limited as long as a desired fine recess can be formed in the section “B.

  The method for forming the metal layer is not particularly limited as long as the metal layer can be formed with a desired thickness on the surface of the drawing portion. For example, a metal vapor deposition method, a metal plating method, a sputtering method, etc. Can be mentioned.

2. Diamond Base The diamond base according to the present invention has the above-described convex portion on the surface thereof, and the above-described drawing portion is formed on the convex portion.

  The diamond substrate in the present invention is usually composed of single crystal diamond.

The three-dimensional shape of the diamond substrate in the present invention is not particularly limited as long as it can have the convex portion having the drawing portion described above. Here, since the diamond cutting tool 10 of the present invention is normally used while being fixed to the pedestal 20 as shown in FIG. 4, it is preferable that the diamond bit 10 has a three-dimensional shape that can be fixed to the pedestal 20. FIG. 4 is a schematic view showing an example of the diamond tool of the present invention fixed to the pedestal. In FIG. 4, reference numerals that are not described can be the same as those in FIG. 1, and thus description thereof is omitted here.
Since the pedestal will be described later, description thereof is omitted here.

  The three-dimensional shape of the diamond substrate can be the same as that of a diamond substrate used for a general diamond tool.

  The size of the diamond substrate in the present invention is such that a mold having a convex portion capable of forming the above-described drawing portion and having a desired fine uneven groove by cutting the surface of the metal substrate. There is no particular limitation as long as it is present, and it can be appropriately selected according to the use of the diamond tool.

3. Diamond Bit The diamond bit according to the present invention may have an alignment mark 4 on a part of the diamond base as shown in FIGS. 5 (a) and 5 (b). As described above, since the diamond cutting tool of the present invention is normally used while being fixed to a pedestal, the diamond cutting tool of the present invention can be fixed to the pedestal accurately and easily by having the alignment mark. This is because it becomes possible.
Since FIGS. 5A and 5B will be described later, description thereof is omitted here.

  The size of the alignment mark is not particularly limited as long as it can be formed on a part of the diamond bite without damaging the drawing portion and can be observed with a microscope or the like.

  The method for forming the alignment mark is not particularly limited as long as it can be formed on a part of the diamond tool without damaging the drawing portion. For example, a method for drawing directly on the diamond tool by FBI, or a printing method. A method of printing on the surface of the diamond tool using the can.

4). Others The diamond bite of the present invention is not particularly limited as long as it has the above-described configuration.

  Here, when a metal base is cut to produce a die, it is preferable to use the diamond tool 10 of the present invention fixed to a pedestal 20 as shown in FIG.

  The pedestal is also called a shank and is a tool used to hold the above-described diamond tool. Since the pedestal can be the same as the pedestal used in a general diamond tool, description thereof is omitted here.

  The method for fixing the diamond cutting tool of the present invention to the pedestal is not particularly limited as long as it is a method capable of fixing a general diamond cutting tool to the pedestal, and can be a known method. Description is omitted.

  In addition, as an alignment method when fixing the diamond tool to the pedestal, any method can be used as long as the metal base surface can be cut by a diamond tool drawing portion to produce a mold having a desired fine uneven groove. It is not particularly limited. For example, as shown in FIG. 5A, alignment may be performed by aligning the end of the pedestal 20 and the alignment mark 4 of the diamond tool 10, and as shown in FIG. You may align by aligning an edge part and the edge part of the diamond bit 10.

  In the present invention, a pedestal alignment mark 4 ′ may be formed on the pedestal 20 as shown in FIGS. When the pedestal alignment mark 4 ′ is formed on the pedestal 20, as shown in FIG. 5B, the pedestal alignment mark 4 ′ of the pedestal 20 and the alignment mark 4 of the diamond tool 10 are aligned and aligned. As shown in FIG. 5 (d), the alignment may be performed by aligning the pedestal alignment mark 4 ′ of the pedestal 20 and the end of the diamond tool 10.

  5A to 5D are schematic views of the diamond tool fixed to the pedestal 20 as seen from the plane 1β side as shown in FIG.

  The size of the pedestal alignment mark formed on the pedestal can be approximately the same as that of the diamond bit alignment mark described above.

  Examples of the method for forming the pedestal alignment mark on the pedestal include a method of drawing the pedestal alignment mark using FBI and a method of printing the pedestal alignment mark on the surface of the pedestal.

5. Applications The diamond tool of the present invention is used when a mold having fine concavo-convex grooves used mainly for manufacturing a wire grit type polarizer is produced. Specifically, as shown in FIG. 6, in order to form the fine concavo-convex groove 101 by cutting the surface of the metal base 100 used when producing the mold using the drawing part 2 of the diamond tool 10. Used.
In addition, FIG. 6 is a figure for demonstrating the use of the diamond cutting tool of this invention.

6). Method for Producing Diamond Bit There is no particular limitation on the method for producing the diamond bit of the present invention, and for example, the method described in the section “B. Method for Producing Diamond Bit” described later can be used.

B. Next, a method for manufacturing a diamond tool according to the present invention will be described.
The method for manufacturing a diamond tool according to the present invention is a method for manufacturing the diamond tool described in the above-mentioned section “A. Diamond tool”.

  Specifically, the method for producing a diamond cutting tool of the present invention has a drawing portion composed of a plurality of fine concave portions formed in a stripe shape on the convex portion of the surface of the diamond base, and the plurality of fine concave portions of the drawing portion are formed. A method for producing a diamond bite, the inner surface of which has crystallinity, comprising: preparing a laminate having the diamond substrate and a metal layer formed on the diamond substrate; and on the metal layer of the laminate A resist layer forming step of forming a resist layer by applying a resist to the substrate, a drawing step of patterning the resist layer by performing development after drawing the resist layer using an electron beam, and the resist layer Metal layer removal that removes the metal layer in a pattern by etching the exposed metal layer after patterning And a step of forming fine recesses for forming the stripe-like fine recesses on the surface of the diamond substrate by subjecting the diamond substrate exposed by removing the metal layer to an oxygen plasma etching process. It is a manufacturing method characterized by this.

  Here, the manufacturing method of the diamond tool of the present invention will be described with reference to the drawings. 7A to 7E are process diagrams showing an example of a method for producing a diamond tool according to the present invention. In the method for manufacturing a diamond tool of the present invention, first, as shown in FIG. 7A, a laminate 10 ′ having a diamond substrate 1 and a metal layer 11 formed on the diamond substrate 1 is prepared. A resist is applied on the metal layer 11 to form a resist layer 12 (resist layer forming step). Next, as shown in FIGS. 7A and 7B, after the resist layer 12 is drawn using the electron beam 13, the development process is performed to pattern the resist layer 12 (drawing step). Next, as shown in FIG. 7C, the metal layer 11 is removed in a pattern by etching the metal layer 11 exposed by patterning the resist layer 12 (metal layer removing step). Next, as shown in FIG. 7 (d), the diamond substrate 1 exposed by removing the metal layer 11 is irradiated with oxygen plasma 14 to perform an oxygen plasma etching process, whereby the surface of the diamond substrate 1 is striped. A plurality of fine concave portions 21 are formed (a fine concave portion forming step). Further, after the step of forming the fine recesses, a step of removing the remaining resist layer 12 as necessary, a step of polishing the diamond base and shaping the diamond bite, etc. are performed, as shown in FIG. A diamond tool 10 can be obtained. In addition, since the code | symbol which is not demonstrated in FIG.7 (e) can be made the same as that of FIG. 1, description here is abbreviate | omitted.

  According to the present invention, it is possible to draw a high-definition pattern on a resist layer by having a drawing process using an electron beam. Further, in the metal layer removing step and the fine recess forming step, the metal layer is removed in a pattern using the resist layer having the above-described high-definition pattern and subjected to oxygen plasma etching, so that conventional FBI is used. Compared with the method of directly drawing a diamond substrate, the diamond substrate can be processed using oxygen ions having a small atomic weight, so that it is difficult to form a damage layer when forming a fine recess, and the diamond on the surface of the drawing portion Thus, it becomes possible to form fine concave portions while maintaining the crystallinity.

  Hereafter, each process in the manufacturing method of the diamond tool of this invention is each demonstrated.

1. Resist Layer Forming Step In the resist layer forming step of the present invention, a layered body having the diamond base and a metal layer formed on the diamond base is prepared, a resist is applied onto the metal layer of the layered body, and a resist is formed. It is a process of forming a layer.

  The laminate used in this step has a diamond substrate and a metal layer formed on the diamond substrate. The metal layer is formed on the surface of the drawing portion in the diamond tool manufactured by the manufacturing method of the present invention.

  The diamond substrate and the metal layer used in the laminate can be the same as those described in the above-mentioned section “A. Diamond bite”, so description thereof is omitted here.

  As the resist used in this step, either a positive resist or a negative resist can be used.

  The resist coating method is not particularly limited as long as it is a method capable of forming a resist layer with a uniform film thickness on the laminate, and a known method such as a spin coating method or a spraying method may be used. it can.

