CA1253196A - Systeme de pompage pour enregistreur a faisceau de particules chargees - Google Patents

Systeme de pompage pour enregistreur a faisceau de particules chargees

Info

Publication number
CA1253196A
CA1253196A CA000506976A CA506976A CA1253196A CA 1253196 A CA1253196 A CA 1253196A CA 000506976 A CA000506976 A CA 000506976A CA 506976 A CA506976 A CA 506976A CA 1253196 A CA1253196 A CA 1253196A
Authority
CA
Canada
Prior art keywords
vacuum
pump
stage
electron
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000506976A
Other languages
English (en)
Inventor
Andrew A. Tarnowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Image Graphics Inc
Original Assignee
Image Graphics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Image Graphics Inc filed Critical Image Graphics Inc
Application granted granted Critical
Publication of CA1253196A publication Critical patent/CA1253196A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/10—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using electron beam; Record carriers therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
    • G01D15/14—Optical recording elements; Recording elements using X-or nuclear radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
CA000506976A 1985-04-25 1986-04-17 Systeme de pompage pour enregistreur a faisceau de particules chargees Expired CA1253196A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/727,340 US4651171A (en) 1985-04-25 1985-04-25 Vacuum system for a charged particle beam recording system
US727,340 1985-04-25

Publications (1)

Publication Number Publication Date
CA1253196A true CA1253196A (fr) 1989-04-25

Family

ID=24922277

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000506976A Expired CA1253196A (fr) 1985-04-25 1986-04-17 Systeme de pompage pour enregistreur a faisceau de particules chargees

Country Status (4)

Country Link
US (1) US4651171A (fr)
EP (1) EP0199575B1 (fr)
CA (1) CA1253196A (fr)
DE (1) DE3665378D1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216219A (en) * 1991-05-10 1993-06-01 Pioneer Electronic Corporation Disk manufacturing apparatus
DE10032607B4 (de) 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
CN104703377A (zh) * 2015-03-16 2015-06-10 武汉久瑞电气有限公司 工业辐照电子加速器抽真空装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3409906A (en) * 1965-12-20 1968-11-05 Minnesota Mining & Mfg Electron beam recorder with vacuum seal system
US3451637A (en) * 1967-10-30 1969-06-24 Ampex Differential pressure web transport
US3504371A (en) * 1967-12-18 1970-03-31 Minnesota Mining & Mfg Evacuatable chamber seal
DE2011549A1 (de) * 1970-03-06 1971-09-30 Siemens Ag Vakuumanlage, insbesondere fur Korpuskularstrahlgerate
JPS5812700B2 (ja) * 1977-10-31 1983-03-09 日本電子株式会社 電子線装置
JPS54124966A (en) * 1978-03-23 1979-09-28 Jeol Ltd Exhasut system of particle-beam equipment
US4300147A (en) * 1979-03-26 1981-11-10 Image Graphics, Inc. System for accurately tracing with a charged particle beam on film

Also Published As

Publication number Publication date
DE3665378D1 (en) 1989-10-05
EP0199575A2 (fr) 1986-10-29
EP0199575B1 (fr) 1989-08-30
EP0199575A3 (en) 1987-01-28
US4651171A (en) 1987-03-17

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Legal Events

Date Code Title Description
MKEX Expiry