CA1302947C - Copper-chromium-polyimide composite - Google Patents
Copper-chromium-polyimide compositeInfo
- Publication number
- CA1302947C CA1302947C CA000514849A CA514849A CA1302947C CA 1302947 C CA1302947 C CA 1302947C CA 000514849 A CA000514849 A CA 000514849A CA 514849 A CA514849 A CA 514849A CA 1302947 C CA1302947 C CA 1302947C
- Authority
- CA
- Canada
- Prior art keywords
- layer
- copper
- deposited
- polyimide
- chromium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001721 polyimide Polymers 0.000 title claims abstract description 63
- 239000004642 Polyimide Substances 0.000 title claims abstract description 47
- 239000002131 composite material Substances 0.000 title description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 82
- 229910052802 copper Inorganic materials 0.000 claims abstract description 79
- 239000010949 copper Substances 0.000 claims abstract description 79
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 38
- 239000011651 chromium Substances 0.000 claims abstract description 38
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000010931 gold Substances 0.000 claims abstract description 26
- 229910052737 gold Inorganic materials 0.000 claims abstract description 26
- 238000007747 plating Methods 0.000 claims abstract description 22
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 239000004020 conductor Substances 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 43
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 12
- 230000032798 delamination Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 239000002659 electrodeposit Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- -1 alkaline etch Chemical compound 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
- C25D5/56—Electroplating of non-metallic surfaces of plastics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/145—Organic substrates, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0393—Flexible materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Wire Bonding (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Physical Vapour Deposition (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US77591885A | 1985-09-13 | 1985-09-13 | |
| US06/775,918 | 1985-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1302947C true CA1302947C (en) | 1992-06-09 |
Family
ID=25105948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000514849A Expired - Lifetime CA1302947C (en) | 1985-09-13 | 1986-07-29 | Copper-chromium-polyimide composite |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP0215557B1 (ko) |
| JP (1) | JPS6262551A (ko) |
| KR (1) | KR900000865B1 (ko) |
| CA (1) | CA1302947C (ko) |
| DE (1) | DE3687250T2 (ko) |
| HK (1) | HK118693A (ko) |
| MY (1) | MY101626A (ko) |
| SG (1) | SG94193G (ko) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486527A (en) * | 1987-09-29 | 1989-03-31 | Hitachi Cable | Ccb tape carrier |
| JPH069308B2 (ja) * | 1988-06-22 | 1994-02-02 | 東洋メタライジング株式会社 | フレキシブルプリント配線用基板 |
| DE3907004A1 (de) * | 1989-03-04 | 1990-09-06 | Contraves Ag | Verfahren zum herstellen von duennschichtschaltungen |
| EP0386458A1 (de) * | 1989-03-04 | 1990-09-12 | Oerlikon-Contraves AG | Verfahren zum Herstellen von Dünnschichtschaltungen mit Zinnstrukturen |
| US4962004A (en) * | 1989-09-13 | 1990-10-09 | Digital Equipment Corporation | Method of inhibiting electrochemical reduction of polyimide during electroplating and articles formed thereby |
| JP2931657B2 (ja) * | 1989-09-22 | 1999-08-09 | ミネソタ マイニング アンド マニユフアクチユアリング カンパニー | 電気活性重合体の電気メッキ法 |
| JP2775647B2 (ja) * | 1989-11-17 | 1998-07-16 | 宇部興産株式会社 | メタライズドポリイミドフィルムの製法 |
| US5038195A (en) * | 1990-02-09 | 1991-08-06 | Ibm | Composition and coating to prevent current induced electrochemical dendrite formation between conductors on dielectric substrate |
| WO1992002040A1 (en) * | 1990-07-25 | 1992-02-06 | Dsm N.V. | Package for incorporating an integrated circuit and a process for the production of the package |
| US5176811A (en) * | 1991-02-01 | 1993-01-05 | International Business Machines Corporation | Gold plating bath additives for copper circuitization on polyimide printed circuit boards |
