CA2097942C - Carbon and ceramic-containing layers for use in sintering of silicon nitride article - Google Patents
Carbon and ceramic-containing layers for use in sintering of silicon nitride articleInfo
- Publication number
- CA2097942C CA2097942C CA002097942A CA2097942A CA2097942C CA 2097942 C CA2097942 C CA 2097942C CA 002097942 A CA002097942 A CA 002097942A CA 2097942 A CA2097942 A CA 2097942A CA 2097942 C CA2097942 C CA 2097942C
- Authority
- CA
- Canada
- Prior art keywords
- recited
- article
- particulate material
- weight percent
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 46
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 29
- 238000005245 sintering Methods 0.000 title claims abstract description 24
- 239000000919 ceramic Substances 0.000 title claims abstract description 11
- 239000011236 particulate material Substances 0.000 claims abstract description 48
- 239000000203 mixture Substances 0.000 claims abstract description 16
- 150000004767 nitrides Chemical class 0.000 claims abstract description 10
- 150000001875 compounds Chemical class 0.000 claims abstract description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 32
- 239000006229 carbon black Substances 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 description 34
- 239000000047 product Substances 0.000 description 19
- -1 sintering aids Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000002485 combustion reaction Methods 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 239000000376 reactant Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229920006187 aquazol Polymers 0.000 description 2
- 239000012861 aquazol Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000010079 rubber tapping Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229920004934 Dacron® Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 241001455351 Graphita Species 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 235000011449 Rosa Nutrition 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 229910026551 ZrC Inorganic materials 0.000 description 1
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009838 combustion analysis Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000011363 dried mixture Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003947 neutron activation analysis Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/916,318 | 1992-07-17 | ||
| US07/916,318 US5352395A (en) | 1992-07-17 | 1992-07-17 | Carbon and ceramic-containing layers for use in sintering of silicon nitride article |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2097942A1 CA2097942A1 (en) | 1994-01-18 |
| CA2097942C true CA2097942C (en) | 1997-06-10 |
Family
ID=25437058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002097942A Expired - Fee Related CA2097942C (en) | 1992-07-17 | 1993-06-28 | Carbon and ceramic-containing layers for use in sintering of silicon nitride article |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5352395A (en:Method) |
| EP (1) | EP0583620B1 (en:Method) |
| JP (1) | JPH06166572A (en:Method) |
| KR (1) | KR940005517A (en:Method) |
| CA (1) | CA2097942C (en:Method) |
| DE (1) | DE69310284T2 (en:Method) |
| DK (1) | DK0583620T3 (en:Method) |
| NO (1) | NO306339B1 (en:Method) |
| TW (1) | TW273539B (en:Method) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3109433B2 (ja) | 1996-03-22 | 2000-11-13 | 株式会社村田製作所 | セラミック成形体の焼成方法および焼成装置 |
| KR100235203B1 (ko) * | 1997-03-15 | 1999-12-15 | 배문한 | 표면이 개질된 사이알론 복합체 및 그것의 제조 방법 |
| DE19904523B4 (de) † | 1999-02-04 | 2012-03-15 | 3M Espe Ag | Verfahren zum dimensionstreuen Sintern von Keramik und keramisches Zahnersatzteil |
| US6771019B1 (en) | 1999-05-14 | 2004-08-03 | Ifire Technology, Inc. | Electroluminescent laminate with patterned phosphor structure and thick film dielectric with improved dielectric properties |
| EP2792985B1 (de) | 2013-04-18 | 2014-11-26 | Amann Girrbach AG | Sintervorrichtung |
| EP2792332B1 (de) * | 2013-04-18 | 2015-03-11 | Amann Girrbach AG | Anordnung mit zumindest einem zu sinternden Werkstück |
| CN107076544B (zh) * | 2014-06-17 | 2020-09-15 | 贺利氏石英北美有限责任公司 | 用于测量透明筒状制品的设备及方法 |
