CA1178080A - Diaphragme - Google Patents

Diaphragme

Info

Publication number
CA1178080A
CA1178080A CA000400039A CA400039A CA1178080A CA 1178080 A CA1178080 A CA 1178080A CA 000400039 A CA000400039 A CA 000400039A CA 400039 A CA400039 A CA 400039A CA 1178080 A CA1178080 A CA 1178080A
Authority
CA
Canada
Prior art keywords
diaphragm
wrinkles
wrinkle
plane
axes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000400039A
Other languages
English (en)
Inventor
Dennis K. Briefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Setra Systems Inc
Original Assignee
Setra Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Setra Systems Inc filed Critical Setra Systems Inc
Priority to CA000400039A priority Critical patent/CA1178080A/fr
Application granted granted Critical
Publication of CA1178080A publication Critical patent/CA1178080A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Diaphragms And Bellows (AREA)
CA000400039A 1982-03-31 1982-03-31 Diaphragme Expired CA1178080A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000400039A CA1178080A (fr) 1982-03-31 1982-03-31 Diaphragme

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000400039A CA1178080A (fr) 1982-03-31 1982-03-31 Diaphragme

Publications (1)

Publication Number Publication Date
CA1178080A true CA1178080A (fr) 1984-11-20

Family

ID=4122462

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000400039A Expired CA1178080A (fr) 1982-03-31 1982-03-31 Diaphragme

Country Status (1)

Country Link
CA (1) CA1178080A (fr)

Similar Documents

Publication Publication Date Title
US4434203A (en) Diaphragm
US5177579A (en) Semiconductor transducer or actuator utilizing corrugated supports
CN108362410B (zh) 一种三维力柔性传感器
US5064165A (en) Semiconductor transducer or actuator utilizing corrugated supports
US3456226A (en) Strain gage configuration
US4584625A (en) Capacitive tactile sensor
KR0137940B1 (ko) 용량성 압력차 감지기 및 이것을 과압으로부터 보호하는 방법
US5222399A (en) Load washer
Jerman The fabrication and use of micromachined corrugated silicon diaphragms
US5827980A (en) Force or extension sensor
US4836034A (en) Force sensing apparatus
KR100972161B1 (ko) 압력센서
JPH0519359B2 (fr)
US4911023A (en) Force sensing apparatus
CA1178080A (fr) Diaphragme
US2913008A (en) Nonlinear sensitive diaphragm
JP4242977B2 (ja) 円柱型静電容量式捩り歪みセンサ
JP2001153735A (ja) ロードセル
JP2001074569A (ja) 平板型静電容量式捩り歪みセンサ
US4935908A (en) Finding the direction of a sound
Wang et al. A new method to design pressure sensor diaphragm
JPH03225238A (ja) 圧力検出装置
JPS6330734A (ja) 機械・電気変換器
US20240125658A1 (en) Membrane of a sensor with multiple ranges
JPS5910591Y2 (ja) リング付き板バネ

Legal Events

Date Code Title Description
MKEC Expiry (correction)
MKEX Expiry