CA1131930A - Electrostatic accelerometer - Google Patents

Electrostatic accelerometer

Info

Publication number
CA1131930A
CA1131930A CA349,629A CA349629A CA1131930A CA 1131930 A CA1131930 A CA 1131930A CA 349629 A CA349629 A CA 349629A CA 1131930 A CA1131930 A CA 1131930A
Authority
CA
Canada
Prior art keywords
electrodes
capacitors
pendulum
voltage
unbalance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA349,629A
Other languages
English (en)
French (fr)
Inventor
Alain Deval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Application granted granted Critical
Publication of CA1131930A publication Critical patent/CA1131930A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
CA349,629A 1979-04-11 1980-04-11 Electrostatic accelerometer Expired CA1131930A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7909213 1979-04-11
FR7909213A FR2454103A1 (fr) 1979-04-11 1979-04-11 Perfectionnements aux accelerometres pendulaires asservis

Publications (1)

Publication Number Publication Date
CA1131930A true CA1131930A (en) 1982-09-21

Family

ID=9224227

Family Applications (1)

Application Number Title Priority Date Filing Date
CA349,629A Expired CA1131930A (en) 1979-04-11 1980-04-11 Electrostatic accelerometer

Country Status (6)

Country Link
US (1) US4345474A (enExample)
CA (1) CA1131930A (enExample)
DE (1) DE3014038C2 (enExample)
FR (1) FR2454103A1 (enExample)
GB (1) GB2047902B (enExample)
IT (1) IT1140852B (enExample)

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US4353254A (en) * 1980-12-18 1982-10-12 The Singer Company Control circuit for electro-static accelerometer
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4522553A (en) * 1982-09-13 1985-06-11 Deere & Company Combine power boost system
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4634965A (en) * 1984-12-31 1987-01-06 Sundstrand Data Control, Inc. Charge balancing detection circuit
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
FR2592491B1 (fr) * 1985-12-31 1988-02-12 Onera (Off Nat Aerospatiale) Accelerometre triaxial electrostatique avec double liaison electrique a la masse d'epreuve
FR2617607B1 (fr) * 1987-06-30 1989-12-01 Applic Gles Electrici Meca Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre
US4987780A (en) * 1987-11-16 1991-01-29 Litton Systems, Inc. Integrated accelerometer assembly
GB8805266D0 (en) * 1988-03-04 1988-04-07 Marconi Co Ltd Angular displacement sensor
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
DE3831593A1 (de) * 1988-09-15 1990-03-22 Siemens Ag Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung
US4987779A (en) * 1989-02-28 1991-01-29 United Technologies Corporation Pulse-driven accelerometer arrangement
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
CA1322107C (en) * 1989-06-07 1993-09-14 Henry C. Abbink Integrated accelerometer assembly
DE69116435T2 (de) * 1990-05-30 1996-08-14 Hitachi Automotive Eng Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
JP2765316B2 (ja) * 1991-11-21 1998-06-11 日本電気株式会社 容量型三軸加速度センサ
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
FR2700614B1 (fr) * 1993-01-19 1995-04-14 Sextant Avionique Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.
US5399980A (en) * 1993-11-12 1995-03-21 Alliedsignal Inc. Capacitive measuring circuit
US5481914A (en) * 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
US5703292A (en) * 1994-03-28 1997-12-30 The Charles Stark Draper Laboratory, Inc. Sensor having an off-frequency drive scheme and a sense bias generator utilizing tuned circuits
US5488865A (en) * 1994-08-15 1996-02-06 Alliedsignal Inc. Wide-band servo accelerometer with flat leaf flexure suspension
FR2724463B1 (fr) * 1994-09-12 1996-12-13 Sagem Procede de mesure d'une acceleration par un capteur a armature mobile et capteur d'acceleration pour mettre en oeuvre le procede
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
EP1183555A4 (en) * 1999-03-17 2003-03-05 Input Output Inc hydrophone
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US7114366B1 (en) 2000-03-16 2006-10-03 Input / Output Inc. Sensor
KR100382766B1 (ko) * 2001-07-02 2003-05-09 삼성전자주식회사 커패시턴스 변화량 측정 장치 및 방법
WO2004076340A1 (en) * 2003-02-28 2004-09-10 Bae Systems Plc An accelerometer
US6904805B2 (en) * 2003-06-03 2005-06-14 Cherry Corporation Accelerometer
US6922063B2 (en) * 2003-07-11 2005-07-26 Zircon Corporation Apparatus and method for capacitive level sensor
US7334474B2 (en) * 2005-01-07 2008-02-26 Litton Systems, Inc. Force balanced instrument system and method for mitigating errors
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
US20120090393A1 (en) * 2010-06-18 2012-04-19 Baolab Microsystems Sl Unstable electrostatic spring accelerometer
US9291638B2 (en) * 2012-01-20 2016-03-22 Mcube, Inc. Substrate curvature compensation methods and apparatus
FR3002324B1 (fr) * 2013-02-19 2016-01-22 Sagem Defense Securite Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur
FR3005165B1 (fr) * 2013-04-26 2015-04-24 Sagem Defense Securite Dispositif d'acquisition differentielle de courant et procede de commande d'un tel dispositif d'acquisition
FR3105428B1 (fr) * 2019-12-20 2021-11-26 Safran Electronics & Defense Capteur accélérométrique pendulaire à détection capacitive conditionnelle

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB736006A (en) 1952-02-20 1955-08-31 Nat Res Dev Improvements in and relating to microbalances and allied instruments
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
US3209601A (en) * 1962-08-16 1965-10-05 Gen Precision Inc Quartz accelerometer
FR1535985A (fr) * 1966-10-03 1968-08-09 Gen Precision Inc Accéléromètre sous miniaturisé, à un seul axe
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
US3742347A (en) * 1971-08-25 1973-06-26 Atomic Energy Authority Uk Shaft movement differential pressure measuring apparatus embodying capacitive transducers
DE2326233C2 (de) * 1973-05-23 1986-02-06 Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
CH588069A5 (enExample) * 1975-02-27 1977-05-31 Wyler Ag
US4009607A (en) * 1975-12-24 1977-03-01 The Bendix Corporation Force measuring system including combined electrostatic sensing and torquing means
US4043204A (en) * 1976-08-16 1977-08-23 The United States Of America As Represented By The Secretary Of The Army Magnetic fluid bearing accelerometer
US4102202A (en) * 1976-11-26 1978-07-25 The Singer Company Electrostatic accelerometer

Also Published As

Publication number Publication date
IT1140852B (it) 1986-10-10
US4345474A (en) 1982-08-24
FR2454103A1 (fr) 1980-11-07
GB2047902B (en) 1983-09-28
DE3014038A1 (de) 1980-10-23
DE3014038C2 (de) 1986-09-25
IT8021302A0 (it) 1980-04-10
GB2047902A (en) 1980-12-03
FR2454103B1 (enExample) 1982-06-18

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