  In addition, when apply | coating a resist using a spin coat method, it is preferable to give a shape process to the edge part of the said laminated body. When the spin coat method is used, the resist layer formed at the end of the stacked body may be formed thicker than the resist formed at the center of the stacked body. Therefore, it is preferable to perform shape processing on the end portion of the laminated body in order to reduce the difference in film thickness between the resist layers formed at the end portion and the central portion of the laminated body.

  For example, as shown in FIG. 8A, the shape of the end portion of the laminated body may be a hexagonal shape when the laminated body 10 ′ is observed from the upper surface of the application surface of the resist layer 12. When the cross-sectional shape of the laminate 10 ′ is observed as shown in FIG. 8B, the end y of the laminate has an inclination with respect to the surface of the central portion x of the laminate. And the like.

2. Drawing Step The drawing step in the present invention is a step of patterning the resist layer by drawing the resist layer using an electron beam and then developing the resist layer.

  Regarding the pattern shape drawn on the resist layer, the drawing portion in the diamond tool manufactured by the manufacturing method of the present invention has a plurality of fine recesses formed in the stripe shape described in the section of “A. Diamond tool” described above. The shape is not particularly limited as long as the shape can be made of.

  Since the electron beam drawing apparatus used in this step can be the same as a general one, description thereof is omitted here.

  The development processing method used in this step is not particularly limited as long as the resist layer can be developed into a desired parallel linear pattern, and examples thereof include a method using a developer. it can. As the developer, a general developer can be used, and is appropriately selected according to the type of the photosensitive resin layer.

3. Metal Layer Removal Step The metal layer removal step in the present invention is a step of removing the metal layer in a pattern by performing an etching process on the metal layer exposed by patterning the resist layer.

  The etching method used in this step is not particularly limited as long as it is a method capable of removing the metal layer exposed by patterning the resist layer in a desired pattern, and a general dry etching method. Alternatively, any of wet etching methods can be used.

  In this step, the metal layer that is patterned and remains on the surface of the diamond substrate has a function of protecting the drawing part of the diamond bit that is finally produced.

4). Fine recessed portion forming step In the fine recessed portion forming step of the present invention, the diamond substrate exposed by removing the metal layer is subjected to an oxygen plasma etching process, whereby the plurality of striped fine recessed portions are formed on the surface of the diamond substrate. Is a step of forming.

The oxygen plasma etching process used in this step is performed by ionizing and radicalizing a gas containing oxygen by plasma. The type of gas used in the oxygen plasma etching process in this step is not particularly limited as long as it contains oxygen gas. In addition to oxygen gas, for example, fluorine-containing gas such as CF ₄ gas, NF ₃ gas, SF ₆ gas, etc. You may use the mixed gas which mixed gas. Further, the mixing ratio of each gas in the case of using a mixed gas can be the same as that used in a general oxygen plasma etching process, and thus the description thereof is omitted here.

  The pressure during plasma etching is preferably, for example, 300 mTorr or less, and more preferably in the range of 100 mTorr to 250 mTorr.

5. Other Steps The method for producing the diamond bite of the present invention is not particularly limited as long as it is a production method having the above-described resist layer forming step, drawing step, metal removing step, and fine recess forming step, and the necessary steps. Can be appropriately selected and used.
Examples of such processes include a polishing process performed to shape the shape of the diamond tool, a cleaning / drying process for cleaning and drying the diamond tool, a peeling process for removing the resist layer remaining on the surface of the diamond substrate, and the like. Can be mentioned.

6). Diamond Bit The diamond bit manufactured by the manufacturing method of the present invention has been described in the above-mentioned section “A. Diamond Bit”, and the description thereof is omitted here.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

DESCRIPTION OF SYMBOLS 1 ... Diamond base | substrate 1 '... Convex part 10 ... Diamond bite 10' ... Laminated body 11 ... Metal layer 12 ... Resist layer 13 ... Electron beam 14 ... Oxygen plasma 2 ... Drawing part 21 ... Fine recessed part

Claims (2)

A diamond bite having a drawing portion composed of a plurality of fine concave portions formed in a stripe shape on the convex portion of the diamond base surface,
The inner surface of the plurality of fine recesses of the drawing portion is composed of diamond having crystallinity,
The convex portion is Ri corners der of adjacent two planes,
The diamond cutting tool has an alignment mark on the diamond base .   The diamond cutting tool according to claim 1, wherein the diamond cutting tool has a hexagonal shape in plan view.

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