| DK3127507T3 (en) | 2015-08-03 | 2017-07-31 | Amann Girrbach Ag | Sintreemne |
| CN115715278A (zh) * | 2020-06-30 | 2023-02-24 | 株式会社德山 | 氮化硅烧结体的连续制造方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS523647B2 (en:Method) * | 1972-10-24 | 1977-01-29 | ||
| US3992497A (en) * | 1973-05-18 | 1976-11-16 | Westinghouse Electric Corporation | Pressureless sintering silicon nitride powders |
| US3953221A (en) * | 1975-04-22 | 1976-04-27 | The United States Of America As Represented By The Secretary Of The Navy | Fully dense ceramic article and process employing magnesium oxide as a sintering aid |
| GB2010913B (en) * | 1977-12-23 | 1982-06-23 | Fiat Spa | Process for sintering silicon nitride compacts |
| US4209478A (en) * | 1978-08-16 | 1980-06-24 | Rockwell International Corporation | Method of sintering ceramics |
| US4379110A (en) * | 1979-08-09 | 1983-04-05 | General Electric Company | Sintering of silicon nitride to high density |
| JPS5673604A (en) * | 1979-11-22 | 1981-06-18 | Toshiba Corp | Manufacture of silicon nitride |
| JPS5860676A (ja) * | 1981-09-30 | 1983-04-11 | 日本特殊陶業株式会社 | 窒化珪素焼結体及びその製造方法 |
| US4377542A (en) * | 1981-12-21 | 1983-03-22 | Ford Motor Company | Method of forming a densified silicon nitride article |
| US4383958A (en) * | 1981-12-21 | 1983-05-17 | Gte Laboratories Incorporated | Method of producing dense silicon nitride ceramic articles having controlled surface layer composition |
| US4485182A (en) * | 1982-07-28 | 1984-11-27 | Ibiden Kabushiki Kaisha | Powder composition for producing sintered ceramic |
| JPS59102872A (ja) * | 1982-12-06 | 1984-06-14 | 日本特殊陶業株式会社 | 炭化珪素．黒鉛複合焼結体の製造方法 |
| DE3460366D1 (en) * | 1983-02-26 | 1986-09-04 | Lucas Cookson Syalon Limited | Silicon aluminium oxynitride ceramic product and method of production |
| DE3323509C2 (de) * | 1983-06-30 | 1985-05-02 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | Verfahren zur Herstellung von Keramikformteilen |
| US4640711A (en) * | 1983-09-26 | 1987-02-03 | Metals Ltd. | Method of object consolidation employing graphite particulate |
| JPS60186475A (ja) * | 1984-03-06 | 1985-09-21 | 京セラ株式会社 | 窒化珪素質焼結体及びその製造方法 |
| JPS60195063A (ja) * | 1984-03-16 | 1985-10-03 | 日本碍子株式会社 | セラミツクスの製法 |
| US4603116A (en) * | 1984-04-09 | 1986-07-29 | Gte Laboratories Incorporated | Silicon nitride based ceramics and method |
| JPS62260774A (ja) * | 1986-05-01 | 1987-11-13 | 新日本製鐵株式会社 | 炭化珪素系複合セラミックス焼結体 |
| JPH02160672A (ja) * | 1988-12-15 | 1990-06-20 | Yazaki Corp | セラミック体の製造方法 |
| US5176893A (en) * | 1989-10-02 | 1993-01-05 | Phillips Petroleum Company | Silicon nitride products and method for their production |
| US5178844A (en) * | 1990-04-03 | 1993-01-12 | Phillips Petroleum Company | Method and apparatus for producing nitride products |
| JPH0459660A (ja) * | 1990-06-29 | 1992-02-26 | Fujitsu Ltd | 窒化硅素セラミックスの製造方法 |
-
1992
- 1992-07-17 US US07/916,318 patent/US5352395A/en not_active Expired - Fee Related
-
1993
- 1993-06-28 CA CA002097942A patent/CA2097942C/en not_active Expired - Fee Related
- 1993-07-05 TW TW082105353A patent/TW273539B/zh active
- 1993-07-14 KR KR1019930013256A patent/KR940005517A/ko not_active Withdrawn
- 1993-07-15 EP EP93111371A patent/EP0583620B1/en not_active Expired - Lifetime
- 1993-07-15 DK DK93111371.6T patent/DK0583620T3/da active
- 1993-07-15 DE DE69310284T patent/DE69310284T2/de not_active Expired - Fee Related
- 1993-07-15 JP JP5175480A patent/JPH06166572A/ja active Pending
- 1993-07-16 NO NO932582A patent/NO306339B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| NO932582D0 (no) | 1993-07-16 |
| DE69310284D1 (de) | 1997-06-05 |
| US5352395A (en) | 1994-10-04 |
| EP0583620A1 (en) | 1994-02-23 |
| KR940005517A (ko) | 1994-03-21 |
| DK0583620T3 (da) | 1997-10-20 |
| TW273539B (en:Method) | 1996-04-01 |
| NO932582L (no) | 1994-01-18 |
| JPH06166572A (ja) | 1994-06-14 |
| CA2097942A1 (en) | 1994-01-18 |
| NO306339B1 (no) | 1999-10-25 |
| DE69310284T2 (de) | 1997-08-14 |
| EP0583620B1 (en) | 1997-05-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed | ||
| MKLA | Lapsed |
Effective date: 20010628 |