CA1117609A - Glow discharge heating apparatus - Google Patents

Glow discharge heating apparatus

Info

Publication number
CA1117609A
CA1117609A CA000299801A CA299801A CA1117609A CA 1117609 A CA1117609 A CA 1117609A CA 000299801 A CA000299801 A CA 000299801A CA 299801 A CA299801 A CA 299801A CA 1117609 A CA1117609 A CA 1117609A
Authority
CA
Canada
Prior art keywords
discharge
glow discharge
electrodes
electrode
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000299801A
Other languages
English (en)
French (fr)
Inventor
Hirotsugu Komura
Shigeo Ueguri
Youichiro Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3489277A external-priority patent/JPS53119445A/ja
Priority claimed from JP9127177A external-priority patent/JPS5425547A/ja
Priority claimed from JP12668277U external-priority patent/JPS5640160Y2/ja
Priority claimed from JP448878A external-priority patent/JPS5497842A/ja
Priority claimed from JP1309078A external-priority patent/JPS54105342A/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to CA364,632A priority Critical patent/CA1107351A/en
Priority to CA365,381A priority patent/CA1108245A/en
Priority to CA365,382A priority patent/CA1114029A/en
Priority to CA000367027A priority patent/CA1120555A/en
Priority to CA000367982A priority patent/CA1117610A/en
Priority to CA366,179A priority patent/CA1114030A/en
Priority to CA375,835A priority patent/CA1125867A/en
Publication of CA1117609A publication Critical patent/CA1117609A/en
Application granted granted Critical
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/005—Electrical diagrams
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Discharge Heating (AREA)
  • Lasers (AREA)
  • Plasma Technology (AREA)
CA000299801A 1977-03-28 1978-03-28 Glow discharge heating apparatus Expired CA1117609A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CA364,632A CA1107351A (en) 1977-03-28 1980-11-13 Glow discharge heating apparatus
CA365,382A CA1114029A (en) 1977-03-28 1980-11-24 Glow discharge heating apparatus
CA365,381A CA1108245A (en) 1977-03-28 1980-11-24 Glow discharge heating apparatus
CA000367027A CA1120555A (en) 1977-03-28 1980-12-17 Glow discharge heating apparatus
CA000367982A CA1117610A (en) 1977-03-28 1981-01-06 Glow discharge heating apparatus
CA366,179A CA1114030A (en) 1977-03-28 1981-02-24 Glow discharge heating apparatus
CA375,835A CA1125867A (en) 1977-03-28 1981-04-21 Glow discharge heating apparatus

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP3489277A JPS53119445A (en) 1977-03-28 1977-03-28 Ac glow discharge heater
JP34892/1977 1977-03-28
JP9127177A JPS5425547A (en) 1977-07-29 1977-07-29 Electric shock-proof device for glow discharge heating device
JP91271/1977 1977-07-29
JP12668277U JPS5640160Y2 (OSRAM) 1977-09-20 1977-09-20
JP126682/1977 1977-09-20
JP4488/1978 1978-01-18
JP448878A JPS5497842A (en) 1978-01-18 1978-01-18 Glow dischatge heater
JP1309078A JPS54105342A (en) 1978-02-07 1978-02-07 Glow-discharge heating device
JP13090/1978 1978-02-07

Publications (1)

Publication Number Publication Date
CA1117609A true CA1117609A (en) 1982-02-02

Family

ID=27518496

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000299801A Expired CA1117609A (en) 1977-03-28 1978-03-28 Glow discharge heating apparatus

Country Status (5)

Country Link
CA (1) CA1117609A (OSRAM)
DE (1) DE2813385C2 (OSRAM)
FR (1) FR2386227A1 (OSRAM)
GB (1) GB1585017A (OSRAM)
SE (2) SE441562B (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2932139A1 (de) * 1979-08-08 1981-02-26 Norbert Stauder Heizvorrichtung mit einem ein aufzuheizendes medium aufnehmenden heizkoerper
EP0066635A1 (de) * 1981-06-05 1982-12-15 THERMAG Anlagenbau AG Elektrische Heizeinrichtung und Verfahren zum Betrieb derselben
EP1441577A4 (en) * 2002-02-20 2008-08-20 Matsushita Electric Works Ltd PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE734793C (de) * 1937-08-27 1943-04-24 Bernhard Berghaus Elektrisch mittels Glimmentladung beheizter Fluessigkeitserhitzer
BE555721A (OSRAM) * 1956-03-12
DE1135112B (de) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glimmentladungsgefaess mit Wechselstrom-speisung fuer stromstarke Entladungen zur Behandlung von in das Gefaess eingebrachten Koerpern
DE1036601B (de) * 1956-06-05 1958-08-14 Hoerder Huettenunion Ag Einrichtung zur selbsttaetigen Regelung der Glimmentladung in Entladungsgefaessen fuer technische Prozesse, beispielsweise zur Oberflaechenbehandlung von Werkstuecken
CH404010A (de) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung
JPS51106252A (ja) * 1975-03-14 1976-09-21 Mitsubishi Electric Corp Guroohodenkanetsusochi
JPS51142138A (en) * 1975-06-02 1976-12-07 Mitsubishi Electric Corp Driver for glow discharge
JPS5226039A (en) * 1975-08-22 1977-02-26 Mitsubishi Electric Corp Glow dicharge heater
JPS5297443A (en) * 1976-02-12 1977-08-16 Mitsubishi Electric Corp Glow discharge heating apparatus

Also Published As

Publication number Publication date
DE2813385A1 (de) 1978-11-02
SE441562B (sv) 1985-10-14
DE2813385C2 (de) 1982-12-16
SE8106920L (sv) 1981-11-20
FR2386227A1 (fr) 1978-10-27
FR2386227B1 (OSRAM) 1984-01-13
SE7803339L (sv) 1978-09-29
GB1585017A (en) 1981-02-18
SE445163B (sv) 1986-06-02

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Legal Events

Date Code Title Description
MKEX Expiry