| US5461203A (en) * | 1991-05-06 | 1995-10-24 | International Business Machines Corporation | Electronic package including lower water content polyimide film |
| CA2051604A1 (fr) * | 1991-09-17 | 1993-03-18 | Guy St-Amant | Feuillards metalliques supportes sur plastique obtenu par metallisation-placage |
| CA2051611C (fr) * | 1991-09-17 | 1996-01-23 | Michel Gauthier | Procede de preparation d'ensembles collecteurs-electrodes pour generateurs de films minces, ensembles collecteurs- electrodes et generateurs obtenus |
| JP2765673B2 (ja) * | 1992-06-04 | 1998-06-18 | インターナショナル・ビジネス・マシーンズ・コーポレイション | メタライゼーション層及びその形成方法 |
| US5427983A (en) | 1992-12-29 | 1995-06-27 | International Business Machines Corporation | Process for corrosion free multi-layer metal conductors |
| US5543222A (en) * | 1994-04-29 | 1996-08-06 | E. I. Du Pont De Nemours And Company | Metallized polyimide film containing a hydrocarbyl tin compound |
| JPH08330728A (ja) * | 1995-05-26 | 1996-12-13 | Toyo Metaraijingu Kk | フレキシブルプリント配線用基板 |
| US6424630B1 (en) | 1998-10-30 | 2002-07-23 | Advanced Micro Devices, Inc. | Apparatus and method for calibrating a home networking station receiving network signals on a telephone line medium |
| JP2003518743A (ja) * | 1999-12-21 | 2003-06-10 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 信頼性のあるフリップチップ接続のためのはんだによる有機パッケージ |
| CA2327801A1 (en) * | 2000-03-21 | 2001-09-21 | Rocky L. Hilburn | Copper on polymer component having improved adhesion |
| EP1332238B1 (de) | 2000-10-09 | 2009-04-22 | Hueck Folien Gesellschaft m.b.H. | Metallisierte folie und verfahren zu deren herstellung sowie deren anwendung |
| DE102004054597B4 (de) * | 2004-11-11 | 2019-07-25 | Infineon Technologies Ag | Elektronisches Bauteil und Verfahren zum Herstellen eines elektronischen Bauteils |
| SG126776A1 (en) * | 2005-04-08 | 2006-11-29 | 3M Innovative Properties Co | Flexible circuit substrate |
| KR100796463B1 (ko) * | 2005-11-16 | 2008-01-23 | 마이크로코즘 테크놀리지 씨오.,엘티디 | 가요성 인쇄 회로 및 그의 제조 방법 |
| WO2008141481A1 (fr) | 2007-05-24 | 2008-11-27 | Princo Corp. | Structure et procédé de fabrication d'un câblage métallique sur une carte multicouches |
| TWI354523B (en) | 2007-05-25 | 2011-12-11 | Princo Corp | Method for manufacturing metal lines in multi-laye |
| TWI411373B (zh) * | 2007-05-25 | 2013-10-01 | Princo Corp | 多層基板金屬線路結構 |
| US8815333B2 (en) | 2007-12-05 | 2014-08-26 | Princo Middle East Fze | Manufacturing method of metal structure in multi-layer substrate |
| CN114188543A (zh) * | 2021-11-15 | 2022-03-15 | 深圳市宝明科技股份有限公司 | 一种复合导电铜箔及其制备方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3729814A (en) | 1967-04-04 | 1973-05-01 | Gen Electric | Method for making a composite |
| US3781596A (en) | 1972-07-07 | 1973-12-25 | R Galli | Semiconductor chip carriers and strips thereof |
| US3981691A (en) | 1974-07-01 | 1976-09-21 | Minnesota Mining And Manufacturing Company | Metal-clad dielectric sheeting having an improved bond between the metal and dielectric layers |
| US4444848A (en) * | 1982-01-04 | 1984-04-24 | Western Electric Co., Inc. | Adherent metal coatings on rubber-modified epoxy resin surfaces |
-
1986
- 1986-07-29 CA CA000514849A patent/CA1302947C/en not_active Expired - Lifetime
- 1986-07-30 EP EP86305856A patent/EP0215557B1/en not_active Expired - Lifetime
- 1986-07-30 DE DE8686305856T patent/DE3687250T2/de not_active Expired - Lifetime
- 1986-08-11 JP JP61187008A patent/JPS6262551A/ja active Granted
- 1986-09-12 KR KR1019860007665A patent/KR900000865B1/ko not_active IP Right Cessation
-
1987
- 1987-01-23 MY MYPI87000060A patent/MY101626A/en unknown
-
1993
- 1993-08-11 SG SG94193A patent/SG94193G/en unknown
- 1993-11-04 HK HK1186/93A patent/HK118693A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3687250D1 (de) | 1993-01-21 |
| KR870002941A (ko) | 1987-04-14 |
| DE3687250T2 (de) | 1993-05-27 |
| EP0215557A3 (en) | 1988-07-20 |
| MY101626A (en) | 1991-12-31 |
| JPS6262551A (ja) | 1987-03-19 |
| HK118693A (en) | 1993-11-12 |
| KR900000865B1 (ko) | 1990-02-17 |
| JPH0255943B2 (ko) | 1990-11-28 |
| EP0215557A2 (en) | 1987-03-25 |
| EP0215557B1 (en) | 1992-12-09 |
| SG94193G (en) | 1994-02-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |