CA1110696A - Saturable reactor-type power supply - Google Patents
Saturable reactor-type power supplyInfo
- Publication number
- CA1110696A CA1110696A CA290,330A CA290330A CA1110696A CA 1110696 A CA1110696 A CA 1110696A CA 290330 A CA290330 A CA 290330A CA 1110696 A CA1110696 A CA 1110696A
- Authority
- CA
- Canada
- Prior art keywords
- current
- power supply
- output
- winding
- controlled rectifiers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims abstract description 62
- 238000004544 sputter deposition Methods 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims abstract description 22
- 230000008859 change Effects 0.000 claims abstract description 16
- 238000010304 firing Methods 0.000 claims abstract description 14
- 230000004044 response Effects 0.000 claims abstract description 14
- 238000012544 monitoring process Methods 0.000 claims abstract description 9
- 230000006872 improvement Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 8
- 238000010791 quenching Methods 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 description 15
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229920006384 Airco Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000005328 architectural glass Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229940035564 duration Drugs 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003334 potential effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is AC
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is AC
- G05F1/32—Regulating voltage or current wherein the variable actually regulated by the final control device is AC using magnetic devices having a controllable degree of saturation as final control devices
- G05F1/34—Regulating voltage or current wherein the variable actually regulated by the final control device is AC using magnetic devices having a controllable degree of saturation as final control devices combined with discharge tubes or semiconductor devices
- G05F1/38—Regulating voltage or current wherein the variable actually regulated by the final control device is AC using magnetic devices having a controllable degree of saturation as final control devices combined with discharge tubes or semiconductor devices semiconductor devices only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S323/00—Electricity: power supply or regulation systems
- Y10S323/91—Two of three phases regulated
Landscapes
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Power Engineering (AREA)
- Rectifiers (AREA)
- Control Of Electrical Variables (AREA)
- Coating By Spraying Or Casting (AREA)
- Plasma Technology (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Dc-Dc Converters (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/753,404 US4103324A (en) | 1976-12-22 | 1976-12-22 | Saturable reactor-type power supply |
| US753,404 | 1976-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1110696A true CA1110696A (en) | 1981-10-13 |
Family
ID=25030493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA290,330A Expired CA1110696A (en) | 1976-12-22 | 1977-11-07 | Saturable reactor-type power supply |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4103324A (OSRAM) |
| JP (1) | JPS5926963B2 (OSRAM) |
| CA (1) | CA1110696A (OSRAM) |
| DE (1) | DE2752139C2 (OSRAM) |
| FR (1) | FR2375755A1 (OSRAM) |
| GB (1) | GB1577451A (OSRAM) |
| ZA (1) | ZA776638B (OSRAM) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4276591A (en) * | 1979-05-29 | 1981-06-30 | The Perkin-Elmer Corporation | Programmable power regulating power supply |
| GB2216348B (en) * | 1988-03-29 | 1992-03-25 | Apv Uk | Power supply circuit |
| US5009764A (en) * | 1989-01-13 | 1991-04-23 | Advanced Energy Industries, Inc. | Apparatus for removal of electrical shorts in a sputtering system |
| US4963238A (en) * | 1989-01-13 | 1990-10-16 | Siefkes Jerry D | Method for removal of electrical shorts in a sputtering system |
| EP0383962A1 (de) * | 1989-02-20 | 1990-08-29 | Hauzer Holding B.V. | Hochspannungsgleichrichter und zugeordnete Steuerelektronik |
| DE69322404T2 (de) * | 1992-09-30 | 1999-04-29 | Advanced Energy Industries, Inc., Fort Collins, Col. 80525 | Topographisch genaues duennfilm-beschichtungssystem |
