CA1144891A - Appareil de gravure a haute capacite - Google Patents

Appareil de gravure a haute capacite

Info

Publication number
CA1144891A
CA1144891A CA000358095A CA358095A CA1144891A CA 1144891 A CA1144891 A CA 1144891A CA 000358095 A CA000358095 A CA 000358095A CA 358095 A CA358095 A CA 358095A CA 1144891 A CA1144891 A CA 1144891A
Authority
CA
Canada
Prior art keywords
chamber
holder
workpieces
etching
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000358095A
Other languages
English (en)
Inventor
Dan Maydan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/105,620 external-priority patent/US4298443A/en
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA1144891A publication Critical patent/CA1144891A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
CA000358095A 1979-12-20 1980-08-12 Appareil de gravure a haute capacite Expired CA1144891A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/105,620 US4298443A (en) 1979-08-09 1979-12-20 High capacity etching apparatus and method
US105,620 1979-12-20

Publications (1)

Publication Number Publication Date
CA1144891A true CA1144891A (fr) 1983-04-19

Family

ID=22306869

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000358095A Expired CA1144891A (fr) 1979-12-20 1980-08-12 Appareil de gravure a haute capacite

Country Status (1)

Country Link
CA (1) CA1144891A (fr)

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Legal Events

Date Code Title Description
MKEX Expiry