CA1087040A - Procede de metallisation chimique en phase vapeur - Google Patents

Procede de metallisation chimique en phase vapeur

Info

Publication number
CA1087040A
CA1087040A CA252,239A CA252239A CA1087040A CA 1087040 A CA1087040 A CA 1087040A CA 252239 A CA252239 A CA 252239A CA 1087040 A CA1087040 A CA 1087040A
Authority
CA
Canada
Prior art keywords
substrate
process according
ruthenium
temperature
complex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA252,239A
Other languages
English (en)
Inventor
Jeffrey N. Crosby
Robert S. Hanley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vale Canada Ltd
Original Assignee
Vale Canada Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vale Canada Ltd filed Critical Vale Canada Ltd
Application granted granted Critical
Publication of CA1087040A publication Critical patent/CA1087040A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Contacts (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
CA252,239A 1975-05-20 1976-05-11 Procede de metallisation chimique en phase vapeur Expired CA1087040A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB21497/75 1975-05-20
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Publications (1)

Publication Number Publication Date
CA1087040A true CA1087040A (fr) 1980-10-07

Family

ID=10163942

Family Applications (1)

Application Number Title Priority Date Filing Date
CA252,239A Expired CA1087040A (fr) 1975-05-20 1976-05-11 Procede de metallisation chimique en phase vapeur

Country Status (14)

Country Link
JP (1) JPS51141738A (fr)
AT (1) ATA366276A (fr)
AU (1) AU1369576A (fr)
BE (1) BE842027A (fr)
CA (1) CA1087040A (fr)
CH (1) CH603809A5 (fr)
DE (1) DE2622181A1 (fr)
DK (1) DK220776A (fr)
ES (1) ES448043A1 (fr)
FR (1) FR2311859A1 (fr)
GB (1) GB1499549A (fr)
NL (1) NL7605002A (fr)
SE (1) SE7605668L (fr)
ZA (1) ZA762641B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (ja) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> 薄膜成長方法および薄膜成長装置
JP2799763B2 (ja) * 1990-07-11 1998-09-21 同和鉱業株式会社 有機金属錯体を用いる薄膜の製造法
JP2802676B2 (ja) * 1990-07-13 1998-09-24 同和鉱業株式会社 １，３―ジケトン系有機金属錯体を用いる薄膜の製造方法
AT410757B (de) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete Skibremse
JP5792438B2 (ja) * 2010-08-12 2015-10-14 東京エレクトロン株式会社 成膜装置及び成膜方法
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Also Published As

Publication number Publication date
JPS51141738A (en) 1976-12-06
NL7605002A (nl) 1976-11-23
FR2311859A1 (fr) 1976-12-17
BE842027A (fr) 1976-11-22
AU1369576A (en) 1977-11-10
SE7605668L (sv) 1976-11-21
GB1499549A (en) 1978-02-01
DE2622181A1 (de) 1976-12-09
ATA366276A (de) 1977-12-15
CH603809A5 (fr) 1978-08-31
ES448043A1 (es) 1977-07-01
ZA762641B (en) 1977-04-27
DK220776A (da) 1976-11-21

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Legal Events

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