CA1237047A - Gas supplying apparatus - Google Patents
Gas supplying apparatusInfo
- Publication number
- CA1237047A CA1237047A CA000469057A CA469057A CA1237047A CA 1237047 A CA1237047 A CA 1237047A CA 000469057 A CA000469057 A CA 000469057A CA 469057 A CA469057 A CA 469057A CA 1237047 A CA1237047 A CA 1237047A
- Authority
- CA
- Canada
- Prior art keywords
- raw material
- main
- vessel
- liquid raw
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims abstract description 126
- 239000007788 liquid Substances 0.000 claims abstract description 109
- 239000007789 gas Substances 0.000 claims description 38
- 239000013307 optical fiber Substances 0.000 claims description 26
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 239000012159 carrier gas Substances 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 229910001873 dinitrogen Inorganic materials 0.000 description 8
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 241000003910 Baronia <angiosperm> Species 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/08—Bushings, e.g. construction, bushing reinforcement means; Spinnerettes; Nozzles; Nozzle plates
- C03B37/085—Feeding devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
- Y10T137/4245—Cleaning or steam sterilizing
- Y10T137/4252—Reverse fluid flow
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP226750/1983 | 1983-12-02 | ||
| JP58226750A JPS60122735A (ja) | 1983-12-02 | 1983-12-02 | 原料ガス供給装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1237047A true CA1237047A (en) | 1988-05-24 |
Family
ID=16850019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000469057A Expired CA1237047A (en) | 1983-12-02 | 1984-11-30 | Gas supplying apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4563312A (enExample) |
| EP (1) | EP0147663B1 (enExample) |
| JP (1) | JPS60122735A (enExample) |
| KR (1) | KR870001278B1 (enExample) |
| CA (1) | CA1237047A (enExample) |
| DE (1) | DE3465976D1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60244333A (ja) * | 1984-05-21 | 1985-12-04 | Sumitomo Electric Ind Ltd | 原料液補給装置 |
| US4859375A (en) * | 1986-12-29 | 1989-08-22 | Air Products And Chemicals, Inc. | Chemical refill system |
| JPH0824836B2 (ja) * | 1986-10-09 | 1996-03-13 | 東洋紡績株式会社 | 液体の連続供給装置 |
| DE3708967A1 (de) * | 1987-03-19 | 1988-10-06 | Merck Patent Gmbh | Vorrichtung zur erzeugung eines gasgemisches nach dem saettigungsverfahren |
| JP2554356B2 (ja) * | 1988-05-17 | 1996-11-13 | 住友電気工業株式会社 | ガラス原料供給方法及びガラス原料供給装置 |
| JP2846891B2 (ja) * | 1988-06-03 | 1999-01-13 | 東京エレクトロン株式会社 | 処理装置 |
| US4904419A (en) * | 1989-03-14 | 1990-02-27 | Reynolds Warren D | Process and apparatus for vapor transfer of very high purity liquids at high dilution |
| GB9206552D0 (en) * | 1992-03-26 | 1992-05-06 | Epichem Ltd | Bubblers |
| JPH0781965A (ja) * | 1993-07-22 | 1995-03-28 | Sumitomo Electric Ind Ltd | ガス生成装置並びに光導波路及び光ファイバ母材を製造する方法及び装置 |
| TW338174B (en) * | 1995-01-06 | 1998-08-11 | Tokyo Electron Co Ltd | Apparatus for supplying a treatment material |
| KR100524204B1 (ko) * | 1998-01-07 | 2006-01-27 | 동경 엘렉트론 주식회사 | 가스 처리장치 |
| DE502004012396D1 (de) | 2004-02-20 | 2011-05-26 | Cs Clean Systems Ag | Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers |
| US9914632B2 (en) * | 2014-08-22 | 2018-03-13 | Applied Materials, Inc. | Methods and apparatus for liquid chemical delivery |
| CN111153590B (zh) * | 2019-12-31 | 2022-03-25 | 江苏通鼎光棒有限公司 | 一种高精度的四氯化锗鼓泡装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2371188A (en) * | 1945-03-13 | Means fob clearing pipe systems | ||
| US2178559A (en) * | 1937-06-12 | 1939-11-07 | Beer Control Systems Inc | Fluid dispensing system |
| US2882539A (en) * | 1954-11-18 | 1959-04-21 | Walz Bruno | Tube cleaning mechanism |
| US3044466A (en) * | 1960-12-23 | 1962-07-17 | Gomco Surgical Mfg Corp | Valve and pump assembly for closing and irrigating fluid drainage tube in suction apparatus |
| US4276243A (en) * | 1978-12-08 | 1981-06-30 | Western Electric Company, Inc. | Vapor delivery control system and method |
| US4235829A (en) * | 1979-05-07 | 1980-11-25 | Western Electric Company, Inc. | Vapor delivery system and method of maintaining a constant level of liquid therein |
| US4313897A (en) * | 1980-01-30 | 1982-02-02 | Bruce Garrard | Gas and liquid admixing system |
-
1983
- 1983-12-02 JP JP58226750A patent/JPS60122735A/ja active Granted
-
1984
- 1984-11-30 DE DE8484114525T patent/DE3465976D1/de not_active Expired
- 1984-11-30 EP EP84114525A patent/EP0147663B1/en not_active Expired
- 1984-11-30 CA CA000469057A patent/CA1237047A/en not_active Expired
- 1984-12-01 KR KR1019840007594A patent/KR870001278B1/ko not_active Expired
- 1984-12-03 US US06/677,588 patent/US4563312A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0147663B1 (en) | 1987-09-09 |
| US4563312A (en) | 1986-01-07 |
| KR870001278B1 (ko) | 1987-06-30 |
| JPS6144824B2 (enExample) | 1986-10-04 |
| JPS60122735A (ja) | 1985-07-01 |
| DE3465976D1 (en) | 1987-10-15 |
| EP0147663A1 (en) | 1985-07-10 |
| KR850004449A (ko) | 1985-07-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |