CA1189201A - Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide - Google Patents

Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide

Info

Publication number
CA1189201A
CA1189201A CA000417227A CA417227A CA1189201A CA 1189201 A CA1189201 A CA 1189201A CA 000417227 A CA000417227 A CA 000417227A CA 417227 A CA417227 A CA 417227A CA 1189201 A CA1189201 A CA 1189201A
Authority
CA
Canada
Prior art keywords
plasma
orifice
coil
vacuum chamber
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000417227A
Other languages
English (en)
Inventor
Donald J. Douglas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordion Inc
Original Assignee
MDS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MDS Inc filed Critical MDS Inc
Priority to CA000417227A priority Critical patent/CA1189201A/fr
Priority to JP58192286A priority patent/JPS6016063B2/ja
Priority to EP19830306372 priority patent/EP0112004B1/fr
Priority to DE8383306372T priority patent/DE3379617D1/de
Application granted granted Critical
Publication of CA1189201A publication Critical patent/CA1189201A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Plasma Technology (AREA)
CA000417227A 1982-12-08 1982-12-08 Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide Expired CA1189201A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA000417227A CA1189201A (fr) 1982-12-08 1982-12-08 Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide
JP58192286A JPS6016063B2 (ja) 1982-12-08 1983-10-14 プラズマのサンプリング装置および方法
EP19830306372 EP0112004B1 (fr) 1982-12-08 1983-10-20 Méthode et dispositif pour l'échantillonnage d'un plasma dans une chambre à vide
DE8383306372T DE3379617D1 (en) 1982-12-08 1983-10-20 Method and apparatus for sampling a plasma into a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000417227A CA1189201A (fr) 1982-12-08 1982-12-08 Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide

Publications (1)

Publication Number Publication Date
CA1189201A true CA1189201A (fr) 1985-06-18

Family

ID=4124096

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000417227A Expired CA1189201A (fr) 1982-12-08 1982-12-08 Methode et dispositif d'echantillonnage d'un plasma dans un tube sous vide

Country Status (4)

Country Link
EP (1) EP0112004B1 (fr)
JP (1) JPS6016063B2 (fr)
CA (1) CA1189201A (fr)
DE (1) DE3379617D1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8503125D0 (en) * 1985-02-07 1985-03-13 Sherritt Gordon Mines Ltd Quadrupole mass spectrometers
CA1246246A (fr) * 1985-04-24 1988-12-06 Donald J. Douglas Methode et appareil a polarisation rf pour echantillonner un plasma dans une chambre a vide
GB8602463D0 (en) * 1986-01-31 1986-03-05 Vg Instr Group Mass spectrometer
JPS62213056A (ja) * 1986-03-14 1987-09-18 Yokogawa Electric Corp 高周波誘導結合プラズマを用いた分析装置
JPS639761U (fr) * 1986-07-07 1988-01-22
JPS6326471A (ja) * 1986-07-17 1988-02-04 Yanmar Diesel Engine Co Ltd トラクタ−の油圧制御弁
JPS6355361U (fr) * 1986-09-29 1988-04-13
GB8813149D0 (en) * 1988-06-03 1988-07-06 Vg Instr Group Mass spectrometer
GB9006532D0 (en) * 1990-03-23 1990-05-23 Vg Instr Group Plasma mass spectrometer
CA2116821C (fr) * 1993-03-05 2003-12-23 Stephen Esler Anderson Ameliorations apportees a la spectrometrie de masse utilisant du plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE527952A (fr) * 1953-04-10
FR1471211A (fr) * 1966-01-18 1967-03-03 Aquitaine Petrole Spectromètre de masse

Also Published As

Publication number Publication date
EP0112004A2 (fr) 1984-06-27
EP0112004B1 (fr) 1989-04-12
EP0112004A3 (en) 1985-11-06
JPS6016063B2 (ja) 1985-04-23
JPS59105257A (ja) 1984-06-18
DE3379617D1 (en) 1989-05-18

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Legal Events

Date Code Title Description
MKEC Expiry (correction)
MKEX Expiry