CA2081135A1 - Methode de precipitation d'une resine organique contenue dans une solution alcaline - Google Patents

Methode de precipitation d'une resine organique contenue dans une solution alcaline

Info

Publication number
CA2081135A1
CA2081135A1 CA2081135A CA2081135A CA2081135A1 CA 2081135 A1 CA2081135 A1 CA 2081135A1 CA 2081135 A CA2081135 A CA 2081135A CA 2081135 A CA2081135 A CA 2081135A CA 2081135 A1 CA2081135 A1 CA 2081135A1
Authority
CA
Canada
Prior art keywords
precipitating
gel
alkaline solution
organic resin
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2081135A
Other languages
English (en)
Other versions
CA2081135C (fr
Inventor
Gerald A. Krulik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Chemicals LLC
Original Assignee
Morton International LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Morton International LLC filed Critical Morton International LLC
Publication of CA2081135A1 publication Critical patent/CA2081135A1/fr
Application granted granted Critical
Publication of CA2081135C publication Critical patent/CA2081135C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/902—Materials removed
    • Y10S210/908—Organic

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
CA002081135A 1991-11-25 1992-10-22 Methode de precipitation d'une resine organique contenue dans une solution alcaline Expired - Fee Related CA2081135C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/797,612 1991-11-25
US07/797,612 US5252225A (en) 1991-11-25 1991-11-25 Method for precipitating an organic resin from an alkaline solution thereof

Publications (2)

Publication Number Publication Date
CA2081135A1 true CA2081135A1 (fr) 1993-05-26
CA2081135C CA2081135C (fr) 1997-08-12

Family

ID=25171320

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002081135A Expired - Fee Related CA2081135C (fr) 1991-11-25 1992-10-22 Methode de precipitation d'une resine organique contenue dans une solution alcaline

Country Status (7)

Country Link
US (1) US5252225A (fr)
EP (1) EP0545537B1 (fr)
CA (1) CA2081135C (fr)
DE (1) DE69203082T2 (fr)
DK (1) DK0545537T3 (fr)
ES (1) ES2076695T3 (fr)
MX (1) MX9206369A (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0195297B1 (fr) * 1985-03-06 1991-05-02 Karl Clemens Käuffer Procédé et dispositif pour obtenir des circuits fermés dans la purification d'eau et d'eau usée
US4760014A (en) * 1986-08-01 1988-07-26 Great Lakes Chemical Corporation Method for treating mixtures containing photopolymeric resin and compositions therefor
US4857206A (en) * 1987-11-02 1989-08-15 Tmc Corp. Method for treating, spent dryfilm stripping and developing solutions
US4999114A (en) * 1987-11-02 1991-03-12 Morton International Method of treating spent dryfilm stripping and developing solutions with a chemical mixture
US5182029A (en) * 1991-11-26 1993-01-26 International Business Machines Corporation Aqueous photoresist waste treatment by acid/cupric chloride precipitation

Also Published As

Publication number Publication date
EP0545537A1 (fr) 1993-06-09
MX9206369A (es) 1993-05-01
CA2081135C (fr) 1997-08-12
US5252225A (en) 1993-10-12
DK0545537T3 (da) 1995-11-06
ES2076695T3 (es) 1995-11-01
DE69203082D1 (de) 1995-07-27
DE69203082T2 (de) 1995-11-09
EP0545537B1 (fr) 1995-06-21

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