| US6217717B1 (en) | 1992-12-30 | 2001-04-17 | Advanced Energy Industries, Inc. | Periodically clearing thin film plasma processing system |
| US5427669A (en) * | 1992-12-30 | 1995-06-27 | Advanced Energy Industries, Inc. | Thin film DC plasma processing system |
| US5718813A (en) * | 1992-12-30 | 1998-02-17 | Advanced Energy Industries, Inc. | Enhanced reactive DC sputtering system |
| US5651865A (en) * | 1994-06-17 | 1997-07-29 | Eni | Preferential sputtering of insulators from conductive targets |
| WO1996031899A1 (en) | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| US5576939A (en) * | 1995-05-05 | 1996-11-19 | Drummond; Geoffrey N. | Enhanced thin film DC plasma power supply |
| US5882492A (en) * | 1996-06-21 | 1999-03-16 | Sierra Applied Sciences, Inc. | A.C. plasma processing system |
| US5682067A (en) * | 1996-06-21 | 1997-10-28 | Sierra Applied Sciences, Inc. | Circuit for reversing polarity on electrodes |
| ATE506463T1 (de) * | 1997-02-20 | 2011-05-15 | Shibaura Mechatronics Corp | Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet |
| US5910886A (en) * | 1997-11-07 | 1999-06-08 | Sierra Applied Sciences, Inc. | Phase-shift power supply |
| US5993613A (en) * | 1997-11-07 | 1999-11-30 | Sierra Applied Sciences, Inc. | Method and apparatus for periodic polarity reversal during an active state |
| US5990668A (en) * | 1997-11-07 | 1999-11-23 | Sierra Applied Sciences, Inc. | A.C. power supply having combined regulator and pulsing circuits |
| US5889391A (en) * | 1997-11-07 | 1999-03-30 | Sierra Applied Sciences, Inc. | Power supply having combined regulator and pulsing circuits |
| US6011704A (en) * | 1997-11-07 | 2000-01-04 | Sierra Applied Sciences, Inc. | Auto-ranging power supply |
| WO2014068780A1 (ja) * | 2012-11-05 | 2014-05-08 | 株式会社島津製作所 | 高電圧電源装置及び該電源装置を用いた質量分析装置 |
| US8854845B2 (en) * | 2012-11-06 | 2014-10-07 | General Electric Company | System and method of over-voltage protection |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2548579A (en) * | 1949-12-07 | 1951-04-10 | Gen Electric | Control circuits for electric converting systems |
| DE1046683B (de) * | 1955-06-13 | 1958-12-18 | Siemens Ag | Magnetischer Verstaerker |
| DE1719798U (de) * | 1955-12-13 | 1956-04-05 | Elektro Ind Ges M B H | Spannungsregler fuer elektrofilter. |
| US3627976A (en) * | 1967-05-09 | 1971-12-14 | Chemetron Corp | Nonconsumable electrode welding method and power supply |
| US3544913A (en) * | 1967-10-17 | 1970-12-01 | Air Reduction | Power supply |
| US3544844A (en) * | 1969-07-11 | 1970-12-01 | Hipotronics | Interlocked operation control and overload protective circuit system |
| US3609200A (en) * | 1970-07-23 | 1971-09-28 | Air Reduction | Power supply |
| US3688181A (en) * | 1971-05-26 | 1972-08-29 | Vladimir Romanovich Leep | Saturable reactor |
| SU434393A1 (ru) * | 1972-05-22 | 1974-06-30 | М. Сибгатулин, Н. Черкасов , В. Р. Лепп | Ставилиз.атор тока |
| CH561285A5 (OSRAM) * | 1973-02-19 | 1975-04-30 | Berghaus Bernhard Elektrophysi | |
| US3906289A (en) * | 1974-01-10 | 1975-09-16 | Lepp V R | Method of compressing an arc discharge |
| FR2297927A1 (fr) * | 1975-01-17 | 1976-08-13 | Anvar | Perfectionnements aux |
| US3971975A (en) * | 1975-06-26 | 1976-07-27 | Honeywell Information Systems, Inc. | Switching regulator employing biased saturable core reactors |
-
1976
- 1976-12-22 US US05/753,404 patent/US4103324A/en not_active Expired - Lifetime
-
1977
- 1977-11-07 CA CA290,330A patent/CA1110696A/en not_active Expired
- 1977-11-07 ZA ZA00776638A patent/ZA776638B/xx unknown
- 1977-11-08 GB GB46425/77A patent/GB1577451A/en not_active Expired
- 1977-11-22 DE DE2752139A patent/DE2752139C2/de not_active Expired
- 1977-12-15 JP JP52151193A patent/JPS5926963B2/ja not_active Expired
- 1977-12-19 FR FR7738346A patent/FR2375755A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5926963B2 (ja) | 1984-07-02 |
| FR2375755B1 (OSRAM) | 1983-06-03 |
| GB1577451A (en) | 1980-10-22 |
| ZA776638B (en) | 1979-06-27 |
| DE2752139A1 (de) | 1978-07-06 |
| DE2752139C2 (de) | 1984-07-26 |
| JPS5379248A (en) | 1978-07-13 |
| FR2375755A1 (fr) | 1978-07-21 |
| US4103324A (en) | 1978-07-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |