CA1204044A - Growth of structures based on group iv semiconductor materials - Google Patents
Growth of structures based on group iv semiconductor materialsInfo
- Publication number
- CA1204044A CA1204044A CA000395191A CA395191A CA1204044A CA 1204044 A CA1204044 A CA 1204044A CA 000395191 A CA000395191 A CA 000395191A CA 395191 A CA395191 A CA 395191A CA 1204044 A CA1204044 A CA 1204044A
- Authority
- CA
- Canada
- Prior art keywords
- single crystal
- precursor
- substrate
- region
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title claims abstract description 76
- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 89
- 239000013078 crystal Substances 0.000 claims abstract description 78
- 239000002243 precursor Substances 0.000 claims abstract description 63
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 35
- 239000010703 silicon Substances 0.000 claims abstract description 35
- 239000011810 insulating material Substances 0.000 claims abstract description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 8
- 230000001902 propagating effect Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 55
- 230000008569 process Effects 0.000 claims description 25
- 239000002131 composite material Substances 0.000 claims description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- 229910021480 group 4 element Inorganic materials 0.000 claims description 3
- 230000000977 initiatory effect Effects 0.000 claims description 3
- 230000008093 supporting effect Effects 0.000 claims description 3
- 229910000676 Si alloy Inorganic materials 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000001939 inductive effect Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 46
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 239000012212 insulator Substances 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 12
- 239000007788 liquid Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 229920005591 polysilicon Polymers 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 238000003486 chemical etching Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000007670 refining Methods 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 e~g~ Substances 0.000 description 2
- 239000012705 liquid precursor Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000012686 silicon precursor Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/34—Single-crystal growth by zone-melting; Refining by zone-melting characterised by the seed, e.g. by its crystallographic orientation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
- C30B1/026—Solid phase epitaxial growth through a disordered intermediate layer
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23123881A | 1981-02-04 | 1981-02-04 | |
| US231,238 | 1981-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1204044A true CA1204044A (en) | 1986-05-06 |
Family
ID=22868346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000395191A Expired CA1204044A (en) | 1981-02-04 | 1982-01-29 | Growth of structures based on group iv semiconductor materials |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4670086A (en, 2012) |
| EP (1) | EP0070878B1 (en, 2012) |
| JP (1) | JPS58500048A (en, 2012) |
| CA (1) | CA1204044A (en, 2012) |
| DE (1) | DE3231671T1 (en, 2012) |
| GB (1) | GB2106419B (en, 2012) |
| IT (1) | IT1149534B (en, 2012) |
| NL (1) | NL8220051A (en, 2012) |
| WO (1) | WO1982002726A1 (en, 2012) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3177084D1 (en) * | 1980-04-10 | 1989-09-21 | Massachusetts Inst Technology | Method of producing sheets of crystalline material |
| JPH084067B2 (ja) * | 1985-10-07 | 1996-01-17 | 工業技術院長 | 半導体装置の製造方法 |
| JP2566914B2 (ja) * | 1985-12-28 | 1996-12-25 | キヤノン株式会社 | 薄膜半導体素子及びその形成法 |
| JPH0782996B2 (ja) * | 1986-03-28 | 1995-09-06 | キヤノン株式会社 | 結晶の形成方法 |
| JP2670442B2 (ja) * | 1986-03-31 | 1997-10-29 | キヤノン株式会社 | 結晶の形成方法 |
| AU623861B2 (en) * | 1987-08-08 | 1992-05-28 | Canon Kabushiki Kaisha | Crystal article, method for producing the same and semiconductor device utilizing the same |
| US4944835A (en) * | 1989-03-30 | 1990-07-31 | Kopin Corporation | Seeding process in zone recrystallization |
| US4988641A (en) * | 1989-10-10 | 1991-01-29 | Grumman Aerospace Corporation | Graphotaxially forming a photosensitive detector array |
| JP2785918B2 (ja) * | 1991-07-25 | 1998-08-13 | ローム株式会社 | 絶縁層の上に成長層を有する半導体装置の製造方法 |
| JPH076960A (ja) * | 1993-06-16 | 1995-01-10 | Fuji Electric Co Ltd | 多結晶半導体薄膜の生成方法 |
| US5893948A (en) * | 1996-04-05 | 1999-04-13 | Xerox Corporation | Method for forming single silicon crystals using nucleation sites |
| US6478773B1 (en) * | 1998-12-21 | 2002-11-12 | Micrus Corporation | Apparatus for deployment of micro-coil using a catheter |
| DE19845792A1 (de) * | 1998-09-21 | 2000-03-23 | Inst Halbleiterphysik Gmbh | Verfahren zur Erzeugung einer amorphen oder polykristallinen Schicht auf einem Isolatorgebiet |
| US7585792B2 (en) * | 2005-02-09 | 2009-09-08 | S.O.I.Tec Silicon On Insulator Technologies | Relaxation of a strained layer using a molten layer |
| US7402517B2 (en) * | 2005-03-31 | 2008-07-22 | Battelle Memorial Institute | Method and apparatus for selective deposition of materials to surfaces and substrates |
| CN102776566A (zh) * | 2011-05-11 | 2012-11-14 | 深圳光启高等理工研究院 | 基于多晶硅的超材料制备方法和基于多晶硅的超材料 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3389022A (en) * | 1965-09-17 | 1968-06-18 | United Aircraft Corp | Method for producing silicon carbide layers on silicon substrates |
| US3413157A (en) * | 1965-10-21 | 1968-11-26 | Ibm | Solid state epitaxial growth of silicon by migration from a silicon-aluminum alloy deposit |
| US3549432A (en) * | 1968-07-15 | 1970-12-22 | Texas Instruments Inc | Multilayer microelectronic circuitry techniques |
| US4046618A (en) * | 1972-12-29 | 1977-09-06 | International Business Machines Corporation | Method for preparing large single crystal thin films |
| US3984173A (en) * | 1974-04-08 | 1976-10-05 | Texas Instruments Incorporated | Waveguides for integrated optics |
| US3928092A (en) * | 1974-08-28 | 1975-12-23 | Bell Telephone Labor Inc | Simultaneous molecular beam deposition of monocrystalline and polycrystalline III(a)-V(a) compounds to produce semiconductor devices |
| US4323417A (en) * | 1980-05-06 | 1982-04-06 | Texas Instruments Incorporated | Method of producing monocrystal on insulator |
| US4308078A (en) * | 1980-06-06 | 1981-12-29 | Cook Melvin S | Method of producing single-crystal semiconductor films by laser treatment |
| US4330363A (en) * | 1980-08-28 | 1982-05-18 | Xerox Corporation | Thermal gradient control for enhanced laser induced crystallization of predefined semiconductor areas |
-
1982
- 1982-01-21 NL NL8220051A patent/NL8220051A/nl unknown
- 1982-01-21 DE DE823231671T patent/DE3231671T1/de active Granted
- 1982-01-21 GB GB08228109A patent/GB2106419B/en not_active Expired
- 1982-01-21 JP JP57500800A patent/JPS58500048A/ja active Granted
- 1982-01-21 WO PCT/US1982/000073 patent/WO1982002726A1/en active IP Right Grant
- 1982-01-21 EP EP82900733A patent/EP0070878B1/en not_active Expired
- 1982-01-29 CA CA000395191A patent/CA1204044A/en not_active Expired
- 1982-02-02 IT IT19393/82A patent/IT1149534B/it active
-
1985
- 1985-06-14 US US06/744,889 patent/US4670086A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE3231671T1 (de) | 1983-02-24 |
| GB2106419B (en) | 1984-08-15 |
| EP0070878A1 (en) | 1983-02-09 |
| DE3231671C2 (en, 2012) | 1992-10-01 |
| IT1149534B (it) | 1986-12-03 |
| GB2106419A (en) | 1983-04-13 |
| JPS58500048A (ja) | 1983-01-06 |
| NL8220051A (nl) | 1983-01-03 |
| IT8219393A0 (it) | 1982-02-02 |
| JPH0562451B2 (en, 2012) | 1993-09-08 |
| EP0070878A4 (en) | 1983-06-15 |
| EP0070878B1 (en) | 1987-05-13 |
| WO1982002726A1 (en) | 1982-08-19 |
| US4670086A (en) | 1987-06-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |