CA2251585A1 - A magnetic relay system and method capable of microfabrication production - Google Patents

A magnetic relay system and method capable of microfabrication production Download PDF

Info

Publication number
CA2251585A1
CA2251585A1 CA002251585A CA2251585A CA2251585A1 CA 2251585 A1 CA2251585 A1 CA 2251585A1 CA 002251585 A CA002251585 A CA 002251585A CA 2251585 A CA2251585 A CA 2251585A CA 2251585 A1 CA2251585 A1 CA 2251585A1
Authority
CA
Canada
Prior art keywords
magnetic
electromagnet
movable plate
contacts
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002251585A
Other languages
English (en)
French (fr)
Inventor
Mark G. Allen
William P. Taylor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Georgia Tech Research Corp
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2251585A1 publication Critical patent/CA2251585A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/22—Polarised relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Electromagnets (AREA)
CA002251585A 1996-04-12 1996-10-30 A magnetic relay system and method capable of microfabrication production Abandoned CA2251585A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US1542296P 1996-04-12 1996-04-12
US08/723,300 US5847631A (en) 1995-10-10 1996-09-30 Magnetic relay system and method capable of microfabrication production
US08/723,300 1996-09-30
US60/015,422 1996-09-30

Publications (1)

Publication Number Publication Date
CA2251585A1 true CA2251585A1 (en) 1997-10-23

Family

ID=26687361

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002251585A Abandoned CA2251585A1 (en) 1996-04-12 1996-10-30 A magnetic relay system and method capable of microfabrication production

Country Status (6)

Country Link
US (1) US5847631A (ko)
EP (1) EP0892981A4 (ko)
JP (1) JP2000508822A (ko)
KR (1) KR100298254B1 (ko)
CA (1) CA2251585A1 (ko)
WO (1) WO1997039468A1 (ko)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US6281560B1 (en) * 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
DE19730715C1 (de) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
ES2189463T3 (es) * 1998-06-04 2003-07-01 Cavendish Kinetics Ltd Elemento micromecanico.
WO1999063316A1 (en) 1998-06-05 1999-12-09 Georgia Tech Research Corporation Robust substrate-based micromachining of sensors and actuators
WO2000042636A2 (en) * 1999-01-12 2000-07-20 Teledyne Technologies Incorporated Micromachined device and method of forming the micromachined device
US6373356B1 (en) 1999-05-21 2002-04-16 Interscience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
US6469602B2 (en) 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
US6496612B1 (en) 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US7027682B2 (en) 1999-09-23 2006-04-11 Arizona State University Optical MEMS switching array with embedded beam-confining channels and method of operating same
AU2573901A (en) * 1999-11-12 2001-06-06 Trustees Of The University Of Pennsylvania, The Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology
AU2001253609A1 (en) * 2000-04-18 2001-10-30 Standard Mems, Inc. A micro relay
ES2263639T3 (es) * 2000-07-11 2006-12-16 Arizona State University Matriz de interconmutacion optica mems con canales integrados de confinamiento de haces y metodos operativos de la misma.
US6510058B1 (en) * 2000-07-14 2003-01-21 Sensormatic Electronics Corporation Printed circuit board configuration having reduced EMC/EMI interference in electromechanical relay circuits
DE10040867A1 (de) 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
US6587021B1 (en) 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
JP2004533710A (ja) * 2001-01-18 2004-11-04 アリゾナ ステイト ユニバーシティ 永久磁石のアライメント要件が緩和されたマイクロ磁気ラッチスイッチ
FR2824417B1 (fr) 2001-05-03 2004-05-14 Commissariat Energie Atomique Actionneur magnetique bistable
US6894592B2 (en) 2001-05-18 2005-05-17 Magfusion, Inc. Micromagnetic latching switch packaging
US20020196110A1 (en) * 2001-05-29 2002-12-26 Microlab, Inc. Reconfigurable power transistor using latching micromagnetic switches
FR2826504B1 (fr) * 2001-06-25 2003-09-12 Commissariat Energie Atomique Actionneur magnetique a temps de reponse reduit
JP2005503659A (ja) * 2001-09-17 2005-02-03 スタフォード，ジョン マイクロ磁気ラッチ・リレーのパッケージおよびパッケージの方法
US20030169135A1 (en) * 2001-12-21 2003-09-11 Jun Shen Latching micro-magnetic switch array
US6836194B2 (en) * 2001-12-21 2004-12-28 Magfusion, Inc. Components implemented using latching micro-magnetic switches
US20030179057A1 (en) * 2002-01-08 2003-09-25 Jun Shen Packaging of a micro-magnetic switch with a patterned permanent magnet
US20030137374A1 (en) * 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US20030179058A1 (en) * 2002-01-18 2003-09-25 Microlab, Inc. System and method for routing input signals using single pole single throw and single pole double throw latching micro-magnetic switches
US20030222740A1 (en) * 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
DE10214523B4 (de) * 2002-04-02 2007-10-11 Infineon Technologies Ag Mikromechanisches Bauelement mit magnetischer Aktuation
FR2839194A1 (fr) * 2002-04-25 2003-10-31 Memscap Microcommutateur destine a etre employe dans un circuit radiofrequence
US6894823B2 (en) * 2002-04-26 2005-05-17 Corning Intellisense Llc Magnetically actuated microelectromechanical devices and method of manufacture
CN100565740C (zh) * 2002-09-18 2009-12-02 麦克弗森公司 层压机电系统
US20040121505A1 (en) 2002-09-30 2004-06-24 Magfusion, Inc. Method for fabricating a gold contact on a microswitch
US7474923B2 (en) * 2003-04-29 2009-01-06 Medtronic, Inc. Micro electromechanical switches and medical devices incorporating same
US7202765B2 (en) * 2003-05-14 2007-04-10 Schneider Electric Industries Sas Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
US7215229B2 (en) * 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
US20050083157A1 (en) 2003-10-15 2005-04-21 Magfusion, Inc. Micro magnetic latching switches and methods of making same
US7183884B2 (en) * 2003-10-15 2007-02-27 Schneider Electric Industries Sas Micro magnetic non-latching switches and methods of making same
US7342473B2 (en) * 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
DE102005025403A1 (de) * 2004-10-29 2006-05-18 Rohde & Schwarz Gmbh & Co Kg Elektrische Schaltvorrichtung mit magnetischen Verstellelementen
US7482899B2 (en) * 2005-10-02 2009-01-27 Jun Shen Electromechanical latching relay and method of operating same
US8068002B2 (en) * 2008-04-22 2011-11-29 Magvention (Suzhou), Ltd. Coupled electromechanical relay and method of operating same
EP2251887B1 (en) * 2009-05-15 2016-03-16 Abb Ag Electromagnetic trip device
US8159320B2 (en) * 2009-09-14 2012-04-17 Meichun Ruan Latching micro-magnetic relay and method of operating same
CN102693874A (zh) * 2011-03-24 2012-09-26 苏州磁明科技有限公司 双刀双掷机电式继电器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1003822B (zh) * 1984-10-09 1989-04-05 三菱矿业水泥株式会社 电磁执行机构
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
JP2714736B2 (ja) * 1992-06-01 1998-02-16 シャープ株式会社 マイクロリレー
US5374792A (en) * 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
FR2705693B1 (fr) * 1993-05-24 1995-07-28 Neuchatel Universite Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.
US5531018A (en) * 1993-12-20 1996-07-02 General Electric Company Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby
DE4422972A1 (de) * 1994-06-30 1996-01-04 Bosch Gmbh Robert Mikroventil mit elektromagnetischem Antrieb
US5475353A (en) * 1994-09-30 1995-12-12 General Electric Company Micromachined electromagnetic switch with fixed on and off positions using three magnets
US5550090A (en) * 1995-09-05 1996-08-27 Motorola Inc. Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures

Also Published As

Publication number Publication date
US5847631A (en) 1998-12-08
KR20000010521A (ko) 2000-02-15
WO1997039468A1 (en) 1997-10-23
EP0892981A1 (en) 1999-01-27
KR100298254B1 (ko) 2001-10-26
JP2000508822A (ja) 2000-07-11
EP0892981A4 (en) 2000-04-12

Similar Documents

Publication Publication Date Title
US5847631A (en) Magnetic relay system and method capable of microfabrication production
US6377155B1 (en) Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5808384A (en) Single coil bistable, bidirectional micromechanical actuator
US6366186B1 (en) Mems magnetically actuated switches and associated switching arrays
Cugat et al. Magnetic micro-actuators and systems (MAGMAS)
US6094116A (en) Micro-electromechanical relays
US7342473B2 (en) Method and apparatus for reducing cantilever stress in magnetically actuated relays
US7642885B2 (en) Electromechanical latching relay and method of operating same
US7215229B2 (en) Laminated relays with multiple flexible contacts
US8665041B2 (en) Integrated microminiature relay
Taylor et al. Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices
US20120306602A1 (en) Miniaturized switch device
DE602004004898T2 (de) Microelektromechanischer schalter mit rotoren die sich in einer aussparung in einem substrat drehen, und herstellungs- und anwendungsverfahren
EP0968530A1 (en) Micro-electromechanical relays
EP2073237A2 (en) MEMS microswitch having a dual actuator and shared gate
US6281560B1 (en) Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US6920681B2 (en) Method of preparing an electromagnetic actuator using a substrate
US7266867B2 (en) Method for laminating electro-mechanical structures
EP1081722A2 (en) Electromagnetic actuator, its manufacturing method, and optical scanner using the same electromagnetic actuator
US7049915B2 (en) Bistable magnetic actuator
US20140077906A1 (en) Microswitch having an integrated electromagnetic coil
US9284183B2 (en) Method for forming normally closed micromechanical device comprising a laterally movable element
US20020036555A1 (en) Bi-stable microswitch including magnetic latch
Tai Micromotors
Cestarollo et al. Harnessing Magnetic-Field Driven Actuation for Microscale Motion in MEMS-Inspired Device

Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued