EP0112004A3 - Method and apparatus for sampling a plasma into a vacuum chamber - Google Patents

Method and apparatus for sampling a plasma into a vacuum chamber Download PDF

Info

Publication number
EP0112004A3
EP0112004A3 EP83306372A EP83306372A EP0112004A3 EP 0112004 A3 EP0112004 A3 EP 0112004A3 EP 83306372 A EP83306372 A EP 83306372A EP 83306372 A EP83306372 A EP 83306372A EP 0112004 A3 EP0112004 A3 EP 0112004A3
Authority
EP
European Patent Office
Prior art keywords
sampling
plasma
vacuum chamber
vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83306372A
Other versions
EP0112004B1 (en
EP0112004A2 (en
Inventor
Donald James Douglas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordion Inc
Original Assignee
MDS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MDS Inc filed Critical MDS Inc
Publication of EP0112004A2 publication Critical patent/EP0112004A2/en
Publication of EP0112004A3 publication Critical patent/EP0112004A3/en
Application granted granted Critical
Publication of EP0112004B1 publication Critical patent/EP0112004B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Plasma Technology (AREA)
EP19830306372 1982-12-08 1983-10-20 Method and apparatus for sampling a plasma into a vacuum chamber Expired EP0112004B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA000417227A CA1189201A (en) 1982-12-08 1982-12-08 Method and apparatus for sampling a plasma into a vacuum chamber
CA417227 1982-12-08

Publications (3)

Publication Number Publication Date
EP0112004A2 EP0112004A2 (en) 1984-06-27
EP0112004A3 true EP0112004A3 (en) 1985-11-06
EP0112004B1 EP0112004B1 (en) 1989-04-12

Family

ID=4124096

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830306372 Expired EP0112004B1 (en) 1982-12-08 1983-10-20 Method and apparatus for sampling a plasma into a vacuum chamber

Country Status (4)

Country Link
EP (1) EP0112004B1 (en)
JP (1) JPS6016063B2 (en)
CA (1) CA1189201A (en)
DE (1) DE3379617D1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8503125D0 (en) * 1985-02-07 1985-03-13 Sherritt Gordon Mines Ltd Quadrupole mass spectrometers
CA1246246A (en) * 1985-04-24 1988-12-06 Donald J. Douglas Method and apparatus having rf biasing for sampling a plasma into a vacuum chamber
GB8602463D0 (en) * 1986-01-31 1986-03-05 Vg Instr Group Mass spectrometer
JPS62213056A (en) * 1986-03-14 1987-09-18 Yokogawa Electric Corp Analyzer using high frequency inductive coupling plasma
JPS639761U (en) * 1986-07-07 1988-01-22
JPS6326471A (en) * 1986-07-17 1988-02-04 Yanmar Diesel Engine Co Ltd Htdraulic control valve of tractor
JPS6355361U (en) * 1986-09-29 1988-04-13
GB8813149D0 (en) * 1988-06-03 1988-07-06 Vg Instr Group Mass spectrometer
GB9006532D0 (en) * 1990-03-23 1990-05-23 Vg Instr Group Plasma mass spectrometer
CA2116821C (en) * 1993-03-05 2003-12-23 Stephen Esler Anderson Improvements in plasma mass spectrometry

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2831134A (en) * 1953-04-10 1958-04-15 Philips Corp Extraction probe for ion source
FR1471211A (en) * 1966-01-18 1967-03-03 Aquitaine Petrole Mass spectrometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2831134A (en) * 1953-04-10 1958-04-15 Philips Corp Extraction probe for ion source
FR1471211A (en) * 1966-01-18 1967-03-03 Aquitaine Petrole Mass spectrometer

Also Published As

Publication number Publication date
CA1189201A (en) 1985-06-18
EP0112004B1 (en) 1989-04-12
EP0112004A2 (en) 1984-06-27
DE3379617D1 (en) 1989-05-18
JPS6016063B2 (en) 1985-04-23
JPS59105257A (en) 1984-06-18

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